紫外曝光机均匀照明系统的设计与研究

紫外曝光机是印刷线路板(PCB)制作工艺中的重要设备,PCB高密度、微细化的发展趋势,对曝光机光照均匀性,平行性的要求越来越高。为了找出可以更好满足市场需求的曝光机光学系统,运用非成像光学方法,对两种不同光学结构曝光机的光斑均匀性进行了对比分析。通过实验可以看出,在通光孔径较大的光学系统中,复眼透镜阵列和方棒对改善系统光照均匀性以及能量利用率的作用,在实验基础上对如何选择光学系统的匀光器件做了对比性阐述。     

电子束曝光机的软件系统

电子束曝光机是研制大规模集成电路的重要设备。它的运行必须由计算机进行控制并提供数据。本文简要地介绍了之类曝光机所需的控制软件及数据处理软件的构成及功能，并介绍了软件开发中的一些考虑。     

电子成果信息

高速消隐装置高速消隐装置是电子束曝光机上的关键系统,而电子束曝光机是用来制作大规模、超大规模集成电路和特种军事微电子器件的关键设备。高速消隐是决定电子束曝光图形的位置精度及曝光效率的关键。它的研制成功使电子束曝光机的曝光效率提高了5～10     

PCB曝光机自动控制系统设计

根据Printed Circuit Board（简称PCB）在生产制造过程中的工艺流程要求,设计了基于PLC控制的曝光机自动控制系统,包括控制系统的方案、硬件配置以及PLC输入输出点的地址分配和软件控制程序。该系统很好地满足了企业生产制造需求,具有自动化程度高,可靠性好等特点,提高了曝光机的生产质量和效率。     

PCB曝光机照明系统的均匀性仿真与研究

近年来,电子信息类产品在不断地追求着高性能化,印刷电路板也随之高密度、微线化。紫外线曝光机是印制板制造工艺中的重要设备,而光学曝光作为PCB制作工艺过程中的一个重要环节对光照度的均匀性要求比较严格,现应用非成像光学的设计方法,实现了一种新型的曝光机均匀照明系统,并使用基于蒙特卡罗法的光线追迹软件对该光学系统进行了模拟仿真。实验表明,采用该研究设计的照明系统能够改善PCB曝光机紫外照明光源的配光性能,光强分布均匀稳定、能够满足光学曝光过程对光源的指标要求,具有可操作性。     

航源公司近期开发出PCB生产设备

航源公司近期开发出ＰＣＢ生产设备由中国航天工业总公司所属航源机电设备有限公司（以下简称航源）与国营２００厂联合生产的ＥＸＰＯ’型大功率Ｒ面曝光机于今年初正式推出。该曝光机是全部引进意大利ＣＥＤＡＬ公司同类机型的图纸和关键部件，按航天工业质量保证体系要...     

电子成果信息

高速消隐装置 高速消隐装置是电子束曝光机上的关键系统,而电子束曝光机是用来制作大规模、超大规模集成电路和特种军事微电子器件的关键设备。高速消隐是决定电子束曝光图形的位置精度及曝光效率的关键。它的研制成     

电子束在MEMS加工中邻近效应的分析与补偿

电子束刻蚀后,通过刻蚀改变了薄膜基片中的分子的重量,并导致希望曝光区域和实际曝光区域不一致,这一现象被称为“邻近效应”。利用SDS-3电子束曝光机完成有关邻近效应的试验。加工过程中加速电压为5～30kV,衬底基片为硅和PMMA,使校正后邻近效应参量η减少30％。给出实际完成基片图。     

可自动调节曝光时间的曝光机控制系统设计

为了解决紫外光灯随使用时间的增加而曝光量不足的问题,研究设计了一套随曝光量而改变曝光时间的PLC控制系统。该系统由西门子PLC(S7-200)、模拟量扩展模块(EM231)、紫外接收模块、MT4000系列人机界面等硬件组成。介绍了自控式曝光机的电气系统构成及软件控制的设计方法。     

中科院光电所研制出3米长光栅复制光刻机

近日,一种新型“3米长光栅复制光刻机”在中科院光电技术所研制成功。这是该所继成功研发URE-2000系列大面积曝光机后创新研发的一项新型精密光刻设备。该机在母尺和工件间抽真空,采用蝇眼透镜的i线均匀照明系统,结合气浮工件台一维运动而实现大行程的扫描、真空接触、i线曝光。其照明均匀性为±2％,光刻分辨力优于5微米,照明面功率密度50mW／cm^2,     

机器视觉中的一种简单的自动曝光算法

介绍一种机器视觉中使用的为获得最佳图象通过自动调整得到最佳曝光时间和增益参数的自动曝光算法,并说明原理、方法和编程流程。     

The adaptive boundary approach for exposure assessment in a broadband EMF monitoring

The boundary approach for the assessment of daily exposure to electromagnetic fields (EMF) has been recently proposed for the continuous and broadband EMF monitoring of the Serbian Electromagnetic Field Monitoring Network – SEMONT. This approach is based on the determination of the daily upper and lower exposure boundaries, combining data of the continuous in situ EMF monitoring in a broadband frequency range and the minimal and maximal prescribed reference levels. The real exposure is positioned between these boundaries. In this paper, the enhancement of the boundary approach is presented. By adjusting the existing boundaries and reducing the difference between them, the precision of the daily exposure assessment in the SEMONT system has been improved. The frequency selective measurement has been used to determine the frequencies on which EMF sources radiate over a particular area and in situ location. Consequently, the new minimal and maximal reference levels can be selected; these are suitable for a particular in situ location and should be used for the calculation of exposure boundaries on that location. A simple in situ test measurement of the high-frequency electric field strength was performed, in order to verify the proposed adaptive boundary approach. The analysis shows that this approach attained reduction in boundaries difference of 36.25%, regarding the Serbian legislation, resulting with the increased precision of the daily exposure assessment for the broadband EMF monitoring.     

一种帘幕式快门曝光精度分析

为了确定帘幕式快门各尺寸参数曝光精度的关系,推出曝光精度的数学模型。分析了影响快门曝光时间精度的主要因素,用误差合成法对快门曝光时间进行了精度分析,为设计提供了依据。首先,结合帘幕式快门的工作原理及快门的曝光时间表达式建立了曝光精度的数学模型。然后,对曝光时间表达式中的各个参数的误差进行了分析,应用误差合成法对各个参数误差对曝光时间的影响程度做了分析计算。最后,对现有航空相机中应用的快门进行了精度的分析计算。实验表明：曝光时间精度随着帘缝宽度的增加而提高,现有航空相机的快门的曝光时间最低精度为曝光时间的6.4％,高于理论计算精度8.59％。在1/1000s－1/100s范围内快门的有效曝光时间与帘缝宽度成正比,帘缝宽度对曝光精度的影响是帘缝速度对曝光精度影响的3.6倍,快门曝光时间的精度随着帘缝宽度的增加而提高。     

Support vector machine in machine condition monitoring and fault diagnosis

Recently, the issue of machine condition monitoring and fault diagnosis as a part of maintenance system became global due to the potential advantages to be gained from reduced maintenance costs, improved productivity and increased machine availability. This paper presents a survey of machine condition monitoring and fault diagnosis using support vector machine (SVM). It attempts to summarize and review the recent research and developments of SVM in machine condition monitoring and diagnosis. Numerous methods have been developed based on intelligent systems such as artificial neural network, fuzzy expert system, condition-based reasoning, random forest, etc. However, the use of SVM for machine condition monitoring and fault diagnosis is still rare. SVM has excellent performance in generalization so it can produce high accuracy in classification for machine condition monitoring and diagnosis. Until 2006, the use of SVM in machine condition monitoring and fault diagnosis is tending to develop towards expertise orientation and problem-oriented domain. Finally, the ability to continually change and obtain a novel idea for machine condition monitoring and fault diagnosis using SVM will be future works.     

设备噪声监测中主分量的特征表示

研究了设备噪声监测中主分量特征表示的提取及应用。在设备噪声时域和频域统计模式特征基础上,通过主分量分析探讨了设备噪声模式的主分量特征表示方法,引入相关度的概念分析了主分量特征表示对设备状态的表征能力,提出了选择有效维数的主分量特征表示进行设备噪声监测的方案。通过在EQ6100 型发动机上预先模拟四种连杆轴承磨损故障,测取噪声信号,实例分析显示了低维主分量特征表示可以有效表征设备状态。实验最后对测试集样本进行状态监测得到了100%的准确率,表明了主分量特征表示用于设备噪声监测的有效性。     

基于GSM短消息的滚动式广告机远程通信控制系统

目前市场上大多数滚动式广告机的监控设备采用有线传输,有些滚动式广告机甚至没有监控设备.滚动式广告机一般分布在不同地区,分布较广,数量众多,这对设备的检测维护带来不便,而且大大降低了效率.针对上述问题,采用GSM短消息作为一种数据传输模式来进行通信,利用西门子TC35i无线模块进行短消息的发送和接收,再对短消息解析得到命...     

Actualities and Development of Heavy-Duty CNC Machine Tool Thermal Error Monitoring Technology

Thermal error monitoring technology is the key technological support to solve the thermal error problem of heavy-duty CNC(computer numerical control) machine tools. Currently, there are many review literatures introducing the thermal error research of CNC machine tools,but those mainly focus on the thermal issues in small and medium-sized CNC machine tools and seldom introduce thermal error monitoring technologies. This paper gives an overview of the research on the thermal error of CNC machine tools and emphasizes the study of thermal error of the heavy-duty CNC machine tool in three areas. These areas are the causes of thermal error of heavy-duty CNC machine tool and the issues with the temperature monitoring technology and thermal deformation monitoring technology. A new optical measurement technology called the ‘‘fiber Bragg grating(FBG) distributed sensing technology' for heavy-duty CNC machine tools is introduced in detail. This technology forms an intelligent sensing and monitoring system for heavy-duty CNC machine tools.This paper fills in the blank of this kind of review articlesto guide the development of this industry field and opens up new areas of research on the heavy-duty CNC machine tool thermal error.     

Condition monitoring studies on spindle bearing of a lathe

In modern industry, machinery must become increasingly flexible and automatic. In order to increase productivity, enhance quality and reduce cost, machine tools have to work free of any failure. When a failure occurs in a machine tool, it is necessary to identify the causes as early as possible. Machine tool condition monitoring is very important to achieve this goal. Condition monitoring is generally used on the critical subsystem of any machine tool. This paper endeavors to focus on the condition monitoring aspects on the machine tool element. In the present study, a critical subsystem has been identified based on the failure data analysis. Condition monitoring techniques like vibration monitoring, acoustic emission, Shock Pulse Method (SPM) and surface roughness have been successfully used for fault identification.