Quantitative Evaluation Method for Etch Sidewall Profile of Through‐Silicon Vias (TSVs)

Through‐silicon via (TSV) technology provides much of the benefits seen in advanced packaging, such as threedimensional integrated circuits and 3D packaging, with shorter interconnection paths for homo‐ and heterogeneous device integration. In TSV, a destructive cross‐sectional analysis of an image from a scanning electron microscope is the most frequently used method for quality control purposes. We propose a quantitative evaluation method for TSV etch profiles whereby we consider sidewall angle, curvature profile, undercut, and scallop. A weighted sum of the four evaluated parameters, nominally total score (TS), is suggested for the numerical evaluation of an individual TSV profile. Uniformity, defined by the ratio of the standard deviation and average of the parameters that comprise TS, is suggested for the evaluation of wafer‐to‐wafer variation in volume manufacturing.     

Molecular inflammation hypothesis of aging based on the anti-aging mechanism of calorie restriction

Accumulating evidence strongly suggests that oxidative stress underlies aging processes. Research provides consistent evidence that calorie restriction (CR) reduces age-related oxidative stress and has anti-inflammatory properties. However, information is lacking on the molecular mechanism that would better define the interrelation of reactive oxygen species and nitrogen species and the pro-inflammatory states of the aging process. In this review, the biochemical and molecular bases of the inflammatory process in the aging process are analyzed to delineate the molecular inflammation hypothesis of aging. The key players involved in the proposed hypothesis are the age-related upregulation of NF-kappa B, IL-1 beta, IL-6, TNFalpha, cyclooxygenase-2, and inducible NO synthase, all of which are attenuated by CR. Furthermore, age-related NF kappa B activation is associated with phosphorylation by I kappa B kinase/NIK and MAPKs, while CR blocked these activation processes. The modulation of these factors provides molecular insights of the anti-inflammatory action of CR in relation to the aging process. Based on available finding and our recent supporting evidence, we prefer to use "molecular inflammation" to emphasize the importance of the molecular reaction mechanisms and their aberrance, predisposing to fully expressed chronic inflammatory phenomena. It was further proposed that CR's major force of the regulation of redox-sensitive inflammation may well be its life-prolonging action.     

Design of an auto-focusing actuator with a flexure-based compliant mechanism for mobile imaging devices

There is increasing consumer’s demand for high-quality and high-performance mobile imaging devices. In this paper, an auto-focusing (AF) actuator with a flexure hinge that uses the electromagnetic (EM) circuit of a voice coil motor was designed and evaluated. The flexure hinge was designed by using finite element analysis. The EM circuit was designed based on the structural stiffness of the device. The EM circuit was analyzed using the design of experiments procedure. Based on the results, the effective design parameters were selected, and improvements were made to the design. Finally, a prototype of the AF actuator was manufactured, and the feasibility and performance of the actuator with the flexure hinge were verified experimentally. The experimental results indicated that the proposed actuator performed adequately and satisfied the design requirements.     

Transmission of block turbo coded digital audio over FM-SCA

In this paper, an efficient coded scheme for transmitting digital audio over the existing FM channel, by multiplexing it with the baseband FM signal, is described. Transmission of multiplexed signals in the FM baseband called FM-SCA (subsidiary communications authorization) has been previously used for low quality analog content and some low rate digital content. The investigated scheme opens up the possibility of achieving CD quality audio over FM-SCA by enabling high bitrate transmission using MPEG-I layer 3 and MPEG-AAC audio coding for the digital audio. These schemes provide CD quality audio at or below 128 kbps, MPEG-AAC being able to do so at rates as low as 96 kbps. Block turbo codes (BTC), which offer near Shannon's limit performance with relatively low hardware complexity requirements, provide the error protection. Block turbo codes have been shown to be particularly effective for high coding rates. The system uses OFDM in conjunction with 8PSK/16PSK to modulate the digital bitstream and fit it in the 44 kHz (54 to 98 kHz) band available in the FM baseband. Simulation results show an optimal system configuration for digital audio transmission in FM-SCA.     

Precipitates on granular iron in solutions containing calcium carbonate with trichloroethene and hexavalent chromium

Mineralogical examination, using scanning electron microscopy (SEM), X-ray diffractometry (XRD), and optical microscopy, was conducted on the Fe0-bearing reactive materials derived from long-term column experiments undertaken to assess the treatment capacity of Fe0 under different geochemical conditions. The columns received either deionized water or solutions of differing dissolved calcium carbonate concentrations, together either with trichloroethene (TCE) or hexavalent chromium (Cr(VI)). The major reaction product in the columns receiving deionized water was magnetite-maghemite, and for the columns receiving dissolved calcium carbonate, the main products were iron hydroxy carbonate and aragonite. Replacement of Fe0 by reaction products occurred mainly at the edges of the Fe0 particles, and penetrative replacement was focused along cracks and along and around graphitic inclusions. Fibrous or flake-shaped iron hydroxy carbonate mostly replaced the edges of the Fe0 particles. Aragonite had needle-shaped morphology, and some occurred as clusters of crystals. Aragonite was deposited on iron hydroxy carbonate, thus providing at least a partial armoring effect. The mineral was also observed to cement groups of Fe0 particles into compact aggregates. The Cr was present mostly as Cr(III) in Cr(III)-Fe(III) (oxy)hydroxides and in trace amounts in iron hydroxy carbonate.     

Reactive transport modeling of trichloroethene treatment with declining reactivity of iron

Evolving reactivity of iron, resulting from precipitation of secondary minerals within iron permeable reactive barriers (PRBs), was included in a reactive transport model for trichloroethene (TCE) treatment. The accumulation of secondary minerals and reactivity loss were coupled using an empirically derived relationship that was incorporated into an existing multicomponent reactive transport code (MIN3P) by modifying the kinetic expressions. The simulation results were compared to the observations from long-term column experiments, which were designed to assess the effects of carbonate mineral formation on the performance of iron for TCE treatment. The model successfully reproduced the evolution of iron reactivity and the dynamic changes in geochemical conditions and contaminant treatment. Predictions under various hydrogeochemical conditions showed that TCE would be treated effectively for an extended period of time without a significant loss of permeability. Although there are improvements yet to be made, this study provides a significant advance in our ability to predict long-term performance of iron PRBs.     

Design and fabrication of flexible poly(vinyl chloride) dielectric composite reinforced with ZnO microvaristors

Flexible poly(vinyl chloride)/varistor composites were fabricated by solution casting method. High‐field ZnO varistor particles processed from micron‐sized Zn dust is explored as multifunctional filler for PVC composites. Mechanical blending of Zn dust with La₂O₃‐CeO₂ rare earths and varistor forming minor additives followed by sintering at 1250 °C resulted in fine‐grained ZnO varistors. Bulk varistor was subsequently milled to obtain ZnO microvaristor grains. The effect of microvaristor on the UV stability, dielectric, and mechanical properties of the PVC composite was analyzed. The varistor filler in PVC enhanced the microhardness and retained the tensile properties without any significant loss. After UV irradiation PVC/varistor composite shows remarkable mechanical stability retention (95%) compared to pure PVC (75%). Also, microvaristor reinforcement resulted in dielectric constant tunability (? = 2–37) without any drastic change in the dielectric loss (0.02–0.05). Thus, Zn dust‐derived ZnO varistors could be potentially exploited to design functional PVC composites for electronic applications. © 2017 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2018 , 135, 46031.     

Neural network modeling of reactive ion etching using optical emission spectroscopy data

Neural networks are employed to model reactive ion etching (RIE) using optical emission spectroscopy (OES) data. While OES is an excellent tool for monitoring plasma emission intensity, a primary issue with its use is the large dimensionality of the spectroscopic data. To alleviate this concern, principal component analysis (PCA) and autoencoder neural networks (AENNs) are implemented as mechanisms for feature extraction to reduce the dimensionality of the OES data. OES data are generated from a 2/sup 4/ factorial experiment designed to characterize RIE process variation during the etching of benzocyclobutene (BCB) in a SF/sub 6//O/sub 2/ plasma, with controllable input factors consisting of the two gas flows, RF power, and chamber pressure. The OES data, consisting of 226 wavelengths sampled every 20 s, are compressed into five principal components using PCA and seven features using AENNs. Each method is subsequently used to establish multilayer perceptron neural networks trained using error back-propagation to model etch rate, uniformity, selectivity, and anisotropy. The neural network models of the etch responses using both methods show excellent agreement, with root-mean-squared errors as low as 0.215% between model predictions and measured data.