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1.
The hydrogen annealing process has been used to improve surface roughness of the Si-fin in CMOS FinFETs for the first time. Hydrogen annealing was performed after Si-fin etch and before gate oxidation. As a result, increased saturation current with a lowered threshold voltage and a decreased low-frequency noise level over the entire range of drain current have been attained. The low-frequency noise characteristics indicate that the oxide trap density is reduced by a factor of 3 due to annealing. These results suggest that hydrogen annealing is very effective for improving device performance and for attaining a high-quality surface of the etched Si-fin.  相似文献   
2.
In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology.  相似文献   
3.
Conversion of acrylonitrile-based precursors to carbon fibres   总被引:1,自引:0,他引:1  
The progress of stabilization of two compositions of acrylic fibres with various orientations has been followed by a variety of techniques. The thermooxidative treatments for stabilization have been carried out in a continuous process and also in a batch process under free shrinkage, constant length and constant tension conditions. The morphological model of acrylic fibres consists of an alternating sequence of laterally ordered and laterally disordered regions along the fibre direction. This structure is consistent with the observations based on small-angle X-ray scattering of copper- impregnated precursor fibres and thermomechanical response, thermal stress development, calorimetry, wide- and small-angle X-ray scattering and sonic modu-lus measured at different extents of stabilization. Lateral as well as orientational order in these fibres can be increased markedly through a high-temperature deformation process prior to stabilization. An increase in perfection and extent of order is observed in the early stages of stabilization. There is also a simultaneous decrease in the orientation of the disordered phase at this stage and the extent of this decrease depends on the axial constraints imposed on the fibre. Little difference in the rate of stabilization is observed as measured by density or oxygen uptake for fibres with different extents of orientation, lateral order or restraint. Fibres containing itaconic add, a stabilization catalyst did show an increased rate of stabilization. Inferences have been drawn regarding additional research pertaining to achieving high order in precursor fibres, minimizing orientational relaxation during oxidative stabilization, and the techniques for monitoring the extents of the stabilization treatment and the changes in relevant morphological parameters.  相似文献   
4.
Aluminium-neodymium oxide-aluminium thin film capacitors have been prepared by thermal evaporation and the d.c. conduction properties of these films have been studied. The thicknesses of the films have been determined by a multiple beam interferometer. The current-voltage power-law dependence showed that the conduction in these films is space-charge limited. The linear dependence of the current density on the square root of the applied field confirmed the exponential trap distribution. The trap density has been found to be of the order of 1026 m–3. It has also been observed that the Schottky type of conduction is predominant in the high-field region and the height of the Schottky barrier has been determined. It is seen that the conduction mechanism is an activated process with the activation energy decreasing with increasing field.  相似文献   
5.
6.
A digital method for generating precisely controlled sine-squared shaped video sync pulses of sixteen different wave shapes is reported. The principle involved in the technique is to store 16 sample values of the desired sine-squared shaped signal in programmable read-only memory (PROM) and to release these digital data sequentially to a digital-to-analog converter at a desired speed to produce the sine-squared shaped waveform. The application of this method is discussed  相似文献   
7.
Three-dimensional cage type iron substituted mesoporous silica with different iron contents (FeSBA-1) was synthesized in a highly acidic media using cetyltriethylammonium bromide and tetraethylorthosilicate as a template and a silica source, respectively. Acylation of toluene with acetic anhydride (AA) was carried out over FeSBA-1 mesoporous catalysts with different nSi/nFe ratios in the temperature range 80–180 °C for a time-on-stream of 1–6 h under liquid phase conditions. The important factors affecting the conversion and the selectivity of the reaction, such as the reaction temperature, feed ratio, catalyst weight and time-on-stream were studied and the results are discussed in detail. The reaction conditions were optimized and the nAA/nToluene ratio of 2 and catalyst weight of 0.1 g (3.3 wt% of total reaction mixture) were maintained for all catalytic runs. It was found that the catalytic activity is strongly influenced by the amount of tetrahedral iron in the catalysts. Among the catalysts used in the present study, FeSBA-1(36) showed a high toluene conversion and selectivity to p-methylacetophenone (p-MAP) under the optimized reaction conditions. It was also found that the selectivity for p-MAP was always higher than m-MAP and o-MAP for all the catalysts and the activity of the catalysts changes in the following order: FeSBA-1(36) > FeSBA-1(90) > FeSBA-1(120).  相似文献   
8.
In this study the interaction of applied N with different irrigation schedules on grain yields and N use efficiency of wheat was investigated in two Inceptisols of the Nigerian savanna during 1978–80. Irrigation intervals ranged from 7 to 28 days at Kadawa and 5 to 10 days at Bakura while the N rates varied from 0 to 200 kg per ha. Both grain yield and N uptake increased significantly with increasing N rates at both the locations. The magnitude of increase in yield and N uptake decreased substantially when the irrigation interval became longer. This interaction was very pronounced at Bakura where the soil is highly porous, excessively drained and extremely poor in moisture retention capacity. Longer irrigation intervals produced grains with slightly higher N content but the difference was not significant. Higher N rates and fewer irrigations gave lower fertilizer N recovery.  相似文献   
9.
Waste ground rubber tire (WGRT) is a complex composite containing various elastomers, carbon black, zinc oxide, stearic acid, processing oils, and other curatives. Most of the waste ground rubber tire is composed of mainly natural rubber (NR) and styrene butadiene rubber (SBR) in varying proportions. Blending it with other thermoplastic materials is difficult due to the inherent thermodynamic incompatibility. But, the compatibility can be increased by making the reactive sites in WGRT with suitable chemicals under optimum condition of shearing inside a twin screw extruder and it is said to undergo a dynamic reaction inside the extruder. To understand the mechanism of dynamic reaction process of a rubber/polyolefin blend, the blending of a truck tire model material rubber with polyolefin was first tried before it was applied to waste WGRT material. It was observed that the blends of a truck tire model rubber material and PP thermoplastic are physical mixture of two incompatible polymers in which a continuous plastic phase is largely responsible for the tensile properties. The rubber particles are the dispersed phase. The large particle size and the poor adhesion of these rubber particles are believed to be liable for the poor tensile properties. In case of blends of truck tire model material with isotactic polypropylene the tensile properties are found to be lower than that of its PP‐g‐MA counterpart which can be attributed to the reaction of the MA with the carbon black particles. A schematic representation of the possible interactions has been proposed. The effect of addition of compatibilizers such as SEBS and SEBS‐g‐MA has also been studied. The tensile and TGA studies indicate that the polarity of SEBS and SEBS‐g‐MA induces an increase in the performance characteristics for both types of polyolefins but the intensity of this increase is higher in the PP‐g‐MA based blends. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci 106: 3193–3208, 2007  相似文献   
10.
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