大行程超精密二维运动平台定位系统的研制

为了解决光学二维线纹标准器的量值溯源和校准以及掩膜板的高精度测量,设计了高精度激光二坐标标准装置.在装置中研制了一套超精密二维运动定位平台,该平台利用双频激光干涉仪测长作为位置反馈,直流力矩电机回转轴作为摩擦轮,通过滑动摩擦力驱动滑动光杆前后移动X-Y气浮平台,该运动定位系统具有运动平稳、重复定位精度高、测量行程大于300 mm以及最小步距分辨力为10 nm的特点,可以满足高精度激光二坐标标准装置要求的大行程、微进给和纳米级定位精度的要求.

The Development of the Long Range and Ultra-precision Positioning System of Two-dimensional Movable Platform

In order to solve the problems in the traceability and calibration of the optical 2D linear standard and the high precision measurement of photomask plates, a high precision two-dimensional laser measuring instrument is developed. Ultra precision X-Y positioning platforms are designed in the measuring instrument using a laser interferometer system as the displacement feedback unit, the rotary shaft of the DC torque motor as a friction wheel to drive a friction rod to move the X-Y air bearing platforms. The test results show that the X-Y positioning platforms can move smoothly more than 300 mm. The positioning platforms have 10 nm minimum stepping resolution and good positioning repeatability. It can meet the design requirements of long movement distance, micro-feeding, and nano-scale positioning accuracy in the high precision two-dimensional laser standard instrument.