Eine Definitionssprache für die Kommunikationsverbindungen in verteilten Automatisierungssystemen

Eingegangen am 13.11.1996, in überarbeiteter Form am 12.5.1997     

Qualitative und quantitative Aspekte prototypingorientierter Software-Entwicklung – Ein Erfahrungsbericht

Eingegangen am29.07.1996, in überarbeiteter Form am 09.12.1996     

Prozeßlenkung bei unsicheren Meßergebnissen

Metrology plays a key role in production surveillance and production control. The accuracy of production processes is assessed on produced parts using measuring instruments. Because of the measurement uncertainty the measured values are never accurate but are affected by deviations. In micro and nano technology acceptable deviations range from 0.01 to 1 μm, e.g. on gears and crankcases. To measure such deviaions measuring instruments with a measurement uncertainty of the order of nanometers are definitely necessary. This is especially so because measurement deviation leads to evaluating the process as less capable than it actually is. The higher the uncertainty of the measuring instrument used for measuring the produced parts is the less quantities for describing process capability become. This paper describes the impact of measurement uncertainty on process and product evaluation reliability in micro and nano technology with special consideration of process control.