几种新型集成硅微(型)传感器系统

介绍了作者近年来在硅微机械加工技术和半导体集成电路技术相结合的基础上研制的硅微机械与光纤组合式阵列声传感器、集成硅微机械光压力传感器和微型多道成像光谱分析系统的结构、工作原理及制造工艺.     

基于TinyOS的微型无线感知网技术研究

具有感知能力、计算能力和通信能力的微型无线感知网，能够协同地监测、感知和采集各种环境或监测对象的信息，开始在世界范围内出现。本文在介绍微型无线感知网基本概念和原理的基础上，论述基于TinyOS的感知网系统主要组成，然后讨论微型无线感知网中多跳路由协议及其具体应用，最后对TinyOS的感知网的感知数据进行处理。本文的研究和实现对于超微型无线感知网应用具有很好的应用价值。     

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

This study designs and characterizes a novel MEMS-based flow-rate micro-sensor consisting of a platinum resistor deposited on a silicon nitride-coated silicon cantilever beam. Due to the difference between the thermal conductivities of the silicon nitride film and the silicon beam, the tip of the cantilever structure bends slightly in the upward direction. As air travels across the upper surface of the sensor, it interferes with the curved tip and displaces the beam in either the upward or the downward direction. The resulting change in the resistor signal is then used to calculate the velocity of the air. A flow-direction micro-sensor is constructed by arranging eight cantilever structures on an octagonal platform. Each cantilever is separated from its neighbors by a tapered baffle plate connected to a central octagonal pillar designed to attenuate the aerodynamic force acting on the cantilever beams. By measuring the resistor signals of each of the cantilever beams, the micro-sensor is capable of measuring both the flow rate and the flow direction of the air passing over the sensor. A numerical investigation is performed to examine the effects of the pillar height and pillar-to-tip gap on the airflow distribution, the pressure distribution, the bending moment acting on each beam, and the sensor sensitivity. The results show that the optimum sensor performance is obtained using a pillar height of 0.75 mm and a pillar-to-tip gap of 5 mm. Moreover, the sensitivity of the octagonal sensing platform is found to be approximately 90% that of a single cantilever beam.     

微机电系统的研究与展望

微机电系统是面向2l世纪的高新技术。文章对微机电系统产生的背景、组成特征、发展现状及应用前景进行了全面分析。在此基础上，论述了MEMS未来发展的趋势。     

求解无线微传感器网络生存时间的上限

求解生存时间的上限是无线微传感器网络生存时间优化过程中的重要环节。它与既可以作为最大生存时间的粗略估计,又直接应用于部分近似算法的优化过程。本文介绍我们对该问题的研究。