| 干涉法表面形貌测量使用的扩展深度测量范围的方法 |
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| 引用本文： | 周明宝.干涉法表面形貌测量使用的扩展深度测量范围的方法[J].光学精密工程,1999,7(4):1-8. |
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| 作者姓名： | 周明宝 |
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| 作者单位： | 中科院光电技术研究所微细加工光学技术国家重点实验室,成都,610209 |
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| 摘 要： | 系统归纳了在干涉法表面形貌测量中使用的用来扩展深度测量范围的各种方法,分析了这些方法的原理、特性及性能指标,比较了这些方法的优越性。
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| 关 键 词： | 干涉 表面形貌 测量 |
| 收稿时间： | 1998-10-12 |
| 修稿时间： | 1999-03-16 |
Method for Expanding the Depth Measuring Range in the Surface Topography Measurement by Interferometry |
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| ZHOU Ming-Bao.Method for Expanding the Depth Measuring Range in the Surface Topography Measurement by Interferometry[J].Optics and Precision Engineering,1999,7(4):1-8. |
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| Authors: | ZHOU Ming-Bao |
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| Affiliation: | State Lab. of Optical Technologies on Microfabrication, Institute of Optics &; Electronics, Chinese Academy of Sciences, Chengdu 610209 |
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| Abstract: | The existing various methods used to expand the depth measuring range for measurement of the surface topography with interferometry were described, their principle and property were analyzed, and their superiority was compared. |
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| Keywords: | Interferometry Topography Measurement |
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