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High resolution interface circuit for closed-loop accelerometer |
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| Authors: | Yin Liang Liu Xiaowei Chen Weiping Zhou Zhiping |
| Affiliation: | 1. Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China 2. Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China;Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China |
| Abstract: | This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer.The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback.A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package.The architecture only requires single ended operational amplifiers,transmission gates an... |
| Keywords: | closed-loop accelerometer interface circuit switched capacitor low noise |
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