Monolithically integrated InGaAs-AlGaInAs Mach-Zehnder Interferometer optical switch using quantum-well intermixing

A highly efficient monolithically integrated Mach-Zehnder interferometer (MZI) optical switch based on a 1.5-/spl mu/m InGaAs-AlGaInAs multiple-quantum-well structure is reported. The device was fabricated by integrating phase shifter sections with bandgap-shifted low-loss waveguides obtained by a single step sputtered SiO/sub 2/-annealing quantum-well intermixing technique. Evaluation of the refractive index change induced by current injection (plasma, band-filling, band-shrinkage effects) and applied electric field (quantum confined Stark effect) based on the MZI was investigated. A device with an active length of 400 /spl mu/m in one of the MZI arms had an extinction ratio /spl ges/20 dB with a half-wavelength current (I/sub /spl pi//) and half-wavelength voltage V/sub /spl pi// as low as 3.2 mA and 3.5 V (1.9 V in push-pull configuration), respectively.