高分子纳米LB膜的制备及其光刻性能研究

合成并表征了N-十六烷基丙烯酰胺（HDA）和对叔丁基苯酚甲基丙烯酸酯（BPhMA）的共聚物p（HDA-BPhMA）s。当HDA含量较高时，共聚物可在气，液界面上形成稳定，排列紧密的单分子薄膜，并可以Y型膜的方式沉积在各种固体基片上，形成多层均匀的Langrnuir-Blodgett（LB）膜。这种LB膜被成功地应用于光刻，获得了分辨率为0.5μm的LB膜图形。以该图形为抗蚀层，可将图形进一步转移至金属薄膜上，得到分辨率较高的金属图形，在图形转移的过程中，这种LB膜显示出较高的抗蚀性，有望作为纳米抗蚀薄膜材料在亚微米刻蚀领域得到应用。     

光刻技术及其新进展

介绍了用于制作半导体集成电路的光刻工艺的概念、分类及发展过程，阐述了当前光刻工艺的主流，并重点介绍了极紫外光刻、X射线光刻、电子束光刻、离子束光刻、纳米图形转印等下一代光刻技术的特点及其面临的挑战。     

软X射线光刻研究现状和发展

新的一代光刻设备朝着两个方向发展 ,一是趋向于大数值孔径、短波长 ;另一方面国际上正在寻求适应二十一世纪、小于 0 .1 5微米线宽的软 X射线投影光刻技术 ,预计成为下世纪制造千兆位以上超大规模集成电路的主要设备。软 X射线光刻及其应用研究是目前国际上非常活跃的高技术领域。把软 X射线光刻列为重要发展项目。本文摘要综述德国、美国、日本、俄罗斯等国近年来在软 X射线光刻关键单元技术及整机研究和发展方面的概况、预计下世纪初美国和日本将有软 X射线投影光刻机投入工艺生产线     

AlN陶瓷微热板MEMS传感器阵列设计与工艺实现

针对陶瓷基微热板MEMS器件难以微加工,器件表面加热Pt膜使用普通正性光刻胶难以实现光刻剥离的工艺难点问题,提出了激光微加工和柔性机械剥离相结合的微加工方法。以AlN陶瓷为衬底基片,采用激光微加工技术实现热隔离刻蚀体加工,刻蚀梁宽可达0.2 mm。采用柔性机械剥离工艺制备方法解决普通正性光刻胶形成倒梯形凹槽Pt膜难实现图形化问题,可在复杂表面特性的陶瓷基衬底上实现Pt膜剥离线宽10μm。同时利用有限元法进行传感器阵列设计和热结构仿真,验证设计工艺的可行性。     

基于SU-8的微流沟道的设计和制作

以SU—8作为结构材料,采用紫外光刻工艺,尤以斜曝光工艺为主,制造一种新型的、小型化的、低成本的、三维的、高深宽比的微流沟道,微流沟道的高度约为1100μm。初步确定出加工此微流沟道结构所需要的曝光计量、前烘时间、后烘时间和显影时间以及工艺方法,为加工其他尺寸的微流沟道提供参考。基于此方法加工的微流沟道可以应用在微型流式细胞仪上,来提供红细胞计数、血色素浓度、血小板计数和红细胞单元指数等参数。     

The high‐speed measurement of a partial area imaging system applied to photoresist development processing

Abstract

Among the parameters that affect photolithography, the most important are exposure and development time which affect the coating photoresist characteristics. This study further researches the relationship between the exposure and development time using a high speed image inspection system, and the relationship between the development time and photoresist depth using a Scanning Probe Microscope (SPM). A partial scan CCD camera and high speed frame capture card were used to obtain the photoresist development processing parameters. The experimental results verified that this imaging system provides an economical and effective method for producing a micro‐photo‐etched product. It is expected that these experiments can also offer some good references useful in the micro electro mechanical industrial field.     

Scalable arrays of chemical vapor sensors based on DNA-decorated graphene

Arrays of chemical vapor sensors based on graphene field effect transistors functionalized with single-stranded DNA have been demonstrated. Standard photolithographic processing was adapted for use on large-area graphene by including a metal protection layer, which protected the graphene from contamination and enabled fabrication of high quality field-effect transistors （GFETs）. Processed graphene devices had hole mobilities of 1,640 ± 250 cm2.V-1.s-1 and Dirac voltages of 15 ± 10 V under ambient conditions. Atomic force microscopy was used to verify that the graphene surface remained uncontaminated and therefore suitable for controlled chemical functionalization. Single-stranded DNA was chosen as the functionalization layer due to its affinity to a wide range of target molecules and π-π stacking interaction with graphene, which led to minimal degradation of device characteristics. The resulting sensor arrays showed analyte- and DNA sequence-dependent responses down to parts-per-billion concentrations. DNA/GFET sensors were able to differentiate among chemically similar analytes, including a series of carboxylic acids, and structural isomers of carboxylic acids and pinene. Evidence for the important role of electrostatic chemical gating was provided by the observation of understandable differences in the sensor response to two compounds that differed only by the replacement of a （deprotonating） hydroxyl group by a neutral methyl group. Finally, target analytes were detected without loss of sensitivity in a large background of a chemically similar, volatile compound. These results motivate further development of the DNA/graphene sensor family for use in an electronic olfaction system.     

Insect adhesion on rough surfaces: analysis of adhesive contact of smooth and hairy pads on transparent microstructured substrates

Insect climbing footpads are able to adhere to rough surfaces, but the details of this capability are still unclear. To overcome experimental limitations of randomly rough, opaque surfaces, we fabricated transparent test substrates containing square arrays of 1.4 µm diameter pillars, with variable height (0.5 and 1.4 µm) and spacing (from 3 to 22 µm). Smooth pads of cockroaches (Nauphoeta cinerea) made partial contact (limited to the tops of the structures) for the two densest arrays of tall pillars, but full contact (touching the substrate in between pillars) for larger spacings. The transition from partial to full contact was accompanied by a sharp increase in shear forces. Tests on hairy pads of dock beetles (Gastrophysa viridula) showed that setae adhered between pillars for larger spacings, but pads were equally unable to make full contact on the densest arrays. The beetles'' shear forces similarly decreased for denser arrays, but also for short pillars and with a more gradual transition. These observations can be explained by simple contact models derived for soft uniform materials (smooth pads) or thin flat plates (hairy-pad spatulae). Our results show that microstructured substrates are powerful tools to reveal adaptations of natural adhesives for rough surfaces.