Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

急性炎性疾病患者乳酸林格氏液液体动力学

目的:探索炎性疾病患者的乳酸林格氏液（Ringer's lactate,RL）液体动力学特征以及炎性生物标记物是否可以作为协变量影响RL分布和排泄。方法:本研究为前瞻性队列研究。选择40例美国麻醉医师分级（ASA）I-II级，腹腔镜下择期胆囊切除术（胆囊炎组，n=20）或者腹腔镜下急诊阑尾切除术（阑尾炎组，n=20）。所有患者麻醉诱导前开始输注RL，按15 mL/kg，35 min内输毕。采用酶联免疫（enzyme-linked immunosorbent assay,ELISA）方法测定血浆炎症（TNF-α,IL-10和CRP）或者内皮损伤生物标记物（syndecan-1,SDC-1）；利用血红蛋白（Hb）稀释-时间曲线和尿量，使用Phoenix软件，采用非线性混合效应模型分析计算RL液体动力学参数和协变量的影响。结果:与胆囊炎组相比，阑尾炎组RL从组织间隙到血浆的转运速率常数（k21）显著降低（14×10-3min-1 versus 35×10-3min-1;P=0.012）。阑尾炎组C反应蛋白（CRP）升高［中位数38.1(1.8-143.6) μg/mL versus 1.3(0.1-159.0) μg/mL;P<0.001］；与清醒状态相比，麻醉期间（输液开始后30～45 min），液体从中央室中到外周室的转运速率常数（k12）显著增加（57×10-3min-1 versus 32×10-3min-1；P<0.01）。清除速率常数（k10）降低90%（0.6×10-3min-1 versus 5.3×10-3min-1;P<0.001）。无论在清醒状态还是麻醉状态下低血压均能降低液体清除；炎症或者内膜损伤的生物标记物不能作为显著影响RL液体动力学参数的协变量。结论:阑尾炎或者胆囊炎患者术前输入液体后“炎症反应的生物标记物”不是RL的液体动力学的协变量，但是两组患者中，全身麻醉期间输入液体的清除率下降。     

Current Status and Trend of Internet and E-Commerce Market in Korea

After the remarkable increase of Internet users and broadband Internet subscribers at the end of the 20th century, the size of Korean Internet and e-commerce market steadily increased but the growth rate has been either stagnant or decreased. Trends of Korean Internet and e-commerce market are summarized in this paper the trends on Internet usage are introduced. Trends of online games, blogs and wireless Internet are introduced. The trends of Korean Internet market may have implications for China and Japan.     

EFFECT OF DIETARY SORGHUM DISTILLERY RESIDUE ON HEMATOLOGICAL CHARACTERISTICS OF CULTURED GREY MULLET (MUGIL CEPHALUS)—AN ANIMAL MODEL FOR PRESCREENING ANTIOXIDANT AND BLOOD THINNING ACTIVITIES

The sorghum distillery residue (SDR) has been an underutilized by‐product with estimated production of 150 ton/day in Kinmen, Taiwan. The objective of this study was to test for any physiological effects of SDR, thus to utilize it as a nutraceutical feed ingredient in diets for cultured fish. Hot air‐dried, wet, and dehulled‐wet sorghum distillery residue showed 63%, 90% and 97% inhibition of the hemoglobin‐catalyzed oxidation of linoleic acid compared to soybean (13%) and rice bran (78%). The feed formulated with 20% wet or dehulled‐wet sorghum distillery residue both showed an antioxidant activity of 68% being higher than the control diet (53%). Feeding these diets to cultured grey mullet for 60 days in summer (temperature ranged 24–30C), resulted in a lower hydroperoxide content in gill tissue, as shown by a chemiluminesence intensity of 1806 or 1409 mV as opposed to 2666 mV for fish fed a control diet. In winter, when the water temperature decreased to 14C, grey mullet fed a diet consisting of 10% dehulled wet sorghum distillery residue had a blood viscosity of 1.9 mPas and a hematocrit value of 33%, in contrast to 3.6 mPas and 41% for control. The blood of the control group started to aggregate in 6 h and showed hemolysis, while the mullet fed dehulled, wet sorghum distillery residue did not show blood aggregation, maintained normal fluidity and erythrocyte membrane integrity. It seems that cultured fish may have the potential as an animal model for prescreening antioxidant and blood thinning effects of food ingredients.     

Quantitative assessment of preferential fatigue initiation sites in a multi‐phase aluminium alloy

Complex multi‐phase Al–Sn–Si alloys are commonly employed in the manufacture of small automotive plain bearings. The fundamental fatigue initiation behaviour of this class of alloys is currently not well understood. A range of analytical techniques were applied to investigate preferential initiation site location and to attempt to identify critical microstructural features. It was apparent from experimental studies that points of fatigue crack initiation are associated with the Si secondary phase. Using tessellation approaches and subsequently both adaptive numerical modelling and micro‐scale finite element modelling allowed the identification of features affecting the probability that a given Si phase would initiate a fatigue crack.     

A SURVEY OF ARYLAMINE N-ACETYLTRANSFERASE ACTIVITY IN COMMON FRUITS AND VEGETABLES

The N-acetyltransferase activity was determined in 58 common fruits and vegetables. The assay was based on acetylation of 2-aminofluorene or p-amino-benzoic acid, followed by high pressure liquid chromatographic analysis of products and remaining nonacetylated substrate. The highest specific activities were observed in Balsam pear which contained 17.37 ± 1.45 N-acetyl aminofluorene nmole/min/mg protein and 46.27 ± 6.87 N-acetyl p-aminobenzoic acid nmole/min/mg protein. N-acetyltransferase activities within the remaining 57 foodstuffs analyzed ranged from none detected to 3.39 ± 0.72 N-acetyl aminofluorene nmole/min/mg protein and none detected to 32.45 ± 6.55 N-acetyl p-aminobenzoic acid nmole/min/mg protein. This is the first demonstration of acetyl CoA: arylamine N-acetyltransferase activity in common foodstuffs.     

Microscopic examination of the microstructure and deformation of conventional and auxetic foams

Auxetic materials have a negative Poisson’s ratio, that is, they expand laterally when stretched longitudinally. One way of obtaining a negative Poisson’s ratio is by using a re-entrant cell structure. Auxetic foam was fabricated from a conventional polymeric foam. Assuming similar mechanical properties for the solid material comprising the foams, the principle variable affecting the properties of the foam is the geometry of the cells. This means that the unusual mechanical properties of auxetic foams are attributed to the deformation characteristics of re-entrant microstructures. In this paper, the results of optical- and scanning electron-microscopic studies of the geometrical parameters for the different foams examined are presented. Examples of the microstructural deformation mechanisms observed are also presented. Comparison between the conventional foams and their auxetic conversions are also made. This revised version was published online in November 2006 with corrections to the Cover Date.     

Evaluation of Time-Intensity Sensory Responses using a Personal Computer

A method is presented which utilizes a personal computer to measure time-intensity (T-I) sensory responses. The judge uses a game paddle which moves an “X” along a fixed scale appearing on the monitor screen to indicate the attribute intensity at each instant in time. A clicker device on the game paddle can be used to record the occurrence of events such as initial mouth entry and time of swallowing. Data acquisition is continuous with the data stored on discs. This technique has advantages over strip chart recorder methods. Disc storage allows rapid and efficient data analysis. Judges can perform the evaluations virtually unsupervised with only minimal training.