Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

Current Status and Trend of Internet and E-Commerce Market in Korea

After the remarkable increase of Internet users and broadband Internet subscribers at the end of the 20th century, the size of Korean Internet and e-commerce market steadily increased but the growth rate has been either stagnant or decreased. Trends of Korean Internet and e-commerce market are summarized in this paper the trends on Internet usage are introduced. Trends of online games, blogs and wireless Internet are introduced. The trends of Korean Internet market may have implications for China and Japan.     

Numerical modeling of combustion processes and pollutant formations in direct-injection diesel engines

The Representative Interactive Flamelet (RIF) concept has been applied to numerically simulate the combustion processes and pollutant formation in the direct injection diesel engine. Due to the ability for interactively describing the transient behaviors of local flame structures with CFD solver, the RIF concept has the capabilities to predict the auto-ignition and subsequent flame propagation in the diesel engine combustion chamber as well as to effectively account for the detailed mechanisms of soot formation, NO_X formation including thermal NO path, prompt and nitrous NO_X formation, and reburning process. Special emphasis is given to the turbulent combustion model which properly accounts for vaporization effects on the mixture fraction fluctuations and the pdf model. The results of numerical modeling using the RIF concept are compared with experimental data and with numerical results of the commonly applied procedure which the low-temperature and high-temperature oxidation processes are represented by the Shell ignition model and the eddy dissipation model, respectively. Numerical results indicate that the RIF approach including the vaporization effect on turbulent spray combustion process successfully predicts the ignition delay time and location as well as the pollutant formation.     

EFFECT OF DIETARY SORGHUM DISTILLERY RESIDUE ON HEMATOLOGICAL CHARACTERISTICS OF CULTURED GREY MULLET (MUGIL CEPHALUS)—AN ANIMAL MODEL FOR PRESCREENING ANTIOXIDANT AND BLOOD THINNING ACTIVITIES

The sorghum distillery residue (SDR) has been an underutilized by‐product with estimated production of 150 ton/day in Kinmen, Taiwan. The objective of this study was to test for any physiological effects of SDR, thus to utilize it as a nutraceutical feed ingredient in diets for cultured fish. Hot air‐dried, wet, and dehulled‐wet sorghum distillery residue showed 63%, 90% and 97% inhibition of the hemoglobin‐catalyzed oxidation of linoleic acid compared to soybean (13%) and rice bran (78%). The feed formulated with 20% wet or dehulled‐wet sorghum distillery residue both showed an antioxidant activity of 68% being higher than the control diet (53%). Feeding these diets to cultured grey mullet for 60 days in summer (temperature ranged 24–30C), resulted in a lower hydroperoxide content in gill tissue, as shown by a chemiluminesence intensity of 1806 or 1409 mV as opposed to 2666 mV for fish fed a control diet. In winter, when the water temperature decreased to 14C, grey mullet fed a diet consisting of 10% dehulled wet sorghum distillery residue had a blood viscosity of 1.9 mPas and a hematocrit value of 33%, in contrast to 3.6 mPas and 41% for control. The blood of the control group started to aggregate in 6 h and showed hemolysis, while the mullet fed dehulled, wet sorghum distillery residue did not show blood aggregation, maintained normal fluidity and erythrocyte membrane integrity. It seems that cultured fish may have the potential as an animal model for prescreening antioxidant and blood thinning effects of food ingredients.     

Performance modeling and evaluation of data/voice services in wireless networks

Application-level performance is a key to the adoption and success of the CDMA 2000. To predict this performance in advance, a detailed end-to-end simulation model of a CDMA network is built to include application traffic characteristics, network architecture, network element details using the proposed simulation methodology. We assess the user-perceived application performance when a RAN and a CN adopt different transport architectures such as ATM and IP. To evaluate the user-perceived quality of voice service, we compare the end-to-end packet delay for different vocoder schemes such as G.711, G.726 (PCM), G.726 (ADPCM), and vocoder bypass scheme. By the simulation results, the vocoder bypass scenario shows 30% performance improvement over the others. We also compare the quality of voice service with and without DPS scheduling scheme. We know that DPS scheme keep the voice delay bound even if the service traffic is high. For data packet performance, HTTP v.1.1 shows better performance than that of HTTP v.1.0 due to the pipelining and TCP persistent connection. We may conclude that IP transport technology is better solution for higher FER environment since the packet overhead of IP is smaller than that of ATM for web browsing data traffic, while it shows opposite effect to the small size voice packet in RAN architecture. We show that the 3G-1X EV-DO system gives much better packet delay performance than 3G-1X RTT. The main conclusion is that end-to-end application-level performance is affected by various elements and layers of the network and thus it must be considered in all phases of the development process. Jae-Hyun Kim He received the B.S., M.S., and Ph.D. degrees, all in computer science and engineering, from Hanyang University, Ansan, Korea, in 1991, 1993, and 1996 respectively. In 1996, he was with the Communication Research Laboratory, Tokyo, Japan, as a Visiting Scholar. From April 1997 to October 1998, he was a post-doctoral fellow at the department of electrical engineering, University of California, Los Angeles. From November 1998 to February 2003, he worked as a member of technical staff in Performance Modeling and QoS management department, Bell laboratories, Lucent Technologies, Holmdel, NJ. He has been with the department of electrical engineering, Ajou University, Suwon, Korea, as an assistant professor since 2003. His research interests include QoS issues and cross layer optimization for high-speed wireless communication. Dr. Kim was the recipient of the LGIC Thesis Prize and Samsung Human-Tech Thesis Prize in 1993 and 1997, respectively. He is a member of the Korean Institute of Communication Sciences (KICS), Korea Institute of Telematics and Electronis (KITE), Korea Information Science Society (KISS), and IEEE. Hyun-Jin Lee received the B.S. degree in electrical engineering from Ajou University, Suwon, Korea, in 2004, and is working toward the M.S. degree and Ph. D. degree in electrical engineering at Ajou University. He has been awarded Samsung Human-Tech Thesis Prize in 2004. His research interests QoS, especially network optimization and wireless packet scheduling. He is a member of the KICS. Sung-Min Oh received the B.S. and M. S. degrees in electrical engineering form Ajou University, Suwon, Korea, in 2004, and is working toward the Ph. D. degree in electrical engineering at Ajou University. His research interests QoS performance analysis and 4G network. He is a member of the KICS. Sung-Hyun Cho received his B.S., M.S., and Ph.D. in computer science and engineering from Hanyang University, Korea, in 1995, 1997, and 2001, respectively. From 2001 to 2005, he has been with Samsung Advanced Institute of Technology, where he has been engaged in the design and standardization of MAC and upper layers of B3G, IEEE 802.16e, and WiBro systems. He is currently a MAC part leader in the telecommunication R&D center of Samsung Electronics. His research interests include 4G air interface design, radio resource management, cross layer design, and handoff in wireless systems.     

Quantitative assessment of preferential fatigue initiation sites in a multi‐phase aluminium alloy

Complex multi‐phase Al–Sn–Si alloys are commonly employed in the manufacture of small automotive plain bearings. The fundamental fatigue initiation behaviour of this class of alloys is currently not well understood. A range of analytical techniques were applied to investigate preferential initiation site location and to attempt to identify critical microstructural features. It was apparent from experimental studies that points of fatigue crack initiation are associated with the Si secondary phase. Using tessellation approaches and subsequently both adaptive numerical modelling and micro‐scale finite element modelling allowed the identification of features affecting the probability that a given Si phase would initiate a fatigue crack.     

A SURVEY OF ARYLAMINE N-ACETYLTRANSFERASE ACTIVITY IN COMMON FRUITS AND VEGETABLES

The N-acetyltransferase activity was determined in 58 common fruits and vegetables. The assay was based on acetylation of 2-aminofluorene or p-amino-benzoic acid, followed by high pressure liquid chromatographic analysis of products and remaining nonacetylated substrate. The highest specific activities were observed in Balsam pear which contained 17.37 ± 1.45 N-acetyl aminofluorene nmole/min/mg protein and 46.27 ± 6.87 N-acetyl p-aminobenzoic acid nmole/min/mg protein. N-acetyltransferase activities within the remaining 57 foodstuffs analyzed ranged from none detected to 3.39 ± 0.72 N-acetyl aminofluorene nmole/min/mg protein and none detected to 32.45 ± 6.55 N-acetyl p-aminobenzoic acid nmole/min/mg protein. This is the first demonstration of acetyl CoA: arylamine N-acetyltransferase activity in common foodstuffs.     

Evaluation of Time-Intensity Sensory Responses using a Personal Computer

A method is presented which utilizes a personal computer to measure time-intensity (T-I) sensory responses. The judge uses a game paddle which moves an “X” along a fixed scale appearing on the monitor screen to indicate the attribute intensity at each instant in time. A clicker device on the game paddle can be used to record the occurrence of events such as initial mouth entry and time of swallowing. Data acquisition is continuous with the data stored on discs. This technique has advantages over strip chart recorder methods. Disc storage allows rapid and efficient data analysis. Judges can perform the evaluations virtually unsupervised with only minimal training.