| Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique |
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| 引用本文： | 秦政坤,贺飞,刘春玲,王立忠,马春生.Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J].半导体学报,2010(7):29-31. |
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| 作者姓名： | 秦政坤 贺飞 刘春玲 王立忠 马春生 |
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| 作者单位： | College;Information;Technology;Jilin;Normal;University;State;Laboratory;Integrated;Optoelectronics; |
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| 基金项目： | Project supported by the National Natural Science Foundation of China(No.60576045). |
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| 摘 要： | Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is abo...
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| 关 键 词： | 阵列波导光栅 复溶 蒸汽 波导阵列 技术 聚合物 平面 制造 |
Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique |
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| Qin Zhengkun He Fei Liu Chunling Wang Lizhong , Ma Chunsheng.Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J].Chinese Journal of Semiconductors,2010(7):29-31. |
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| Authors: | Qin Zhengkun He Fei Liu Chunling Wang Lizhong Ma Chunsheng |
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| Affiliation: | Qin Zhengkun He Fei Liu Chunling Wang Lizhong , Ma Chunsheng (1 College of Information , Technology,Jinlin Normal University,Siping 136000,China) (2 State Key Laboratory of Integrated Optoelectronics,Changchun 130012,China) |
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| Abstract: | Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-... |
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| Keywords: | arrayed waveguide grating flat spectral response steam-redissolution 3-dB bandwidth crosstalk |
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