Micro-spectrophotometer based on micro electro-mechanical systems technology

A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient r and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient r > 0.999, and its refractive index resolving power is better than 0.01. __________ Translated from Optics and Precision Engineering, 2006, 14(6): 990–997 [译自: 光学精密工程]     

一种采用微硅片狭缝的新型微小型光纤光谱仪

研制了一种采用微硅片狭缝代替传统机械狭缝的微小型光纤光谱仪。采用MEMS(微机电系统)工艺制造出了体积小、厚度薄的一体式微硅片狭缝,并分析了微硅片狭缝的狭缝不平直度对微小型光纤光谱仪分辨率的影响,通过测试系统分辨率的实验,验证了采用微硅片狭缝的可行性。同时,对微小型光纤光谱仪的光谱带宽和像元分辨力进行了讨论,为波长的标定提供了一种理论依据。通过对采集的汞灯谱线的分析和MATLAB的精确计算,验证了所提出的通用波长-像元迭代公式的正确性,从而研制出了一种采用微硅片狭缝的半峰全宽为0.85 nm,波长标定精度小于0.2 nm,体积为50 mm×46 mm×14 mm的微小型光纤光谱仪。     

基于MEMS技术的微型分光光度计

研制出了一种采用微硅片对准技术和微硅片狭缝的新型微型分光光度计。采用MEMS工艺制造出了体积小、精度高的微硅片对准机构和微硅片狭缝,并且对其性能进行了分析和论证。同时对影响分光光度计线性度精度的样品池的光学特性进行了分析,推导出了透射光强与样品池的折射率、被探测介质的折射率关系式,并进一步分析因折射率引起光强的变化对吸光度的影响。实验结果表明,该微型分光光度计可以分辨出介质折射率相差0.01介质,同时参比介质的不同仅仅对A-C曲线产生平移,而对相关系数和斜率无任何影响,通过对实验数据的计算得到以空气和蒸馏水两种折射率的介质为参比时的系统相关系数都大于0.999,说明所研制的基于MEMS技术的微型分光光度计具有高度显著线性相关性。