| 微机械热对流倾角仪温度补偿技术研究 |
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| 引用本文： | 王娟,徐淑静,徐爱东.微机械热对流倾角仪温度补偿技术研究[J].微纳电子技术,2006,43(8):393-396,404. |
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| 作者姓名： | 王娟 徐淑静 徐爱东 |
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| 作者单位： | 中国电子科技集团公司第十三研究所,石家庄,050051 |
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| 摘 要： | 介绍了微机械热对流倾角仪的工作原理和结构设计,利用有限元分析软件,计算了在不同倾斜状态下二维密闭腔中点热源引起的对流场和温度场,提出了环境温度对热对流倾角仪影响的模型。根据仿真结果,在电路中增加了加热丝恒定温度控制电路,建立了基于软件的环境温度补偿算法,实现了对温度影响的补偿。经测试,环境温度从-40℃变化到60℃时,倾角仪0°输入的温度稳定性为0.07°,10°输入的温度稳定性为0.02°。
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| 关 键 词： | 倾角仪 微机电系统 温度补偿 |
| 文章编号： | 1671-4776（2006）08-0393-04 |
| 收稿时间： | 2006-04-13 |
| 修稿时间： | 2006-04-13 |
Research on Convective Inclinomete Temperature Compensating |
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| WANG Juan,XU Shu-jing,XU Ai-dong.Research on Convective Inclinomete Temperature Compensating[J].Micronanoelectronic Technology,2006,43(8):393-396,404. |
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| Authors: | WANG Juan XU Shu-jing XU Ai-dong |
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| Abstract: | A convective inclinometer and its principle and instructure design were presented.The temperature distributions in a sealed cavity at different inclining state were simulated,and the convective inclinometer's thermal model was established.According to the simulation results,a servo circuit is designed to keep the temperature of the heater constantly.Based on micro-controller and a compensating arithmetic,the temperature drift of the convective inclinometer is greatly reduced.The measurement results show that the temperature drift of the compensated inclinometer is 0.07° at 0° and 0.02° at 10° when the environment temperature varies from-40 ℃ to +60 ℃. |
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| Keywords: | convective inclinometer ME MS temperature compensating |
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