基于有限元的亚微米级微进给装置性能分析与设计

介绍了一种新型的液压式微进给装置.在模型简化的基础上,给出进给装置结构设计公式.利用有限元软件ANSYS对结构变形进行分析,并在此基础上设计了微进给装置,对其特性进行了分析.分析表明进给装置能够同时满足输出与输入是线性关系,刚度高等特点.     

具有非对称分段线性刚度的超磁致伸缩微位移致动器的非线性分析

研究了超磁致伸缩微位移致动器的非线性动力学特性 ,分析了碟簧非对称分段线性刚度对微位移致动器动力学特性的影响 ,基于理论分析计算结果 ,研制出应用于精密机械加工的微进给系统的稀土超磁致伸缩微位移致动器 ,为实际开发换能器产品提供了设计依据     

MR－2型微机器人的研究

提出一种新型三自由度微机器人的机械结构及其控制系统。微机器人的机构具有三轴一体、体积小和内藏传感器等特点。计算机仿真和实验结果表明，该微机器人的动态性能好，重复精度高，既可以单独使用，也可安装在一般工业机器人的终端执行器上，从而构成高精度装配机器人和能进行各种檄操作的高精度机器人。     

微机电系统的研究与展望

微机电系统是面向2l世纪的高新技术。文章对微机电系统产生的背景、组成特征、发展现状及应用前景进行了全面分析。在此基础上，论述了MEMS未来发展的趋势。     

Ultra-precision grinding of PZT ceramics—Surface integrity control and tooling design

A comprehensive statistical analysis of the factors controlling surface quality and form in ultra-precision grinding of polycrystalline lead zirconate titanate (PZT) ceramics has been conducted. The work focuses on practical grinding conditions and it includes an assessment of the interactions that exist between the method of material removal and the machine design. In the first phase of experimentation, defects including porosity and the fractural damage induced in the subsurface area were investigated. Machining trials were then conducted which were used to highlight the significant technical factors or combinations of technical factors that influence surface roughness, surface flatness and textural damage. A model for the systematic material removal mechanism which suggests that a relatively large depth of cut and ‘soft contact’ can be used to achieve improved surface integrity is proposed. In order to verify the suggested model, a series of design modifications to the tooling structure were made and the nature of the contact at the material removal interface was studied. Dramatic improvements in surface quality were achieved by incorporating a compliant polymer layer into the vacuum chuck used to hold the ceramics during grinding.     

Simulation of a gas-liquid phase-change micro-actuator

This paper presents a mathematical model and simulation of the gas-liquid phase-change micro-actuator. We have fabricated a gas-liquid phase-change micro-actuator that is 16 mm diameter and 10 mm thick, and that has a liquid pool with a volume of 79 ml. The operating fluid is R-113. By dividing the operating fluid to two thermal elements, we could make a simple mathematical model for the actuator. By the experiment and the simulation, the actuator was confirmed that it can reciprocate continuously in a 0.5-mm stroke by the averaged input power of 0.525 W.     

Local deposition of polypyrrole on aluminum by anodizing, laser irradiation, and electrolytic polymerization and its application to the fabrication of micro-actuators

Polypyrrole was deposited at selected areas on aluminum by anodizing, laser irradiation, and electrolytic polymerization, and the application of the technique for fabricating micro-actuators was attempted. Aluminum specimens covered with porous type anodic oxide films were irradiated with a pulsed Nd-YAG laser to remove the oxide films locally, and then thin Ni layers were deposited at areas where film had been removed. Polypyrrole could be successfully deposited only on the Ni layer by anodic polarization of the specimens in pyrrole monomer solution, and a polypyrrole/Ni bilayer structure could be obtained by dissolution of the aluminum substrate and anodic oxide film in NaOH solutions. The bilayer structure was found to be inactive to doping and dedoping of ions during anodic and cathodic polarization. A three-layer structure, nitrocellulose/Ni/polypyrrole, fabricated by electrolytic polymerization after nitrocellulose coating on a Ni layer detached from the aluminum substrate, showed ion-doping and -dedoping activity, suggesting the possibility of fabricating micro-actuators in this manner.     

Fabrication of a three-dimensional micro-manipulator by laser irradiation and electrochemical techniques and the effect of electrolytes on its performance

Ribbon type and three-dimensional micro-actuators, consisting of three-layer structure of acrylic acid resin/Au/polypyrrole, were fabricated by aluminum anodizing, laser irradiation, and electrochemical techniques, and their performance was examined. Anodized aluminum specimens were irradiated with a pulsed Nd-YAG laser to remove anodic oxide films locally, and then an Au layer was deposited at the area where film had been removed. The subsequent electrophoretic deposition of acrylic acid resin on the Au layer, dissolution of anodic oxide film and the metal substrate, and deposition of polypyrrole on backside of Au layer by electro-polymerization enabled the fabrication of a three-layer actuator. Cyclic voltammetry of the ribbon type actuator in different electrolyte solutions showed that redox reactions of polypyrrole is accompanied with doping and dedoping of hydrated cations, and that the redox reaction strongly depends on the valency of cations in the solutions. The three-dimensional micro-actuator showed good performance as a manipulator, gripping and moving objects of several milligram in solutions.