压电陶瓷驱动器蠕变特性的研究

压电陶瓷驱动器具有位移分辨率高、体积小、响应快、输出力大、不发热等优点，但其固有的迟滞、蠕变和非线性，严重影响了它的定位精度。在大行程微动工作台中，需要借助于位移放大机构来克服压电陶瓷驱动器位移行程小的缺点，但放大机构在放大位移的同时，也放大了压电陶瓷蠕变和迟滞误差的影响。本文通过对一种大行程压电陶瓷微动工作台蠕变特性的研究性实验，得到了该机构的蠕变特性曲线，找到了压电陶瓷驱动器蠕变的规律，为进一步修正和减少蠕变误差的影响、提高系统的定位精度，提供了科学的依据。

Study on PZT actuator creep characteristics

The PZT actuator demonstrates superior characteristics of high displacement resolution,miniature size, fast dynamic response,large output capacity,no self-heating and etc.But its inherent hysteresis,creep and non-lin- earity effect its positioning accuracy badly.In large travel range worktable,a displacement amplification mechanism is used to overcome the shortcomings of small travel range of PZT actuator,but this mechanism also enlarges the effect of hysteresis and creep errors while it amplifies the displacement.Through experimental study on the creep characteristics of a large travel range PZT worktable,its creep characteristic curve was obtained,and the rules of the PZT creep characteristics were found,which provides a scientific basis to further correct and reduce the creep effect of the PZT and improve the positioning accuracy of the system.