Structural and mechanical properties of AlTiN/CrN coatings synthesized by a cathodic-arc deposition process

Monolayered AlTiN and Multilayered AlTiN/CrN coatings were synthesized by a cathodic-arc deposition process, using TiAl (with 50/50 and 33/67 at.%) and Cr elemental cathodes. The atomic ratio of Al/(Ti + Al) in the AlTiN coatings was reduced to 0.44 and 0.61, respectively, compared with the corresponding Ti₅₀Al₅₀ and Ti₃₃Al₆₇ cathode materials. The multilayered AlTiN/CrN films showed smaller crystallite size, larger lattice strain, higher hardness, higher residual stress, and better adhesion strength as well than the monolayered AlTi films. The multilayered Al_0.35Ti_0.22N_0.43/CrN coating exhibited the highest hardness of about 38 GPa and the highest H³/E*² ratio value of 0.188 GPa, indicating the best resistance to plastic deformation, among all the coatings studied.