| MEMS电容式加速度计的动态特性分析 |
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| 引用本文： | 徐淑静,杨拥军.MEMS电容式加速度计的动态特性分析[J].微纳电子技术,2011,48(5):321-325,332. |
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| 作者姓名： | 徐淑静 杨拥军 |
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| 作者单位： | 中国电子科技集团公司,第十三研究所,石家庄,050051 |
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| 摘 要： | 针对梳齿电容形式的微机械加速度计,对其工作原理和动态性能进行了分析。该微结构的质量块由4个折叠梁支撑,采用梳齿结构形成差分检测电容用于检测质量块的位移。通过理论推导得到了结构的质量、刚度和阻尼的计算公式。组成梳齿结构的两平行极板间的气体在极板运动时产生两种作用力:阻尼力和弹性力,运动频率较低时阻尼力为主要表现形式,高频时弹性力则占主要因素。针对一组特定的结构参数,对气体压强分别为100Pa和0.1MPa时微机械加速度计的频率响应特性进行了分析,当气体压强太小时,会造成系统带宽的降低,而当气体压强较高时,系统的动态特性表现良好,并在电容极板间隙约为3μm时,系统的动态特性达到最优。
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| 关 键 词： | 微电子机械系统(MEMS) 加速度计 梳齿结构 动态特性 压膜阻尼 |
Dynamic Characteristics Analysis of MEMS Capacitive Accelerometers |
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| Xu Shujing,Yang Yongjun.Dynamic Characteristics Analysis of MEMS Capacitive Accelerometers[J].Micronanoelectronic Technology,2011,48(5):321-325,332. |
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| Authors: | Xu Shujing Yang Yongjun |
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| Affiliation: | Xu Shujing,Yang Yongjun(The 13th Research Institute,CETC,Shijiazhuang 050051,China) |
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| Abstract: | The working principle and dynamic performance of MEMS capacitive accelerometers with the comb drive structure were analyzed.The proof-mass of the micro structure is suspended by four folded beams,and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass.The calculation formulas of the mass,mechanical stiffness and damping coefficient were obtained through the theoretical derivation.The gas between the two parallel plates forming the comb drive stru... |
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| Keywords: | micro-electromechanical system(MEMS) accelerometer comb drive structure dynamic characteristic squeeze-film damp |
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