AZ80镁合金筒形件微弧氧化膜缺陷分析及改进

针对AZ80镁合金筒形件微弧氧化膜表面存在沿挤压方向分布的灰黑色线条问题,借助X射线衍射仪、扫描电镜、能谱仪和金相显微镜分析了镁合金基材的组织结构和元素组成,认为该缺陷的形成与基材中β-Mg17Al12物相偏析有关.降低基材挤压温度和延长微弧氧化时间后缺陷消除.     

用于共振腔光电探测器的Si基Bragg反射器

Si基共振腔型光电探测器的关键工艺是隐埋Bragg反射器镜面的制备.用PECVD方法在Si衬底上制备了SiOxNy/SiBragg反射器,研究了Bragg反射器的反射谱和退火行为.     

Photocurrent Measurement of Si1-xGex/SiMultiple Quantum Wells With Ion Implantation and Thermal Annealing

Ｐｈｏｔｏｃｕｒｒｅｎｔｓｐｅｃｔｒｏｓｃｏｐｙｉｓａｗｅｌｌ－ｋｎｏｗｎｍｅｔｈｏｄｆｏｒｔｈｅｉｎｖｅｓｔｉｇａｔｉｏｎｏｆｔｈｅｂａｎｄｇａｐｅｎｅｒｇｙｏｆＳｉＧｅａｌｌｏｙ［１～３］．Ｔｈｅｍｅａｓｕｒｅｍｅｎｔ...     

用氧化多孔硅方法制备厚的Si02膜及其微观分析

用氧化多孔硅的方法来制备厚的SiO2成本低,省时.氧化硅膜的厚度,表面粗糙度和组分这三个参数,对波导器件的性能有重要影响,扫描电子显微镜(SEM)、原子力显微镜(AFM)和俄歇分析得到：氧化的多孔硅的膜厚已达21.2μm;表面粗糙度在1nm以内,Si和O的组分比为1:1.906.这些结果表明,用氧化多孔硅方法制备的厚SiO2膜满足低损耗光波导器件的要求.     

用于共振腔光电探测器的Si基Bragg反射器

Si基共振腔型光电探测器的关键工艺是隐埋Bragg反射器镜面的制备.用PECVD方法在Si衬底上制备了SiOxNy/Si Bragg反射器,研究了Bragg反射器的反射谱和退火行为.     

虚拟拉伸实验的设计和实现

利用虚拟现实技术开发了虚拟拉伸实验,阐述了该虚拟实验的功能特点、结构模式以及设计原理,分析了其实现流程及方法,包括三维场景建模、虚拟场景动态生成以及交互式虚拟场景的开发。提出了利用可视化编程语言VB开发一个实现复杂交互动作功能的平台,该平台提供了友好界面,使用户能够直观地组成虚拟三维实验场景,利用键盘或鼠标来控制三维试验机在虚拟场景中运动,并根据用户的指令实现从静态界面对虚拟场景的调用及虚拟场景中试验仪器、工具及其事件的交互,从而控制虚拟模型的动作进行实验。     

基于SOI纳米线AWG超紧凑三向滤波器

本文针对FTTH,设计并制备了基于SOI纳米线AWG的三向滤波器。利用传输函数法模拟了器件的传输谱,模拟结果表明器件能很好的实现三向滤波的功能。通过深紫外光刻和感应耦合等离子刻蚀设备,制备了所设计的器件。输出光谱分析表明,器件的通道间串扰为-15 dB,3 dB带宽为11.04 nm,三个通道的输出波长分别为1455 nm、1510 nm和1300 nm,偏离了设计值,波长的偏移主要是由制造过程中阵列波导宽度的偏移设计宽度45 nm引起的,材料色散也是导致波长偏移设计值的一方面原因。     

Ultra compact triplexing filters based on SOI nanowire AWGs

An ultra compact triplexing filter was designed based on a silicon on insulator(SOI) nanowire arrayed waveguide grating(AWG) for fiber-to-the-home FTTH.The simulation results revealed that the design performed well in the sense of having a good triplexing function.The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.The experimental results showed that the crosstalk was less than -15 dB,and the 3 dB-bandwidth was 11.04 nm.The peak wavelength output from ports a,c,and b were 1455,1510 and 1300 nm,respectively,which deviated from our original expectations.The deviation of the wavelength is mainly caused by 45 nm width deviation of the arrayed waveguides during the course of the fabrication process and partly caused by material dispersion.     

Tunable filters based on an SOI nano-wire waveguide micro ring resonator

Micro ring resonator(MRR) filters based on a silicon on insulator(SOI) nanowire waveguide are fabricated by electron beam photolithography(EBL) and inductive coupled plasma(ICP) etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range(FSR) is 16.8 nm and the extinction ratio(ER) around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter’s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions: during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.     

低功耗热光可调光衰减器的设计与制备

可调光衰减器(VOA)是波分复用(WDM)系统中最重要的器件之一,它的主要功能是控制和衰减光信号。设计并制备了基于石英衬底的4通道马赫增德尔(Mach-Zehnder)干涉型热光可调光衰减器阵列。首先介绍了热光可调光衰减器的结构和原理,模拟了在有外加偏压时的热场分布,然后介绍了器件的设计及制备工艺过程,并对所制备的器件进行测试。实验结果表明,制备器件的插入损耗小于1.1 dB,动态衰减范围为0~30 dB。在衰减量为30 dB时,外加偏压为12.5 V,功耗仅有120 mW。最后分析了测试结果,并提出了改善器件性能的方法。