基于微梁的面内高g值加速度计设计

提出了一种基于微梁的面内高g值加速度计的设计方案。根据材料力学中悬臂梁的相关理论,建立了微梁检测结构的等效模型,推导出了微梁应力和中间主梁应力的比值的表达式。通过改变结构的尺寸来调节比值,可以设计出更高量程和更高灵敏度的压阻式传感器。利用ANSYS软件对微梁和中间主梁的最大应力及电阻区应力进行了仿真分析,验证了设计方案的可行性。完成了一种量程可达15万gn的面内双轴高g值传感器的设计。

Design of in-plane high-g value MEMS accelerometer is based on the micro beam

This paper proposed a design of the high-g acceleration meter based on the inner surface micro-beam. According to the theory of mechanics of materials cantilever, the equivalent model of micro beam detection structure is established,and the expression of the micro beam and main girder stress ratio is calculated, Greater range and higher sensitivity piezoresistive sensors were designed by changing the size of the structure to adjust the ratio. Using ANSYS software which can emulate the maximum stress and resistance area stress of micro-beam and the main beam in the middle verifies the reliability of the design theory . An in-plane Biaxial high-g value in the range of up to 150 000 g sensor was designed.