Development of enhanced depth-resolution technique for shallow dopant profiles

A rapid shrinkage in the minimum feature size of integrated circuits requires analysis of dopants in their shallow source–drain and their extensions with an enhanced depth resolution. Rutherford backscattering spectroscopy (RBS) combining a medium-energy He ion beam with a detector of improved energy resolution should meet the requirement of a depth resolution better than 5 nm at a depth of 10–20 nm in the next 10 years. A toroidal electrostatic analyzer of 4×10⁻³ energy resolution has been used to detect the scattered ions of a medium-energy He ion beam. Five keV As⁺ implanted Si or SiO₂ samples were measured. Depth profiling results using the above technique are compared with those of glancing-angle RBS by MeV energy He ions. Limitations in the energy resolution due to various energy-spread contributions have been clarified.     

A finite element parametric study on the mechanical properties of J-shaped steel hysteresis devices

The present paper discusses the mechanical properties of J-shaped steel hysteresis devices, abbreviated to “J-dampers”, interposed between the upper structure of a spatial structure and its substructure. The mechanical properties of a J-damper, which are characterized by its key geometrical and material parameters, are evaluated through parametric analyses using an in-house Finite Element program. The hysteresis behavior of a J-damper is also modeled by a bi-linear elasto-plastic hysteresis model with the strain-hardening effect. Its elastic stiffness, yield strength and dimensionless hardening ratio, which are expressed as functions of the parameters, are formulated on the basis of mathematical models and the results of parametric studies. Finally, some remarks relevant to the application of the proposed hysteresis model are made for the design of the J-damper.     

亚波长设计中的可制造性验证方法

描述了一种采用分辨率提高技术后用于可制造性设计的验证方法.该方法的目的是验证设计功能与设计目的是否一致,更精确地说,使刻印出来的图像与设计一致.还描述了这种基于模型的验证方法的过程建模,实例说明这种方法的性能.     

A noncontact NDE method using a laser generated focused-Lamb wave with enhanced defect-detection ability and spatial resolution

The laser generation method of a focused Lamb wave is expected to have high defect-detection abilities and spatial resolution, with the added advantage of noncontact testing. In this method, the laser beam is illuminated on the surface of an object through an arrayed arc slit. The energy of the generated Lamb wave is then concentrated at a focus of an arc. This focusing effect improves the NDE (nondestructive evaluation) performance, which is dependent on the geometries of an arrayed arc slit. In this paper, the relationships between the parameters determining the slit geometry and the focusing effect of the generated Lamb wave was investigated using a parametric study, and appropriate values of the parameters were obtained to maximize the focusing ability. In order to validate the performance of this method, an NDE system was constructed and experiments were performed to detect through-hole defects in a plate. The results showed that the proposed system could clearly detect defects as small as 0.3 mm in diameter, while the conventional line array method failed to detect defects smaller than 1 mm in diameter. Moreover, this method showed possible detection of defects much smaller than 0.3 mm, and great improvements in the spatial resolution as compared with the line array method.     

基于S-CDMA的HFC上行信道接入协议性能仿真分析

讨论了基于S－CDMA的HFC网上行信道的高效接入协议－SAMA，提出了双信道接入机制的工作原理，并对系统性能进行了分析与计算机仿真，得到一些有意义的结论。     

用高速DSP实现雷达地物杂波模拟

把高速数字信号处理器(DSP)用于雷达的杂波模拟是一项很有前景、且正在被广泛应用的技术。文中从雷达杂波的分布特性出发,分析了低分辨率雷达的地物杂波的幅度概率密度分布和功率谱分布特性。并建立了一种有效的快捷的杂波模拟算法模型,以ADSP-TS101S为核心,设计完成了采用并行处理结构的一种雷达杂波实时模拟系统。     

ACCELERATION AMBIGUITY FUNCTION OF RADAR SIGNALS AND ITS APPLICATION

High acceleration of radar targets is analyzed using Acceleration Ambiguity Function(AAF). The acceleration resolution based on AAF is defined. The AAF and acceleration resolution of rectangle pulse signal are derivated and the conclusion that its acceleration resolution is in inverse proportion with the square of its duration is drawn. In the end, these conclusions are applied to the parameter designing and performance evaluation for a certain type of pulse Doppler radar.     

离轴数字全息记录条件的研究

用振幅全息和菲涅耳衍射理论,分析离轴数字全息记录系统结构参数对数字全息再现的影响,并进行相应的实验验证。理论分析和实验研究结果都表明,如果记录物体和CCD的尺寸固定,记录物体和CCD之间的记录距离将直接影响数字全息再现像的分离状况和系统的分辨率,在保证再现像分离的前提下,缩短物体和CCD之间的距离将有利于数字全息再现像分辨率的提高。     

基于宽带毫米波工作体制的雷达目标识别方法探讨

对基于宽带毫米波工作体制的雷达目标特征获取和识别方法进行了综合分析和探讨.表明:在毫米波照射下,雷达目标可模型化为由多个散射中心组成的扩展目标;只要发射信号有足够的带宽,就可以从回波信号中获得各散射中心的空间分布、类型等特征;仿真结果说明,这种方法对高频区复杂目标的识别是有效的.