| 钽喷丝头表面覆加金刚石膜的研究 |
| |
| 引用本文： | 姚锦元,王裕超.钽喷丝头表面覆加金刚石膜的研究[J].新技术新工艺,2007(2):74-76. |
| |
| 作者姓名： | 姚锦元 王裕超 |
| |
| 作者单位： | 上海交通大学,微纳科学技术研究院,微米纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
| |
| 摘 要： | 为改善钽喷丝头的品质,提高其硬度和耐碱腐蚀能力,利用热丝CVD制备不同粒径的金刚石薄膜,并通过对钽衬底的碳化处理,成功使之沉积于纯钽啧丝头表面,对纯钽喷丝头进行表面强化.通过场发射扫描电镜观察,大粒径金刚石薄膜有少量孔隙,小粒径金刚石薄膜细腻致密.硬度测试结果表明,金刚石薄膜钽喷丝头表面硬度达HV1 000以上,远高于纯钽及其它工艺处理后的钽喷丝头.可纺性试验结果表明,其性能都达到或超过传统喷丝头,完全可以取代成本高昂的铂金喷丝头.
|
| 关 键 词： | 金刚石薄膜 热丝CVD 碳化 钽喷丝头 |
| 修稿时间： | 2006-09-25 |
The Research of Crystalline Diamond Films Depositing on Ta Spinneret |
| |
| YAO Jinyuan,WANG Yuchao.The Research of Crystalline Diamond Films Depositing on Ta Spinneret[J].New Technology & New Process,2007(2):74-76. |
| |
| Authors: | YAO Jinyuan WANG Yuchao |
| |
| Abstract: | To improve the quality of Ta Spinnerets with high hardness and alkali-proof corrosion,HFCVD is used to deposit crystalline diamond films with different sizes of grain on carbonized Ta spinnerets.By SEM,the crystalline diamond film with large grain has a few interspaces,but the crystalline diamond film with small grain is compact.The results of hardness test show that the crystalline diamond films Ta spinnerets are above HV1000.The application experiments show they work better than traditional spinneret and can replace high-cost Au Pt spinnerets. |
| |
| Keywords: | crystalline diamond film HFCVD carbonization Ta spinneret |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
