Application of etchant jet for laser micromachining of metal channels

A laser micromachining technique that employs etchant jet for thermochemical wet etching of metallic channels is introduced. In this method, the etchant supplies chemicals for thermochemical reaction and laser beam delivered through an optical fiber provides the thermal energy. For the generation of etchant jet, a nozzle with a gap control function is utilized. By using this method, microchannels with a triangular cross-sectional profile and a depth ranging from 100 to 300 μm and a width ranging from 100 to 200 μm are fabricated on stainless steel 304. Since the etchant is supplied in the form of a liquid jet, it is expected that this technique can be applied for the fabrication of microchannels on industry scale workpiece. The variation of channel size and shape with respect to process parameters is examined. Also, the potential application to the fabrication of metallic microchannels with high-aspect-ratio is investigated.     

Hybrid (LASER + CNC) process for lubricant groove on linear guides

A novel hybrid process [LASER?+?computer numerical control (CNC) machining] is used to fabricate a linear motion guide. A 20-W pulsed fiber laser and a three-axis CNC machining center were combined to fabricate microscale lubrication grooves on a 5-mm wide linear guide contact surface made of SCM-440H material. Ablation fabrication speed was increased up to 1,000 mm/min (or 16.7 mm/s) with a great ablation quality without any tool wear. The mean values of patterned sizes of lubrication grooves were measured to be between 40 and 80?μm in width and between 150 and 275?μm in depth with a laser pulse repetition of 25 kHz. A specially designed optical device was compact enough to be installed on CNC machine. It was mounted on the CNC spindle and proved to be flexible enough to deliver the laser beam on to the work piece. The microscale ablation quality of the surface was of sufficient quality to be adopted on most linear motion related applications.     

Fabrication of microgrooves on a curved surface by the confocal measurement system using pulse laser and continuous laser

In order to fabricate microgrooves on a curved surface, the curved surface was measured with a confocal system and then it was used for laser microprocessing. This paper proposes a new method of using a pulse laser for the confocal system to measure the curved surface. It also compares the conventional way of using a continuous laser and a new way of using the pulse laser with the confocal system. Using the data measured with the pulse laser for fabrication, microgrooves were fabricated on a curved surface. The width of the fabricated microgroove was 10 μm and the depth was 27 μm. The microgroove fabricated on a curved surface as a part of this study can be used in injection molding to manufacture a micropatterned plastic surface at a low cost. This plastic surface can be applied for a superhydrophobic surface, a self-cleaning surface, or a biochip.     

Atom chips on direct bonded copper substrates

We present the use of direct bonded copper (DBC) for the straightforward fabrication of high power atom chips. Atom chips using DBC have several benefits: excellent copper/substrate adhesion, high purity, thick (>100?μm) copper layers, high substrate thermal conductivity, high aspect ratio wires, the potential for rapid (<8 h) fabrication, and three-dimensional atom chip structures. Two mask options for DBC atom chip fabrication are presented, as well as two methods for etching wire patterns into the copper layer. A test chip, able to support 100 A of current for 2 s without failing, is used to determine the thermal impedance of the DBC. An assembly using two DBC atom chips is used to magnetically trap laser cooled (87)Rb atoms. The wire aspect ratio that optimizes the magnetic field gradient as a function of power dissipation is determined to be 0.84:1 (height:width).     

碳纤维增强复合材料水导激光加工实验研究

为了研究水导激光加工关键工艺参数对碳纤维增强复合材料(CFRP)沟槽截面形貌与热影响区的影响,利用水导激光加工设备设计单因素实验探究了激光功率、水射流压力、进给速度及激光重复频率四个关键工艺参数对沟槽截面形貌以及热影响区的影响规律,分析了沟槽截面形貌和热影响区形成机理。实验结果表明：激光功率对沟槽烧蚀深度和热影响区的影响最大,水射流压力对沟槽烧蚀宽度的影响最大,进给速度和激光重复频率对沟槽烧蚀深度和宽度的影响不大,对热影响区有较大影响。此外,发现沟槽截面去除区呈V字形,热影响区呈锯齿形状。通过单因素方法分析得到了较好的沟槽截面形貌,其沟槽截面烧蚀深度为772.8μm,烧蚀宽度为897.7μm,铺设方向为90°的碳纤维层热影响区为326.5μm,铺设方向为0°的碳纤维层热影响区为102.4μm。     

Laser hybridizing with micro-milling for fabrication of high aspect ratio micro-groove on oxygen-free copper

High aspect ratio (HAR) micro-grooves are of great significance for vacuum electronic devices. However, the fabrication of HAR micro-groove on oxygen-free copper remains challenge since the high surface quality is hard to achieve. Aiming to improve the surface quality, a hybrid and successive method, obtained by combining nanosecond laser and micro-milling (NLMM), was presented. The nanosecond laser achieves the maximum workpiece removal rate, while the subsequent micro-milling provides the desired machining quality. Compared to one-way full slot micro-milling (FSMM), the presented manufacturing method (NLMM) could improve the surface quality, namely the top burr formation and the bottom and sidewall surface roughness. Furthermore, the NLMM displayed a lower tool wear rate compared to FSMM. Finally, a desired S-shaped groove with an aspect ratio of 2.5, a width of 0.2 mm, and the cycle number of 30 was successfully fabricated. The study offers a promising aspect for improving the HAR micro-groove fabrication quality.     

准分子激光脉冲直写刻蚀速率与能量密度的关系

为了探索低成本、大深宽比加工方法,建立了实用的准分子激光微加工系统.以玻璃为实验靶材,用精密微动平台准确调节靶材位置,利用波长248nm的KrF准分子激光器,研究了准分子激光直写刻蚀过程中平均刻蚀速率与激光脉冲能量密度之间的关系.加工出的沟槽剖面形状均呈现锥型,单脉冲烧蚀速率随脉冲数的增加而减小,激光脉冲对材料的刻蚀具有能量阈值,加工槽的深度具有上限值.采用平行激光束或对加工过程进行动态控制还可实现矩形深槽或圆柱深孔的加工.     

采用硅V型槽的一维光纤阵列的研制

阐述了一维光纤阵列的研制方法,分析了V型槽法中硅V型槽腐蚀机理,计算了V型槽的开口及间距与光纤半径及纤芯截面圆心距的关系,给出了最小槽深与光纤半径及V型槽开口的关系式。用各向异性腐蚀技术制作了硅V型槽,比较了紫外及红外粘接剂的性能,进行了光纤的排列、粘接及抛光,制作出一维光纤阵列。用原子力显微镜测量光纤阵列表面粗糙度为纳米量级,用ZYGO数字干涉仪检测光纤的端头位置误差为3~5 μm。该项工作为二维光纤阵列的高精度制备奠定了基础。     

准分子激光刻蚀技术在微机械中的应用研究

准分子激光刻蚀技术在微机械领域有着十分广泛的应用前景,用该技术制作的聚合物微结构深宽比大、精度高,并且工艺简单。我们分析了准分子激光刻蚀原理,探索了这种技术的工艺方法和技术条件,特别对掩膜的结构和制作工艺进行了较为深入的研究。本文采用简易的实验装置,用自行研制的三种结构掩膜进行了准分子激光刻蚀实验,得到了50μm 深的聚合物材料微机械构件。     

Fabrication of porous copper surfaces by laser micromilling and their wetting properties

Porous copper surfaces show their great merits in the applications of chemical reaction, sound absorption and heat transfer. In this study, a laser micromilling method is proposed to fabricate porous surfaces with homogeneous micro-holes and cavities of the size about 1–15 μm on pure copper plates in a one-step process. The laser micromilling was performed by a pulsed fiber laser via the multiple–pass reciprocating scanning strategy. Based on the measurement of scanning electron microscope (SEM) and 3D laser scanning confocal microscope, the formation of surface structures was investigated together with the laser ablation mechanisms. The effects of laser processing parameters, i.e., laser fluence, scanning speed, number of scanning cycles and scanning interval, on the formation and surface morphology of porous surfaces were systematically assessed. Furthermore, the wettability of the porous copper surfaces was also evaluated by measuring the static contact angle of water. The results showed that the laser fluence played the most significant role on the formation of porous copper surfaces. The average depth and surface roughness of porous copper surfaces increased with increasing the laser fluence and number of scanning cycles while decreased with the increase in scanning interval. The scanning speed played little influence on the formation of porous copper surfaces. These results can be closely related to the variation of energy density and re-melting process during the laser micromilling process. Moreover, all the copper porous surfaces were found to be hydrophobic. The contact angle of porous copper surfaces was significantly dependent on laser fluence, but weakly affected by the scanning speed and number of scanning cycles.     

A high-energy YAG: Nd<Superscript>3+</Superscript> laser with a phase conjugation in an optical fiber

An optical scheme and design of a YAG:Nd³⁺ frequency laser with a two-pass amplifier and a mirror with the phase conjugation by the stimulated Brillouin scattering in an optical fiber is described. The maximal radiation energy is 1000 mJ at a 1.064-μm fundamental wavelength and 500, 200, and 20 mJ at the second, fourth, and fifth harmonics, respectively, when the divergence is ∼5 × 10⁻⁴ rad and the pulse duration is 4.5 ns.     

用于显著改善摩擦副润滑状态的激光珩磨技术

对摩擦副工作表面进行激光珩磨,形成与其表面润滑减摩性能优化匹配的、连续均匀的,并具有一定密度、深度、角度、形状的油路和凹腔。该技术特别适用于对气缸孔表面进行激光微观造型,不仅可以显著提高气缸孔耐磨性能,延长其寿命,而且还大幅度降低内燃机的颗粒排放量、机油耗、燃油耗、催化器污染和活塞环组成本。     

Planar optical waveguide temperature sensor based on etched bragg gratings considering nonlinear thermo-optic effect

This paper demonstrates the development of optical temperature sensor based on the etched silica-based planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating optical temperature sensor. The typical bandwidth and reflectivity of the surface etched grating has been ∼0.2 nm and ∼9 %, respectively, at a wavelength of ∼1552 nm. The temperature-induced wavelength change is found to be slightly non-linear over ∼200 °C temperature range. Typically, the temperature-induced fractional Bragg wavelength shift measured in this experiment is 0.0132 nm/°C with linear curve fit. Theoretical models with nonlinear temperature effect for the grating response based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.     

利用光压差分技术筛选细胞的影响参数

本文采用有限体积法建立了交叉型细胞分离模型,提出了一种基于光压差分的细胞筛选仿真方法,分析微流体中细胞筛选的影响因素。基于层流、流体流动粒子追踪、波动光学理论,利用有限元分析法建立了一种交叉型光学颗粒分离模型,研究了利用光压差分技术分离细胞的各种影响因素,其中包括微粒直径,激光功率、温度、光纤直径,分析了微粒在流体中因光辐射压力作用下的偏移距离。实验结果表明:在微流体中,激光功率、细胞直径、温度(20℃)和偏移距离大体上成正比关系,光纤直径和细胞直径在大小相当的情况下光辐射压力能够达到最大值,当激光通过光纤作用于直径分别为3,8和20μm的微粒时,光纤直径为7μm或8μm时光辐射压力最大,所以选用直径为8μm的单模光纤作为一个重要的实验光学器件。所得结论为深入研究细胞筛选影响因素的数值仿真精度提供了参考与借鉴。     

Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm.     

激光制备微热管复合沟槽吸液芯及毛细压力验证

吸液芯结构是微热管的重要组成部分,其对微热管传热性能起到关键作用。目前,随着微热管的微型化,多种新型吸液芯结构相继提出,有效的拓宽微热管的应用领域。激光刻蚀法已成为制备微热管微型沟槽的高效可行法。借助激光刻蚀技术优势制备出微热管复合沟槽吸液芯,分析复合沟槽结构具有良好的表面质量;然后建立复合沟槽吸液芯毛细压力轴向分布数学模型,得出微热管内毛细压力沿轴向分布情况,证明复合沟槽提供较大的毛细压力,从而具有优异的传热性能。     

在金属基底上制作高深宽比金属微光栅的方法

根据光学领域对高深宽比金属微器件的需求,利用UV-LIGA工艺在金属基底上制作了具有高深宽比的金属微光栅。采用分层曝光、一次显影的方法制作了微电铸用SU-8胶厚胶胶模,解决了高深宽比厚胶胶模制作困难的问题。由于电铸时间长易导致铸层缺陷,故采取分次电铸等措施得到了电铸光栅结构;同时通过线宽补偿的方法解决了溶胀引起的线宽变小问题。在去胶工序中,采用"超声-浸泡-超声"循环往复的方法。最终,制作了周期为130μm、凸台长宽高为900μm×65μm×243μm的金属微光栅,其深宽比达到5,尺寸相对误差小于1%,表面粗糙度小于6.17nm。本文提出的工艺方法克服了现有方法制作金属微光栅时高度有限、基底易碎等局限性,为在金属基底上制作高深宽比金属微光栅提供了一种可行的工艺参考方案。     

由正交傅里叶-梅林矩定位的双光纤耦合微内尺度测量

为了解决微内尺度的精密测量问题,提出了一种基于正交傅里叶-梅林矩(OFMM’s)定位的双光纤耦合瞄准触发式微内尺度测量方法。该方法通过耦合器实现光能量在不同光纤间的反向传输,把双光纤传感器测头的横向位移量转化为光束的偏转量,通过显微成像系统把此偏转量转化为CCD图像捕捉系统更大的横向位移量。为提高测量精度,运用OFMM’s的幅值旋转不变性和独特的图像形状细节特征的描述能力对CCD图像捕捉系统的图像信号进行亚像素定位;根据OFMM’s的实际位置进行补偿以提高输出图像边缘的定位精度,从而提高测量精度。对OFMM’s的定位精度及传感器性能进行了实验验证,并依据JJF(黑)8-2008,利用自行研制的微小孔径测量机实现了对直径为200μm、深2 000μm深盲孔的直径测量,其测量重复性不确定度优于0.25μm。     

High-precision detection of focal position on a curved surface for laser processing

A new technique for detecting the focal position of a curved surface provides several advantages both in research and industrial applications. The quality of patterns lasered on a roll surface is determined by the precision of the focus detection, and surfaces of the massive rolls used in laser fabrication can be difficult to adjust properly using conventional technologies. Here, a unique method for detecting the focal position of a curved surface based on the reflected profile of a laser beam is presented. The versatility of the proposed technique results from being able to adjust the laser beam based on changes in the shape and diameter of the beam spot when the specimen surface deviates from the focal plane. A theoretical model based on three-axis movement is proposed, and experimental setups are developed based on the model. Analysis of the obtained results enables high precision positioning of the specimen and identification of the focal point. Furthermore, the presented technique can be used to locate the focal point on any curved surface. Therefore, the theoretical model, analysis results, and focal detection method can be combined in an algorithm for a novel auto-focusing system that can be applied to laser processing of curved surfaces, such as fabricating microgrooves, or engraving roll surfaces in printed electronics.     

Measurements of the temperature dependence of optical characteristics of materials in vacuum

A diagnostic module for the experimental analysis of the temperature dependence of spectral reflection coefficients for materials with the use of probing coherent radiation of a laser system with a parametric frequency oscillator (λ ∼ 213–1188 nm) and laser heating of the studied solid-state sample (up to temperatures T ∼ 2500 K) in vacuum is described. The results of the experimental determination of the spectral reflection coefficients are entered into the created partition of the experimental and design-theoretical data base of thermophysical, optical, and transporting properties of structural materials of photon energo-motion and processing high-power-density plants.