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Microsystem Technologies - This study presents the results on the feasibility of a resonant planar chemical capacitive sensor in the microwave frequency range suitable for gas detection and...  相似文献   
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In this paper, we present a comparative study of GB and DMMP vapor detection using Love wave devices. Acoustic sensors are optimized versus the mass loading effect according to theoretical results, and a specific sensitive coating based on polysiloxane polymer is used to ensure selectivity. Experimental results allow us to compare the interactions between the coating and both gases. An estimation of the diffusion coefficient of each gas (GB and DMMP) was performed and we linked the dynamic of the responses with the sorption kinetics.  相似文献   
3.
Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for ultra-high working frequencies are in urgent demand to meet the requirements of the fast-growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R-MoS2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R-MoS2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high-speed telecommunication, acousto-optic, and sensor fields,etc.  相似文献   
4.
Acoustic Love wave oscillators offer a great potentiality to integrated viscosity measurements thanks to a high sensitivity and the lack of moving parts. The main limitation is insertion losses that increase with viscosity. To overcome this limitation, this paper reports the use of microfluidic techniques with a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Liquid flows of aqueous glycerol solutions up to 0.939 Pa s (939cP, 98% glycerol) have been tested in oscillator mode. These results are promising for the viscoelastic study of viscous liquids. Modelisation using the classical perturbation theory is discussed.  相似文献   
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