磁控溅射矩形靶磁场的优化设计

磁控溅射靶材的利用率在降低生产成本中起着重要作用.正交的靶电磁场能显著地延长电子的运动路程,增加同工作气体分子的碰撞几率,提高等离子体密度,使磁控溅射速率数量级的提高,因此靶面正交电磁场的分布将决定靶的烧蚀情况.提出了2种改善矩形平面靶磁场分布的方法,经过分析,这2种设计将拓宽靶面的刻蚀范围,提高靶材的利用率.     

Microwave Reflectometry for Plasma Density Profile Measurements on HL-2A Tokamak

A modulated microwave reflectometry has been successfully developed on HL-2A, which can be used to measure the plasma density profile with time-delay method. This microwave reflectometry has two frequency ranges （26.5 to 40 GHz and 40 to 60 GHz） and it is suitable for measuring the plasma density ranging from 0.8×10^13 cm^-3 to 4.5×10^13 cm^-3. The temporal resolution is i ms and the spatial resolution is about 1 cm. This paper will present the basic principle of the microwave reflectometry, parameters calibration of the equipment and the experimental results on HL-2A tokamak.     

Response of Sample Temperature during Straight-Line Ion Implantation

A theoretical model for calculation of the sample temperature during straight-line nitrogen ion implantation was established based on the results of experiment in this paper. Taking the pure aluminum as the samples, and from the transformation of electric energy into thermal energy, the calculated values of the temperature were in good agreement with the measured values in the experiment. According to the simulation, this technology can be applied to the control of specimens temperature during the implantation.     

The Properties of the Rectangular Arc Ion Plating with Magnetic Filtering Shutter

A major obstacle to the broad application of cathodic arc plasma deposition is the presence of macroparticles. In this paper, the properties of the large rectangular arc ion plating with a magnetic filtering shutter system to filter macroparticles are studied. It is proposed that the macroparticles in the plasma beam are effectively removed with the magnetic filtering shutter system, and the quality of the deposited films is improved.     

高频、高压晶体管设计与制造工艺研究

本文介绍了高频、高压主双极型晶体管的一种设计结构和制造工艺,用该设计与工艺做出了耐压大于200V、fT大于200MHz的产品。     

Heat Transport During H-Mode in the HL-2A Tokamak

Perturbative experiments on electron heat transport have been successfully con- ducted on the HL-2A tokamak. The pulse propagation of the electron temperature is induced by the supersonic molecular beam injection (SMBI), which has characteristics of good localization and deep deposition. A model based on the electron heat transport in cylindrical geometry has been applied to reconstruct the measured amplitude and phase profi les of the electron temperature perturbation. The results show that the heat transport is significantly reduced near the pedestal region of the H-mode plasma. In the \profi ness/resilience" region, similar heat diffusivities have been observed in L-mode and H-mode plasmas, which verifiesthe gradient-driven transport physics in tokamaks.     

基于新型拼接光子晶体光纤的SPR葡萄糖浓度传感器

本文提出了一种基于表面等离子体共振(SPR)技术的光纤传感器并应用于葡萄糖浓度检测。采用光纤熔接机拼接多模光纤-光子晶体光纤-光子晶体光纤-多模光纤(MPPM)的结构,然后利用磁控溅射在其表面沉积金膜。对传感区的金膜进行巯基乙胺修饰,采用戊二醛固定葡萄糖氧化酶(GOD),使传感器具备了葡萄糖特异性识别功能,并实现了低浓度葡萄糖传感,在0-0.8 mg/mL的浓度范围内表现出良好的线性关系,并且获得了29.61 nm/(mg/mL)葡萄糖灵敏度,拟合系数达到了~0.954。得益于其易制备、良好的生物相容性以及优异的传感性能,该光纤SPR传感器有望成为生物医学领域中具有发展潜力的传感器之一。     

Progress of microwave diagnostics development on the HL-2A tokamak

Sets of powerful microwave diagnostic systems have been developed on the HL-2A tokamak, including 18 subsystems with high spatial and temporal resolutions. These systems have been applied in the HL-2A tokamak experiments to investigate the core plasma transport, turbulence, MHD, energetic particle physics and so on. In this paper, the microwave diagnostics and their applications are reviewed. Some new technologies, including GHz sampling digital correlation electron cyclotron emission (DCECE), multi-channel correlation reflectometers, and solid state terahertz interferometers, are also presented in the paper.     

Preliminary Results of Sawtooth Behaviour and Electron Heat Transport During ECRH Experiment on HL-2A

An electron cyclotron resonance heating （ECRH） system with a maximum output power of 1 MW, a frequency of 68 GHz and a duration of ls was operated on HL-2A tokamak. The temperature profile control and the sawtooth behaviour during ECRH experiments are investigated. ‘Density pumpout＇ during on-axis ECRH is analysed. Features of confinement and electron heat transport during ECRH are studied.     

HL-2A托克马克中微波诊断系统

介绍了核聚变装置HL-2A托克马克中各种微波技术在等离子体诊断中的应用。说明了各种诊断的基本原理、电路安排以及在放电中的测量结果。电子回旋辐射(ECE)主要用来测量主等离子体电子温度及其扰动分布。测量的时间分辨率可以达到4m s(扫频)或者1μs(单频),空间分辨率为3 cm。电子温度的测量范围为10 eV~10 kev。微波反射用于等离子体密度分布、等离子体旋转及等离子体密度扰动等方面的测量及研究,在测量密度分布时的时间分辨为1m s,空间分辨大约1 cm左右。微波干涉诊断用来测定偏滤器中等离子体的平均密度变化,时间分辨率为0.1m s。