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高阻硅上RF-MEMS共面波导设计及测量研究 总被引:5,自引:5,他引:0
设计并实现了基于高阻硅RF-MEMS(射频-微机电系统)共面波导传输线(CWP), 并测量和分析了不同偏压下的特征阻抗值。利用部分电容法和保角变换法得到的分析公式确定了特征阻抗为50 Ω的共面波导的几何结构尺寸,采用MEMS准平面加工工艺在高阻硅衬底上实现了2.5 μm厚的金共面波导结构。在施加不同直流偏压的情况下对所设计的共面波导进行了S参数测量。计算了Winkel多项式中所有系数的具体表达式,运用该多项式获得了共面波导的特征阻抗,并与传统的特征阻抗提取方法进行了结果比较。实验数据表明,在中心信号线上施加的直流偏压对S参数的影响很小,而对共面波导特征阻抗的影响较为明显,当施加的直流偏压从0 V变为38 V时,特征阻抗的实部会增加,变化幅度小于1.2 Ω,虚部会减小,变化幅度小于0.8 Ω。 相似文献
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线结构光视觉传感器的现场标定方法 总被引:16,自引:1,他引:16
建立了线结构光视觉传感器的数学模型,提出了一种基于共面标定参照物的线结构光视觉传感器的现场标定方法。该方法允许共面标定参照物在测量空间内自由移动,通过以摄像机三维坐标系为中介,将多个局部世界坐标系下的标定特征点统一到全局世界坐标系中,利用构建的标定特征点在现场对线结构光视觉传感器进行标定,因此可以保证线结构光视觉传感器的标定状态与测量状态完全一致。该标定方法降低了标定设备的成本,简化了标定过程,提高了线结构光视觉传感器工程化应用的便捷性。试验结果表明,该方法切实可行。 相似文献
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以共面波导作为测试夹具,用射频矢量网络分析仪对小尺寸、小容量的贴片式电容进行扫频测量.结合微波网络理论进行分析,并应用最小二乘法拟合计算后,得出的贴片式电容的测量值与标称值吻合较好,说明该方法可行. 相似文献
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《仪表技术与传感器》2016,(2)
为解决相对介电常数的快速测量以及长时间监测其随环境变化的问题,在研究不同填充介质对共面平板电容量值影响的基础上,提出了用同面电容法测量材料的相对介电常数。设计了包含同面多电极电容传感器、电容测量电路、单片机控制与液晶显示电路的测量系统,实现了相对介电常数测量。实验结果表明:该系统能有效地测量固体材料的相对介电常数,精度可达到5%。测量系统无需制样,只需将传感器测量区域靠近待测目标即可实现快速测量和长时间在线监测。 相似文献
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汤伟文 《机械工人(冷加工)》2000,(10):11-12
在组合机床上同时精铣几个平面且要保证共面,刀具的调整是非常重要的,如果调整不合理,将会影响工件的平面度和表面粗糙度,从而影响到整个工件的加工质量,甚至出现超差而造成废品。下面将介绍保证多面不对称铣削共面性刀具调整的方法。 相似文献
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袁安平 《机械工人(冷加工)》2014,(5)
正1.问题的提出在重型龙门式机床的生产中,遇到了关于"两立柱导轨面共面测量"的新课题。如图1所示,其立柱导轨跨距一般在4m以上。查阅现有资料,此项目有采用钢丝法测量的先例,但对操作者水平要求较高,其准确性及效率不能适应现阶段的生产需要。因此,急需探索一种新方法来解决这一问题。 相似文献
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H.-N. Yen D.-M. Tsai 《The International Journal of Advanced Manufacturing Technology》2004,24(1-2):132-139
Ball-Grid-Array (BGA) has become one of the most popular packaging techniques in the electronics industry. Coplanarity inspection of BGA solder balls is critical for process and quality control in BGA manufacturing. Currently, the 3D measurement systems for BGA coplanarity inspection are mainly based on laser scanning techniques. However, they suffer from low inspection speed due to the physical line-scanning process. In this paper, a fast and cost-effective 3D measurement system for coplanarity inspection of BGA solder balls is proposed. The proposed system uses an LCD-based phase measuring technique to perform full-field 3D measurement of BGA solder balls with high accuracy. Experiments have shown that the coplanarity measurement of BGA solder balls is very efficient and effective with the proposed system. The measurement repeatability is in the micrometer range. The processing time of the proposed 3D measurement system for an image of 640×480 pixels is less than 2 s on a typical personal computer. 相似文献
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《Measurement》2014
A machine vision method for measuring normal strain with high precision is presented. In the method, planar projection is modeled in order to enable the measurement without requiring coplanarity of the imaging and measured plane. Some of the model parameters are determined using translational displacements of known value. Along the single direction according to the need of measurement, the correction of distortion is involved in the method to improve the precision. Experiments were designed to validate the accuracy of the proposed method and confirm factors affecting the measurement results. 相似文献
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线阵-面阵CCD三线阵立体测绘相机焦平面组件的研制 总被引:3,自引:2,他引:1
介绍了线阵-面阵CCD(LMCCD)制式相机的相关原理,提出实现LMCCD相机的关键在于相机焦平面组件的研制.给出了LMCCD相机焦平面组件在研制过程中的关键技术,如LMCCD像面基板与CCD的高精度拼接,焦平面组件电子学部分的低噪声、高集成度设计,焦平面组件在真空环境下的热噪声抑制和热传导设计,以及焦平面组件的装配和焊接等.最后,给出了研制和测试结果.LMCCD拼接的共面精度优于5 μm,平移量和平行度均优于2μm;在典型工作情况下,实验室测试信噪比优于90;在15 min的工作周期下,焦面组件的温度控制在30℃以下.这些结果满足LMCCD制式相机关于CCD拼接、焦面温度控制和信噪比的要求. 相似文献
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为研究影响数字比例阀先导级高速开关阀响应特性的主要因素,以常闭高速开关阀为研究对象,阐述了该阀结构特征及工作原理,分析了数学机理,运用ANSYS电磁仿真软件建立高速开关阀轴对称二维瞬态电磁模型。通过对高速开关阀电磁特性分析及实验测试,验证了所建模型的正确性。基于该模型在不同线圈匝数、阀芯质量、线圈内阻、复位弹簧刚度、衔铁与挡铁吸合接触面积时,对高速开关阀阀芯运动各阶段进行动态模拟,分析了影响高速开关阀响应特性的主要设计参数。结果表明:线圈匝数对高速开关阀响应速度的影响最大,当线圈匝数增加67%时,高速开关阀开启时间延长27.8%,关闭时间延长11.6%,总响应时间延长21.6%;线圈内阻、阀芯质量与复位弹簧刚度3个因素对高速开关阀响应速度的影响次之,环形接触面积对高速开关阀总响应时间影响较小,磁轭壁厚对高速开关阀运动各阶段响应时间基本没有影响。 相似文献
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Anastatus japonicus Ashmead (Hymenoptera: Eupelmidae) is an important egg parasitoid of several major insect pests. To better understand its host finding mechanisms, the antennal sensilla of female wasp were investigated by scanning electron microscopy. Sensilla chaetica were found mainly on radicle and pedicel segments of the antennae. i-Type sensilla, s. campaniformia, and corneous sensilla were detected on the leeward side, while s. coeloconica and lance sensilla were presented on the windward side of the antennae. S. trichodea and s. basiconica were more abundant on the leeward side than on the windward side of the antennae. More s. placodea were found on the windward side than on the leeward side of the right antenna, while the opposite results were observed on the left antenna. Overall, more s. placodea were found on the right antenna than that on the left antenna. The numbers of s. trichodea and s. basiconica on the clava or the third flagellum antennomere of the right antenna were more than those of the left antenna, whereas their distribution patterns on the other corresponding antennomeres were reverse. Our results showed that there is a strong asymmetrical antennal sensilla distribution quantitatively and spatially between the left and right antennae. Placoid sensilla are present more on the right antenna than on the left antenna. S. campaniformia, corneous sensilla, and i-type sensilla were found only on the leeward side of the antennal clava, while their external morphology and potential functions were described and discussed in detail for the first time. 相似文献