矩形波宽带通滤光膜研究

对矩形波宽带通滤光片进行了深入研究,提出了一种设计、制备矩形波宽带通滤光片的方法。使用该方法设计并制备了400 nm～1 100 nm波段,中心波长λ₀=515 nm,透射带λ=λ₀±25 nm,透射带平均透射率■≥92%,截止带λ=400 nm～475 nm、λ=555 nm～1 100 nm,截止带透射率小于0.1%的矩形波宽带通OD3-A滤光片。对样片光谱进行了测试,结果满足需求。该方法设计、制备矩形波宽带通滤光片克服了F-P型窄带滤光膜监控精度要求高、通带宽带窄、成本高以及传统长、短波截止膜组合方式膜层总厚度过大、通带透过率低、波形矩形度差的缺点。     

中波红外8通道微型集成滤光片的研制

利用组合刻蚀法布里珀罗（F－P）干涉滤光片的谐振腔间隔层的方法,制备了集成在一个基片上的8通道中波红外（λ₀=2.8 μm）窄带滤光片,通道线宽为0.7 mm,光谱通道定位精度优于1%,各通道相对半峰宽为1%,此法有效提高了成品率,并可满足实现通道数更多,集成度更高的滤光器件发展的需求,     

0.2 nm带宽滤光片的制备以及退火温度对其形貌和性能的影响

近红外波长为1.064 μm的激光是激光测距、自由空间光通信和空间光学遥感等应用中的主要激光光源之一.窄带滤光片是抑制背景光干扰的关键元件之一,目前大部分滤光片的半峰全宽为几纳米.本文研制了中心波长为(1064±0.05) nm、半峰全宽为0.19 nm、峰值透过率可达70.2％的带通滤光片,并考察了不同温度(100,200,300℃)退火处理后滤光片的表面形貌和光谱特性的变化.实验结果表明:滤光片的表面光滑,受退火温度的影响很小;滤光片的透射光谱随着退火温度的升高向长波方向移动,在100℃退火处理3h的滤光片的光谱漂移量为0.03 nm,说明该滤光片可在温控条件有限的空间光学系统中使用.     

硅薄膜的短波红外光学特性和1.30μm带通滤光片

在短波红外区域(1～3μm),硅薄膜材料因其具有折射率高、透明性好、膜层应力易匹配等诸多优点而得到广泛应用。基于改进后的Sellmeier模型拟合出了制备的硅薄膜的短波红外光学特性,以此为基础,选用硅和二氧化硅两种材料,设计并制备出中心波长在1.30μm,相对带宽2.46%的带通滤光片。利用了硅薄膜在波长小于1.0μm波段的吸收特性较好地扩展了带外截止范围。测量结果表明,具有2个谐振腔的带通滤光片峰值透射率达到85.8%,半功率带宽控制在约32nm,带外截止范围覆盖了波长小于1.75μm的光谱区域。     

ZnO亚微米和微米棒的晶体生长及发光性质

用硝酸锌Zn(NO3 )2·4H2O和六亚甲基四胺 (CH2 )6N4,通过化学溶液法在玻璃衬底上生长出ZnO六角形亚微米和微米棒(长 5~6μm,直径 0. 8 ~5μm)。生长时间达两天后,ZnO棒呈中空六角形微米管。测量了样品的X射线衍射(XRD)谱,扫描电镜像和喇曼光谱。ZnO微米棒的光致发光为橙红色宽谱带发射(峰值 630nm, 半峰全宽 250nm), 其激发光谱除带间本征激发(短于 370nm)外,还有很强的在导带底附近的室温激子激发峰(峰值 387nm,半峰全宽 30nm)。而阴极射线发光有两个发射峰,橙色宽谱带强峰 (峰值580nm,半峰全宽约为140nm)是缺陷发光峰,近紫外窄谱带弱峰(峰值 395nm,半峰全宽约为 20nm)是激子发光峰。     

微结构窄带滤光片设计及制备工艺研究

为了提升微结构窄带滤光片的光谱透过率,增大微结构单元的制备精度,提出一种新的膜系镀制方法和微结构单元的制备方法。基于法布里-珀罗(F-P)多光束干涉仪原理设计了3种不同中心波长的窄带滤光片,采用光化学掩模分离法和PECVD技术相结合,制备出3种中心波长分别为480 nm、520 nm和590 nm,峰值透过率均大于80%,半宽度30 nm~50 nm,微结构单元的通道面积为50 μm×50 μm的窄带滤光片。光谱透过率得到了提升的同时微结构单元边缘整齐、分界线清晰,精度也得到了有效地增加,达到μm量级。     

Fe掺杂ZnO纳米球的光学特性

采用微乳液法制备了Fe掺杂ZnO纳米球材料(Zn1-xFexO,x=0.1),利用XRD和TEM对制备样品的结构、形貌进行了表征。在室温下,测得材料宽化的吸收光谱。用325nm的激光激发,测量了ZnO纳米球的光致发光光谱,低强度激发时观察到半峰全宽较窄、峰值波长为385nm的紫光峰和半峰全宽较宽、峰值波长约625nm的深能级发光峰;两峰的发光强度和峰位随着激发光功率密度的变化而变化,但变化规律不同。所合成材料的吸收和发光性质与Fe掺杂相关。     

空间外差光谱仪滤光片光场非均匀性研究

空间外差光谱仪采用窄带滤光片限制仪器光谱范围,避免光谱混叠。滤光片透过率曲线随入射光角度的变化导致准直系统出射光场呈现随波长变化的非均匀现象。对光场非均匀性机理进行理论推导,证实滤光片调制作用造成复原光谱中卷积了与波长相关的调制函数,导致单色光光谱半峰全宽随波长变化。根据理论公式并结合实验室空间外差光谱仪参数进行了仿真分析,表明光场存在短波下凹和长波上凸的滤光片调制效应。开展了实验室单色光扫描实验,实验测量结果与理论分析和仿真结果一致。提出了一种包络线拟合校正方法,仪器线型函数半峰全宽变化量由校正前的16.7%下降为0.2%,有效去除了滤光片调制函数对仪器线型函数的影响。     

中心波长121.6nm的真空紫外窄带滤光片设计和制备

采用双半波法布里-珀罗(F-P)干涉滤光片结构设计了中心波长在121.6 am的窄带滤光片,其峰值透射率为6.78%,通带半宽度为10.7 nm.通过设计、制备和测量峰值波长在217 nm的滤光片验证了设计用到的光学常数和膜厚定标都比较精确.在此基础上制备了121.6 nm的窄带滤光片,到合肥同步辐射实验室测量的结果是中心波长在120.74 nm,峰值透射率为5.94%,通带半宽度为12 nm.可以看出实际制备的滤光片和预先设计的基本吻合但还是有一定的偏差,最后对实际测量的和理论设计的偏差进行了分析.     

红外线治疗仪中宽波段带通滤光片的研究

研究了一种用于红外线治疗仪的新型滤光片.该滤光片通过对红外线治疗仪光源所发出的光进行选择性滤波,能够降低部分波段光的承载能量,提高治疗仪的安全使用性能.针对红外线治疗仪对滤光片的使用要求,选择Ti3O5和SiO2作为高低折射率材料,采用电子束加热蒸发方式,配合离子辅助淀积技术,利用石英晶控控制法对膜层厚度进行监控,通过反复优化各项工艺参量,制备出在600~1 200nm波段平均透过率高于92%,300~550nm、1 270~2 000nm波段平均透过率低于2%的宽波段带通滤光片.研究中运用"拆分技术要求"的设计思想,对颜色片进行双面镀制,解决了单面膜层过厚难以制备的问题,降低了制备难度,易于批量生产.测试结果表明,该滤光片满足使用要求.     

128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique

A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique in a nine-step deposition process. The pass bands of the filters distribute almost linearly in the range of 722.0∼880.0 nm. The relative bandwidth of the pass bands is smaller than 0.44%. Such a NBPF array can be utilized as a wavelength division component in many optical applications. It is very powerful for the miniaturization of relevant apparatuses. PACS 42.79.Ci; 84.30.Vn; 42.82.Cr; 42.82.Gw     

Integrated optical filter arrays fabricated by using the combinatorial etching technique

A combinatorial etching technique is developed to fabricate integrated narrow bandpass filters on a single substrate. It is highly efficient for fabrication of integrated filter arrays in optical regions. A monolithic filter array has been fabricated by using the technique with a two-step deposition process. The filter contains 32 elements in the near-infrared region. The relative full width at half-maximum (FWHM) sigmalambda/lambda of the filter elements is less than 0.2%. Such a narrow bandpass filter array can be utilized in many optical applications.     

Realization of Integrated Narrow Bandpass Filters in the Infrared Region

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 m in this case. The relative full width at half maximum (FWHM) / of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.     

16 × 1 integrated filter array in the MIR region prepared by using a combinatorial etching technique

A combinatorial etching technique is introduced to prepare integrated narrow bandpass filters in the mid-infrared (MIR) region. In this region, a 16×1 filter array has been fabricated successfully with two deposition processes combined with the combinatorial etching technique. The pass bands of the 16 filter elements range from 2.534 to 2.859 μm with bandwidth (BW_{3 dB}) less than 0.013 μm (BW_{3 dB}/λ≤0.48%). The insertion loss of the pass bands is between 1.75 and 3.43 dB. The results show that the technique is effective for the fabrication of filter arrays in the MIR region and can be extended to most of the important optical regions. PACS 42.79.Ci; 84.30.Vn; 42.82.Cr; 42.82.Gw     

Gradient-index narrow-bandpass filter fabricated with glancing-angle deposition

Glancing-angle deposition (GLAD) is a fabrication method capable of producing thin films with engineered nanoscale porosity variations. GLAD can be used to create optical thin-film interference filters from a single source material by modification of the film refractive index through control of film porosity. We present the effects of introducing a layer of constant low density into the center of a rugate thin-film filter fabricated with the GLAD technique. A rugate filter is characterized by a sinusoidal refractive-index profile. Embedding a layer of constant refractive index, with a thickness equal to one period of the rugate index variation, causes a narrow bandpass to appear within the filter's larger stop band. Transmittance measurements of such a gradient-index narrow-bandpass filter, formed with titanium dioxide, revealed an 83% transmittance peak at a vacuum wavelength of 522 nm, near the center of the stop band, with a FWHM bandwidth of 15 nm.     

窄带集成声光可调谐滤波器的研制

利用模式耦合理论分析了声光模式转换,并对声光可调谐滤波器的滤波带宽、调谐范围、驱动功率等性能参数进行分析计算。设计并制作出窄带集成声光可调谐滤波器(IAOTF)样品,搭建相应的IAOTF测试平台,得到中心波长在1.55μm,滤波带宽达到0.85 nm,波长调谐范围达到80 nm,驱动功率低于40mW的IAOTF。并对进一步压缩滤波带宽和旁瓣效应提出了解决途径。     

新型透射式全息窄带带阻滤光器的光谱特性分析

滤光器在光谱学、光学测量和激光物理中有着极其重要的应用。全息滤光器是一种新型滤光器,特别是利用重铬酸明胶(DCG)记录的全息透射式窄带滤光器,其主要特点为对主谱线有很窄的带宽。文章主要用紫外-可见分光光度计测定用DCG记录的透射式全息窄带带阻滤光器的光谱特性,测量结果分析表明,滤光器在可见光区域(400～800 nm)对其中心波长的相对透射率小于2%,其他谱线的相对透射率大于85%。且滤光器有较窄的带宽,其半宽度小于12 nm,十分之一宽度小于15 nm。对氩离子激光(Ar+)主谱线514.5 nm有优良的滤光特性。     

Add/drop filter using in-plane slanted gratings in azo polymers

We have fabricated in-plane slanted gratings on azo-functionalized polymeric films using a fast, direct-writing method. By properly adjusting the resonance, these gratings can be used as 90 degrees integrated reflectors and add/drop filters in the plane of the film. We have produced an attenuation of 14.8 dB at 1560.2 nm with a FWHM of 6.47 nm. Also, a signal of 1548 nm wavelength was added to the output from a different direction. Any light shifted from the resonance will pass through the filter undisturbed.     

Tunable polymer waveguide Bragg filter fabricated by direct patterning of UV-curable polymer

Tunable polymer wavelength filters are demonstrated using a silicon-nitride grating which gives high refractive index contrast with polymers. The polymer waveguides are defined using direct patterning of a liquid-state UV-curable polymer by proximate-contact lithography technique. The wavelength filter exhibits a narrow bandwidth of less than 1.0 nm and a transmission dip of more than −15 dB. The peak wavelength is shifted over 10 nm in the temperature range of 25-70 °C and the thermal tuning efficiency is −0.212 nm/°C.     

Super Narrow Bandpass Filter Using Fractal Cantor Structures

In this paper, we present a new photonic crystal structure, which is composed of fractal Cantor multilayer with a defect embedded in its middle. Optical transmission matrix method is used to calculating the transmittance and reflectance. Compared with general Cantor multilayer, we find the new structure has wider stopband and shows a super narrow band in the middle of wider stopband. It can be served as a super narrow bandpass filter. The pass band obtained can be less than 0.6nm near the infrared 1530 nm. The optical transmission is the center wavelength is higher than 99 %. This means a very low insert loss. It is more superior to other kind narrow band filters. This kind of photonic crystal super narrow band optical filter may find applications in super dense wavelength division multiplexing for optical communications and precise optical measurement.