| 小型磁偏转质谱计研究现状及进展 |
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| 引用本文： | 赵以德,郭美如,李泰国,岳瑞,肖玉华,王亮,张文台.小型磁偏转质谱计研究现状及进展[J].真空与低温,2014(2):71-76. |
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| 作者姓名： | 赵以德 郭美如 李泰国 岳瑞 肖玉华 王亮 张文台 |
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| 作者单位： | 兰州空间技术物理研究所真空低温技术与物理重点实验室,甘肃兰州730000 |
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| 摘 要： | 小型磁偏转质谱计因稳定性好、定量性好、丰度灵敏度高、结构简单、体积小、功耗低等特性，广泛应用于诸多领域实现原位实时气体成分分析。首先介绍了单聚焦磁偏转质谱计、串联式双聚焦磁偏转质谱计和正交式双聚焦磁偏转质谱计三种磁偏转质谱计的工作原理和特点，并对其最新研究现状进行了综述，最后介绍了微机电系统（MEMS）技术在质谱计小型化中的应用并对小型质谱计的发展方向进行了分析。
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| 关 键 词： | 小型化 磁偏转质谱计 原位分析 综述 |
AN INTRODUCTION TO MINIATURE SECTOR MASS SPECTROMETER |
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| ZHAO Yi-de,GUO Mei-ru,Li Tai-guo,YUE Rui,XIAO Yu-hua,WANG Liang,ZHANG Wen-tai.AN INTRODUCTION TO MINIATURE SECTOR MASS SPECTROMETER[J].Vacuum and Cryogenics,2014(2):71-76. |
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| Authors: | ZHAO Yi-de GUO Mei-ru Li Tai-guo YUE Rui XIAO Yu-hua WANG Liang ZHANG Wen-tai |
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| Affiliation: | (Science and Technology on Vacuum ＆ Cryogenics Technology and Physics Laboratory, Lanzhou Institute of Space Technology and Physics, Lanzhou 730000, China) |
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| Abstract: | The miniature sector Mass Spectrometer has been deployed for many real-time in-situ analysis applications due to its simplicity, high sensitivity, small size, low power consumption, stability and suitability to harsh environments. The three types of sector Mass Spectrometers are described and their development and applications are introduced. Those are signal-focusing magnetic sector Mass Spectrometers, tandem field double-focusing sector Mass Spectrometer and crossed electric and magnetic fields or E×B superimposed field sdouble-focusing sector Mass Spectrometer. Miero-electromechanical Systems （ MEMS ） applied to Mass Spectrometer are noted and the possible future development of miniature Mass Spectrometer is analyzed. |
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| Keywords: | miniature sector Mass Spectrometer in-situ analysis review |
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