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精密压阻弹性体及力敏触觉传感器阵列
引用本文:董伟,曾鹏,巴龙,吴菊英,黄渝鸿,梅军.精密压阻弹性体及力敏触觉传感器阵列[J].传感技术学报,2009,22(11).
作者姓名:董伟  曾鹏  巴龙  吴菊英  黄渝鸿  梅军
作者单位:东南大学分子电子学实验室
基金项目:用于高性能力敏传感器的有序纳米材料
摘    要:空气热氧化用多元醇溶剂热方法得到的金属钌纳米颗粒,可以得到纳米氧化钌颗粒,将其与金属钌纳米粉体混合,使其具有适当的聚集特性,将混合粉体与硅橡胶复合,呈现具有良好的压阻重复性和压阻敏感性,测量不同尺寸电极间的压阻行为,表明此种导电硅橡胶在毫米尺寸以上呈现一定的标度不变性,表明材料在一定尺寸范围内满足微型化要求,适用于集成的压阻弹性体应力测量阵列,我们制备了测量面载荷分布的阵列电极,设计了用于动态触觉传感测量的电路和支持软件,结果表明,针对压阻材料电阻/载荷敏感特性,通过每个压阻单元微秒级的信号获取和数据处理,可以实现毫米尺度的静态或动态载荷三维成像,该传感阵列的可重复和定量特性使其基本满足实用的人体工学器件要求。

关 键 词:压阻导电橡胶    触觉传感器阵列    成像

Precious Piezoresistant Elastomer and Pressure Sensitive Sensor Arrays
Abstract:Ruthenium nanoparticles fabricated using polyol method were thermal oxided, yielding ruthenium oxide nanocrystals. The mixture of ruthenium oxide and ruthenium nanoparticles have moderate aggregation behavior. After mixing the nanoparticles with silicone rubber and vulcanization, the composite exhibits excellent piezoresistant sensitivity and reproducibility. The measurements of piezoresistance on various size electrodes show that the material has a certain scale invariance above size limit of minimeter. Nvariance, which means the microscale application can be fulfil above this size, such as integrated strss measurement arrays based on piezoelastomer. The electrode arrays for the measurement of planar stress distribution have been fabricated. The electronic device and supporting software havealso been composed for dynamic tactile sensor array. The measurements show that the static and dynamic load distribution and its visulization on the surface of elastomer can be realized by acquired and processed within microseconds, based on the piezoresistant response of individual sensing element. The repeatability and quantity of this array can satisfy the basic requirments of ergonomics devices
Keywords:piezoresistant conducting rubber  tactile sensor arrays  imaging
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