| 全柔性热膜微传感器阵列制造工艺及性能优化 |
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| 引用本文： | 马炳和,赵建国,邓进军,苑伟政.全柔性热膜微传感器阵列制造工艺及性能优化[J].光学精密工程,2009,17(8):1971-1977. |
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| 作者姓名： | 马炳和 赵建国 邓进军 苑伟政 |
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| 作者单位： | 西北工业大学,陕西省微/纳米系统重点实验室,陕西,西安,710072 |
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| 基金项目： | 国家自然科学基金航空飞行器重大研究计划项目，航空科学基金项目，国家863高技术研究发展计划资助项目 |
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| 摘 要： | 利用MEMS微加工技术，以镍作为热敏材料，在柔性衬底上制作出了全柔性热膜微传感器阵列，具有软性可弯、便于曲面贴附实现分布测量、高灵敏度的特点。结合制备工艺与性能测试，首次系统性分析掌握了氩气压强、衬底温度、溅射功率、退火温度等工艺参数对电阻温度系数的影响规律。通过优化工艺参数以提高柔性热膜微传感器的电阻温度系数，使其达到了4640 ppm/℃，并且保持了较好的线性度。
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| 关 键 词： | 镍 柔性热膜 微传感器阵列 电阻温度系数 微加工 |
| 收稿时间： | 2009-02-13 |
| 修稿时间： | 2009-04-13 |
Fabrication of flexible hot film sensor array and its optimization |
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| MA Bing-he,ZHAO Jian-guo,DENG Jin-jun,YUAN Wei-zheng.Fabrication of flexible hot film sensor array and its optimization[J].Optics and Precision Engineering,2009,17(8):1971-1977. |
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| Authors: | MA Bing-he ZHAO Jian-guo DENG Jin-jun YUAN Wei-zheng |
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| Abstract: | Hot film sensors array with nickel as sensing material fabricated on a flexible substrate has been developed, which is flexible and can be attached upon curved surface, such as airfoil’ surface, for rapid distribution measurement of temperature or flow parameters with minimal invasion. The influence of magnetron sputtering and heat treatment parameters, including argon pressure, substrate temperature, sputtering power, and annealing temperature, on sensor’s temperature coefficient of resistance (TCR) has been studied for first time. Finally, high TCR of 4640ppm/℃ with good linearity has been obtained. |
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| Keywords: | nickel flexible hot film sensors array temperature coefficient of resistance microfabrication |
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