Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

A new cobalt salicide technology for 0.15-μm CMOS devices

A new cobalt (Co) salicide technology for sub-quarter micron CMOS transistors has been developed using high-temperature sputtering and in situ vacuum annealing. Sheet resistance of 11 Ω/□ for both gate electrode and diffusion layer was obtained with 5-nm-thick Co film. No line width dependence of sheet resistance was observed down to 0.15-μm-wide gate electrode and 0.33-μm-wide diffusion layer. The high temperature sputtering process led to the growth of epitaxial CoSi ₂ layers with high thermal stability. By using this technology 0.15 μm CMOS devices which have shallow junctions were successfully fabricated     

Identification of Tumor Suppressive Genes Regulated by miR-31-5p and miR-31-3p in Head and Neck Squamous Cell Carcinoma

We identified the microRNA (miRNA) expression signature of head and neck squamous cell carcinoma (HNSCC) tissues by RNA sequencing, in which 168 miRNAs were significantly upregulated, including both strands of the miR-31 duplex (miR-31-5p and miR-31-3p). The aims of this study were to identify networks of tumor suppressor genes regulated by miR-31-5p and miR-31-3p in HNSCC cells. Our functional assays showed that inhibition of miR-31-5p and miR-31-3p attenuated cancer cell malignant phenotypes (cell proliferation, migration, and invasion), suggesting that they had oncogenic potential in HNSCC cells. Our in silico analysis revealed 146 genes regulated by miR-31 in HNSCC cells. Among these targets, the low expression of seven genes (miR-31-5p targets: CACNB2 and IL34; miR-31-3p targets: CGNL1, CNTN3, GAS7, HOPX, and PBX1) was closely associated with poor prognosis in HNSCC. According to multivariate Cox regression analyses, the expression levels of five of those genes (CACNB2: p = 0.0189; IL34: p = 0.0425; CGNL1: p = 0.0014; CNTN3: p = 0.0304; and GAS7: p = 0.0412) were independent prognostic factors in patients with HNSCC. Our miRNA signature and miRNA-based approach will provide new insights into the molecular pathogenesis of HNSCC.     

Experimental and computational study of gas–solid fluidized bed hydrodynamics

The hydrodynamics of a two-dimensional gas–solid fluidized bed reactor were studied experimentally and computationally. Computational fluid dynamics (CFD) simulation results from a commercial CFD software package, Fluent, were compared to those obtained by experiments conducted in a fluidized bed containing spherical glass beads of 250– in diameter. A multifluid Eulerian model incorporating the kinetic theory for solid particles was applied in order to simulate the gas–solid flow. Momentum exchange coefficients were calculated using the Syamlal–O’Brien, Gidaspow, and Wen–Yu drag functions. The solid-phase kinetic energy fluctuation was characterized by varying the restitution coefficient values from 0.9 to 0.99. The modeling predictions compared reasonably well with experimental bed expansion ratio measurements and qualitative gas–solid flow patterns. Pressure drops predicted by the simulations were in relatively close agreement with experimental measurements at superficial gas velocities higher than the minimum fluidization velocity, U_mf. Furthermore, the predicted instantaneous and time-average local voidage profiles showed similarities with the experimental results. Further experimental and modeling efforts are required in a comparable time and space resolutions for the validation of CFD models for fluidized bed reactors.     

Comparison of coal hydroliquefaction catalysed by ZnCl2-MCln (CuCl,CrCl3 and MoCl5) and ZnCl2 melts

Hydrogenation of four bituminous coals impregnated with 5 wt% of either mixtures of ZnCl₂-MCl_n (CuCl, CrCl₃ and MoCl₅) systems or ZnCl₂ was carried out using a batch autoclave system at 400° for 3 h at 9.8 MPa of initial hydrogen pressure. The ZnCl₂-MoCl₅ system showed the highest yield of the hexane-soluble (HS) fraction compared with the other systems irrespective of the coal used. The difference between the yields of HS fractions using the ZnCl₂-MoCl₅ and other systems was most marked for coals of fairly low volatile matter content, though the conversion was relatively low (47–66%), whilst for coals of high volatile matter content HS yields with the binary melt systems were high (86–91% conversion). Elemental analyses of the HS fractions indicated that the ZnCl₂-MoCl₅ system is most favourable in decreasing the average molecular weight and the heteroatom content of HS, this characteristic trend being confirmed also with five HS fractions separated by Chromatographic techniques. Both elemental analyses and molecular weights of asphaltene (benzene-soluble materials, BS) indicated that the ZnCl₂-MoCl₅ system is also most effective in cracking coal structure.     

Revolving Vernier Mechanism Controls Size of Linear Homomultimer

A new kind of the Vernier mechanism that is able to control the size of linear assembly of DNA origami nanostructures is proposed. The mechanism is realized by mechanical design of DNA origami, which consists of a hollow cylinder and a rotatable shaft in it connected through the same scaffold. This nanostructure stacks with each other by the shape complementarity at its top and bottom surfaces of the cylinder, while the number of stacking is limited by twisting angle of the shaft. Experiments have shown that the size distribution of multimeric assembly of the origami depends on the twisting angle of the shaft; the average lengths of the multimer are decamer, hexamer, and tetramer for 0°, 10°, and 20° twist, respectively. In summary, it is possible to affect the number of polymerization by adjusting the precise shape and movability of a molecular structure.     

Bottom-up pyramid cellular acceptors with three-dimensional layers

In 1997, C.R. Dyer and A. Rosenfeld introduced an acceptor on a two-dimensional pattern (or tape), called the pyramid cellular acceptor, and demonstrated that many useful recognition tasks are executed by pyramid cellular acceptors in time proportional to the logarithm of the diameter of the input. They also introduced a bottom-up pyramid cellular acceptor which is a restricted version of the pyramid cellular acceptor, and proposed some interesting open problems of the bottom-up pyramid cellular acceptors. On the other hand, we think that the study of threedimensional automata has been meaningful as the computational model of three-dimensional information processing such as computer vision, robotics, and so forth. In this paper, we investigate about bottom-up pyramid cellular acceptors with three-dimensional layers, and show their some accepting powers. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008     

Effect of the dilation caused by helium bubbles on edge dislocation motion in α-iron: molecular dynamics simulation

Various types of nanometric defects such as voids and helium (He) bubbles produced by high-energy neutron irradiations are known to degrade the mechanical properties of irradiated materials. In this study, we have evaluated the obstacle strength of He bubbles to the mobility of an edge dislocation in α-iron for 2 and 4 nm bubbles with He-to-vacancy (He/V) ratios ranging from 0 to 1 at 300 and 500 K, by molecular dynamics simulation. Results showed that as the He/V ratio increases, the obstacle strength needed for the release of a dislocation from the bubble becomes stronger up to a moderate He/V ratio (0.6 and 0.4 for 2 and 4 nm bubbles, respectively, at both temperatures), and a further increase in the He/V ratio leads to weakening of the obstacle strength. For He/V = 1, the obstacle strengths are 10–30% weaker than those at moderate He/V ratios depending on the bubble size and temperature. The extent of obstacle strength was found to be correlated with the dilation caused by He bubbles depending on the bubble size, He/V ratio, and temperature.