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梯度过渡层对硬质合金沉积类金刚石膜的耐磨性影响
引用本文:赵佳群,李刘合,景凯,许亿,刘红涛,李光.梯度过渡层对硬质合金沉积类金刚石膜的耐磨性影响[J].表面技术,2017,46(1):82-87.
作者姓名:赵佳群  李刘合  景凯  许亿  刘红涛  李光
作者单位:北京航空航天大学,北京,100191;中国科学院力学研究所,北京,100191
基金项目:国家自然科学基金(11275020);国家04科技重大专项(2014ZX04012012);中航工业通飞科技发展研究项目(TFKY2013002)资助.
摘    要:目的分析不同类型的梯度过渡层对硬质合金沉积类金刚石涂层耐磨性能的影响,制备出能有效改善硬质合金减摩抗磨性能的类金刚石涂层。方法采用真空阴极电弧离子镀和等离子体增强化学沉积技术,在硬质合金基底上制备了Ti/TiC/DLC、Ti/TiN/DLC、Ti/TiN/TiNC/DLC和Ti/TiN/TiNC/TiC/DLC四种类型的Ti多元梯度过渡类金刚石涂层。通过GNEHM-150型洛氏硬度计和电子显微镜、MFT-4000多功能材料表面性能试验仪、纳米硬度测试仪,分别评价不同类型多元梯度过渡层对硬质合金类金刚石涂层的膜基结合强度、摩擦磨损性能及纳米硬度。结果 Ti/TiC/DLC、Ti/TiN/DLC、Ti/TiN/TiNC/DLC和Ti/TiN/TiNC/TiC/DLC四种类型涂层的膜基结合强度等级分别为HF3-HF4、HF5-HF6、HF1-HF2、HF1,对两种膜基结合强度较好的涂层(Ti/TiN/TiNC/DLC、Ti/TiN/TiNC/TiC/DLC)进行摩擦磨损检测,其摩擦系数分别为0.2、0.1,且经过60 min对摩,Ti/TiN/TiNC/TiC/DLC涂层仍未出现明显剥落。结论梯度过渡层的类型对薄膜的膜基结合强度、摩擦性能有较明显的影响,Ti/TiN/TiNC/TiC/DLC结构的涂层膜基结合强度最好,具有最低的摩擦系数,表现出了优异的减摩抗磨性能,可有效改善硬质合金表面的耐磨性能。

关 键 词:类金刚石涂层  梯度过渡层  硬质合金  耐磨性  真空阴极电弧  PECVD
收稿时间:2016/4/2 0:00:00
修稿时间:2016/6/1 0:00:00

Effects of Gradient Interlayers on Wear Resistance of Diamond-like Coatings on Cemented Carbide
ZHAO Jia-qun,LI Liu-he,JING Kai,XU Yi,LIU Hong-tao and LI Guang.Effects of Gradient Interlayers on Wear Resistance of Diamond-like Coatings on Cemented Carbide[J].Surface Technology,2017,46(1):82-87.
Authors:ZHAO Jia-qun  LI Liu-he  JING Kai  XU Yi  LIU Hong-tao and LI Guang
Affiliation:School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China,School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China,School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China,School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China,School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China and Institute of Mechanics, Chinese Academy of Sciences, Beijing 100191, China
Abstract:Objective To research the influences of different gradient interlayers on wear resistance of Diamond-like Carbon Coatings(DLC) on cemented carbide. Methods Ti/TiC/DLC, Ti/TiN/DLC, Ti/TiN/TiNC/DLC and Ti/TiN/TiNC/TiC/DLC gradient composite coatings were deposited on cemented carbides by combination of vacuum cathodic arc ion plating and plasma enhanced chemical vapor deposition (PECVD). Adhesion properties, tribological properties and nano-hardness were tested by GNEHM-150 Rockwell Hardness Tester, Optical Microscope(OM), MFT-4000 Multi-function Tesher for Material Surface and Nano Hardness Tester. Results The adhesion property of Ti/TiC/DLC, Ti/TiN/DLC, Ti/TiN/TiNC/DLC and Ti/TiN/TiNC/TiC/DLC were HF3-HF4, HF5-HF6, HF1-HF2 and HF1, testing the tribological properties of 2 coatings which adhesion properties were excellent(Ti/TiN/TiNC/DLC, Ti/TiN/TiNC/TiC/DLC), friction coefficient were 0.2 and 0.1, meanwhile Ti/TiN/TiNC/TiC/DLC coatings was not obvious peeling in the 60 min rubbing. Conclusion The gradient gradient interlayers have a significant influence on the adhesion properties, tribological properties of DLC, Ti/TiN/TiNC/TiC/DLC coating has the best adhesion properties and lowest friction coefficient, showing the excellent tribological property, and effectively improving the wear resistance of cemented carbide.
Keywords:Dimond-like Carbon Coatings  Gradient Interlayers  Cemented Carbide  Wear Resistance  vacuum cathodic arc  PECVD
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