Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Assessment of Anger and Aggression in Male Offenders With Developmental Disabilities.

Systematic assessment of anger among people with developmental disabilities has been lacking, especially for hospital inpatients. Reliability and validity of anger self-report psychometric scales were investigated with 129 male patients, mostly forensic. Anger prevalence and its relationship to demographic, cognitive, and personality variables and to hospital assaultive behavior were examined. High internal and intermeasure consistency, and some concurrent validity with staff ratings, were found. Retrospective validity regarding physically assaultive behavior in the hospital was obtained. Hierarchical regressions revealed that patient-reported anger was a significant predictor of assaults postadmission, controlling for age, length of stay, IQ, violence offense history, and personality variables. (PsycINFO Database Record (c) 2010 APA, all rights reserved)     

Adaptive motion control using neural network approximations

In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.     

Fuzzy versus quantitative association rules: a fair data-driven comparison.

As opposed to quantitative association rule mining, fuzzy association rule mining is said to prevent the overestimation of boundary cases, as can be shown by small examples. Rule mining, however, becomes interesting in large databases, where the problem of boundary cases is less apparent and can be further suppressed by using sensible partitioning methods. A data-driven approach is used to investigate if there is a significant difference between quantitative and fuzzy association rules in large databases. The influence of the choice of a particular triangular norm in this respect is also examined.     

A Diffusion-Compensation Relation for Normal Grain Growth and Grain-Boundary Diffusion of Oxygen in Oxides

Values of D₀/δ and Q for grain-boundary diffusion, derived from published studies of normal grain growth in Al₂O₃, BeO, CaO, MgO, SiO₂, and CaSiO₃, are fit by the linear compensation equation log D₀/δ=0.03170Q -7.6792 (r²=0.9384). Comparison of grain-boundary diffusion coefficients derived from grain growth in oxides with those obtained by direct experimental measurement suggests that the kinetics of normal grain growth are controlled by grain-boundary diffusion of oxygen.     

Logical foundations of nonmonotonic reasoning

In this paper we shall review the main appraches to nonmonotonic reasoning which we classify from the perspective of their underlying logical settings as classical, intuitionistic, three-valued/partial models, and conditional. We shall be placing special emphasis on some of the prominent approaches. We shall also give hints on potential future directions and emphasize that more theoretical work is still needed before a move to application is made.     

Topology preservation of template-based 6-subiteration reduction operations

Generally, a reduction operation (e.g., thinning and shrinking) on 3D binary images can be represented as a set of reduction templates where every object voxel of the image satisfying any template is turned to a background voxel. Generally, it is rather difficult, error-prone and time-consuming for verifying the topological soundness of a 3D parallel reduction operation. This paper proposes sufficient conditions of time complexity O(n) for verifying the topological soundness of 3D parallel 6-subiteration reduction operations of n templates where such a kind of 3D reduction operations is performed alternatively from the six orthogonal directions to turn object voxels to background voxels. By such sufficient conditions, the topology soundness of a 3D 6-subiteration parallel reduction operation can be verified by checking each and every of its templates.