Solid phase growth and properties of Mg2Si films on Si(111) |
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| Authors: | NG Galkin AM Maslov AV Gerasimenko |
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| Affiliation: | a Institute for Automation and Control Processes Far Eastern Branch of Russian Academy of Sciences, 5, Radio Street, 690041, Vladivostok, Russia
b Institute of Chemistry Far Eastern Branch of Russian Academy of Sciences, 159, 100-years of Vladivostok Avenue, 690022, Vladivostok, Russia |
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| Abstract: | Solid phase technology of growing of epitaxial and textured Mg2Si films on Si(111) is developed. It includes fabrication of template layer, deposition of multiplayer sandwich structure Mg/Si/ and final annealing. Research results are presented on morphology, structure and optical properties of thin Mg2Si films grown on Si(111) by the method of solid-phase annealing on a template layer. |
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| Keywords: | Magnesium silicide Template Structure Optical properties |
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