| 用于传感的聚合物微谐振环的研制 |
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| 引用本文： | 郭洪波,鄂书林,邓文渊,孔光明.用于传感的聚合物微谐振环的研制[J].微细加工技术,2008(5). |
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| 作者姓名： | 郭洪波 鄂书林 邓文渊 孔光明 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春,130033;中国科学院研究生院,北京,100049
2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春,130033 |
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| 摘 要： | 对一种用于传感的聚合物微谐振环进行了研制.器件为多模耦合器结构,作为微谐振环的输入/输出耦合结构.微谐振环采用跑道形结构.首先分析了器件的原理,给出了器件的优化设计参数.采用紫外光敏材料SU-8和CYTOP作为波导芯层和下包层材料,制作了上述结构的微谐振环器件,并进行了测试.扫描电镜的结果显示,所制备器件的整体形貌比较清晰,波导结构均匀光滑,侧壁陡直度较高.采用截断法测得单模直波导的传输损耗约为2.2 dBcm.对多模耦合器(MMI)结构和弯曲波导的测试表明,MMI结构在较宽的波长范围内实现了接近50:50的功分比,且损耗较低,而纯弯曲波导结构的通光性能良好.测量得到的器件谐振输出光谱表明,器件在主谐振峰处的插入损耗约为38dB,自由光谱区(FSR)约为1.87nm.过数据处理分析得到弯曲波导的传输损耗约为5.2 dB/cm.提出了进一步降低器件损耗、改善器件性能的措施.
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| 关 键 词： | 微谐振环 传感 聚合物材料 多模耦合器(MMI) |
Design and Fabrication of Polymer Micro-ring Resonator Used for Sensors |
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| GUO Hongbo,E Shulin,DENG Wenyuan,KONG Guangming.Design and Fabrication of Polymer Micro-ring Resonator Used for Sensors[J].Microfabrication Technology,2008(5). |
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| Authors: | GUO Hongbo E Shulin DENG Wenyuan KONG Guangming |
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| Affiliation: | GUO Hong-bo1,2,E Shu-lin1,DENG Wen-yuan1,KONG Guang-ming1,2(1.State Key Laboratory of Applied Optics,Chang chun Institute of Optics,FineMechanics , physics,Chinese Academy of Sciences,Changchun 130033,China,2.Graduate School of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | In this article,a micro-ring resonator for sensing application was investigated,the principle of the device was analyzed,and the optimized parameters were obtained.A racetrack polymer micro-ring resonator,using MMI as input/output coupling structure,was fabricated on silicon chips by lithography technique.Polymer CYTOP was selected as a cladding layer and polymer SU8 as a waveguide layer.The device was tested with a fiber-waveguide precision alignment system In optical measurement,a fiber-waveguide precisio... |
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| Keywords: | micro-resonator sensing polymer material MMI |
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