基于遗传算法的微机械陀螺的多学科设计优化

基于micro-electro-mechanical system(MEMS)技术的微机械陀螺是集传感器、致动器、检测与控制等于一体的复杂多学科交叉系统，其整体特性是各个子系统综合作用的结果。在充分考虑工艺、结构、电路、工作环境等多学科或因素的约束条件下，提出微机械陀螺的多学科概念设计模型。以陀螺的灵敏度最大为优化目标，利用遗传算法对设计模型进行全局优化，获得初步的最优设计方案，并采用有限元软件ANSYS验证优化结果的正确性。

GENETIC ALGORITHM BASED MULTIDISCIPLINARY DESIGN OPTIMIZATION OF MICROMACHINED GYROSCOPE

Micromachined gyroscope is a kind of typical micro-electro-mechanical system(MEMS) device, which consists of sensor, actuator, and control circuit, etc. Considering the influence of fabrication condition, structural frequency, readout circuit, and environmental quality factor on the behaviors of MEMS, a multidisciplinary conceptual model was developed for maximizing the whole performance of micromachined tuning fork gyroscope. Under the constraints of the proposed multidisciplinary design model, genetic algorithm was applied to obtain the optimum of mechanical sensitivity. The results from optimization were verified using the finite element analysis software-ANSYS. It is demonstrated that this approach is very effective for the global design optimization of micromachined gyroscope compared with the traditional gradient-based method and also can be used to the systematic design of other MEMS devices.