CMP过程芯片表面氧化膜生成速度影响因素的分析

根据理论和试验分析,将机械化学抛光(CMP)过程分成两个阶段:化学作用主导阶段和机械作用主导阶段,并从机械作用角度导出CMP过程两个阶段芯片表面材料去除率的数学模型,模型全面地考虑了抛光盘特性参数(弹性模量、硬度、表面粗糙度峰的尺寸分布)、CMP工作参数(压力和抛光速度)、抛光液中磨粒的机械作用和氧化剂种类、氧化剂浓度等化学作用的影响。然后根据这两个阶段的平衡点导出定量描述芯片表面氧化膜生成速度的数学模型。详细分析机械作用因素(磨粒的浓度、磨粒的粒度分布特性)、化学作用因素(抛光液中氧化剂种类、浓度)以及磨粒/芯片/抛光盘的材料特性参数对芯片表面氧化膜生成速度的影响规律。该CMP过程芯片表面氧化膜生成速度定量模型的导出,对进一步深入研究CMP材料去除机理和更加准确地控制CMP过程,具有一定的指导作用。     

CMP过程中抛光盘作用外力的影响因素分析

根据芯片/磨粒/抛光盘三体接触当量梁的弯曲假设,建立了更加准确合理的抛光盘作用在磨粒上的外力的理论模型,并通过实例对前人的模型和新模型进行对比.最后借用已有分子动力学模拟结果对理论模型进行验证.结果表明作用在单个磨粒上的外力与磨粒的直径、磨粒的浓度、抛光盘的弹性模量有关,理论计算值与分子动力学模拟结果基本一致.     

一种基于非晶层粘性流动的机械化学抛光模型

通过分析单个微纳米磨粒滑动接触的分子动力学模拟的研究结果，提出了在典型的机械化学抛光（CMP）过程中芯片表面材料的去除应为表面非晶层物质粘性流动所致的新观点。基于这种机理，应用微观接触力学和磨粒粒度分布理论建立了一种新的表征CMP过程材料去除速率的数学模型。模型中引入了一个表征单个磨粒去除芯片表面非晶层能力的比例系数k，k综合反映了磨粒的机械作用、抛光液对芯片表面的化学作用和芯片的材料特性。通过实验验证发现该模型的理论预测值与实验测定值十分吻合。     

基于AFM的化学机械抛光磨粒模拟研究

当前的化学机械抛光(CMP)磨损模型中大多数都缺少微观试验数据的支持。为进步揭示CMP中纳米磨粒对材料表面的磨损机制,提出了采用原子力显微镜(AFM)来模拟CMP中的单个磨粒的试验方案,并验证该模拟试验方案的可行性。结果表明:采用AFM探针来模拟CMP过程中单个磨粒对芯片表面的磨损与相互作用的试验方案是完全可行的;可以通过AFM探针对芯片表面的相互作用与磨损,模拟得出单个磨粒对芯片表面的作用与磨损状况,并可以在此微观试验数据的基础上建立起新的CMP磨损模型。     

电镀金刚石线表面磨粒密度对锯切性能影响分析

电镀金刚石线广泛应用于光伏太阳能和半导体行业的硅晶体切片加工,其表面的磨粒密度对锯切性能有很大影响。为了评价表面不同磨粒密度的电镀金刚石线的锯切性能,以光伏多晶硅为试件开展了锯切试验,分析了表面形貌、表面粗糙度和锯切效率的影响规律。研究结果表明:采用表面磨粒密度为210～230个/mm与290～330个/mm的两种金刚石线锯切的表面塑性沟槽所占比例较大,没有明显的较大尺寸脆性微凹坑。表面磨粒密度为210～230个/mm的金刚石线切割形成的硅片表面粗糙度最低,金刚石线表面过低或过大的磨粒密度会使硅片表面粗糙度变大。金刚石线的切割能力和锯切效率随着表面磨粒密度的增大而有所提高。综合考虑切片表面形貌和粗糙度等方面的质量要求与金刚石线的锯切能力和制造成本,建议金刚石线表面磨粒密度在210～330个/mm较为适宜。     

固结磨料研磨K9玻璃表面粗糙度模型

表面粗糙度模型是研磨过程设计和工艺参数选择的重要依据,K9玻璃是应用最广泛的光学材料之一。建立研磨K9玻璃表面粗糙度模型有利于提高加工效率、节约生产成本。简化固结磨料研磨过程,基于研磨垫表面微结构,计算研磨过程中参与研磨的有效磨粒数和单颗磨粒切入工件深度,利用研磨过程中受力平衡,建立固结磨料研磨K9玻璃表面粗糙度模型。采用不同磨粒粒径和不同磨料浓度的固结磨料研磨垫以及不同压力研磨K9玻璃验证表面粗糙度模型。结果表明：固结磨料研磨K9玻璃的表面粗糙度与磨粒粒径、研磨压力1/3次方成正比,与研磨垫浓度2/9次方成反比。表面粗糙度理论值与试验值随研磨压力、磨粒粒径和研磨垫浓度的变化趋势吻合。利用该模型能够成功预测固结磨料研磨K9玻璃表面粗糙度,指导研磨过程设计及加工过程中研磨垫和工艺参数的选择,可靠性高。     

抛物面研磨的材料去除率及表面粗糙度研究

固着磨料抛物面研磨是一种新型的抛物面加工方法,文中从单个磨粒的角度出发,讨论了研磨工艺参数对材料去除率和表面粗糙度的影响,建立了理论预测模型,然后利用计算机辅助软件对不同硬度工件材料的材料去除率和表面粗糙度进行了数值模拟仿真,最后用实验验证了模型的正确性,并得出结论:理论预测模型仅能预测材料去除率和表面粗糙度的变化趋势,并不能代替实验得出具体的实验数值,即固着磨料抛物面研磨的材料去除率与主轴转速、研磨压力的5/4次方成正比,与磨粒浓度的1/4次方成反比;表面粗糙度随磨粒尺寸和研磨压力的增加而增加,随磨粒浓度的增加而减小。     

硬脆性材料用柔性磨具研磨的加工表面粗糙度建模

通过分析磨粒与工件表面的作用过程,建立了硬脆性材料柔性磨具加工表面粗糙度的理论预测模型.以橡胶结合剂金刚石研磨盘为柔性磨具、蓝宝石衬底为工件,在不同弹性模量、磨粒浓度、磨粒粒度和研磨压力下开展研磨试验,将不同研磨条件下的表面粗糙度试验值与理论预测值进行比较,发现试验结果与理论模型预测结果的趋势一致,且预测误差为7.71...     

磨粒流抛光弯管的数值模拟与试验优化

针对当前复杂零件难以精密加工的问题,运用磨粒流技术进行光整加工,考虑入口压力和颗粒浓度双因素对磨粒流加工的影响,以弯管为研究对象,依据流体力学理论,对不同入口压力和颗粒浓度下的速度、湍流动能和总压进行了仿真分析,经过对比分析得出结论:当入口压力为6MPa,颗粒浓度为10％,磨粒流的抛光效果最好,并根据此参数进行了磨粒流抛光试验.试验结果表明:弯管内表面的粗糙度降低,但是出口处的表面粗糙度要高于入口处的表面粗糙度,因此选择以出口为磨粒流入口,重复进行试验,最终得到均匀一致的表面.     

考虑氧化作用的CMP接触去除模型分析

针对目前大多数化学机械抛光(CMP)材料去除模型没有考虑到氧化薄膜作用的现象,提出一种考虑氧化后的芯片与磨粒之间的接触模型,该模型的建立基于接触力学理论和接触微凸体由弹性变形向弹塑性变形及最终向完全塑性变形的转化过程,并将该模型与传统的塑性去除模型进行了对比分析。结果表明:低压CMP精抛过程中,磨粒在外载荷的作用与氧化后的芯片表面发生接触去除,且随着工作载荷的增大,芯片表面的压痕深度、卸载回弹量、最大应力和材料去除量也随之增大;当载荷为1200-4250n N时,芯片弹塑性接触去除率小于传统理想塑性接触去除率;当载荷约为1650n N时,相对误差达到最大值28%。因此,氧化后的芯片与磨粒并非简单的塑性去除,考虑氧化后的芯片去除将更有利于后续精确地统计实际CMP去除率,为进一步优化CMP工艺提供一定的理论基础。     

三绕组变压器的双绕组等效建模及在Matpower中的应用

针对实际电网存在着大量的三绕组变压器,但国际上一些著名商业软件,如BPA仿真软件、Matpower这一权威潮流计算开源软件,均只提供双绕组变压器模型,限制了其在具有三绕组变压器的电力系统中的应用的问题,潮流计算是自主开发的电力系统各种应用软件的核心模块,因此依托国际权威开源程序进行二次开发,是一种较好的选择。对Matpower要求的数据格式进行了归纳,对变压器的一般的等值电路及带理想变压器的等值电路和带标幺值的等值电路进行了分析研究,提出了三绕组变压器转换为双绕组等效模型的建模方法,使得原先只适应双绕组变压器的潮流计算软件可以适用于三绕组变压器电网的潮流计算;最后以Matpower软件为例进行了案例计算,并用PSASP仿真软件进行对比验证。研究结果证明,所提出的建模方法是有效的。     

On the Relation of Load to Average Gap in the Contact Between Surfaces with Longitudinal Roughness

A computer simulation model for the contact between longitudinally-oriented rough surfaces has been formulated. This model closely duplicates the actual surf ace contact deformation behavior by taking into account the elastic interactions between the asperities. There were no assumptions made about the shapes, or any deformation behavior of the asperities, except for their obeying the laws of elasticity. The plastic deformations on the high asperity peaks were taken into account by setting a ceiling on their contact pressures at the material hardness value. The simulations used real surface profiles which were digitized from unworn circumferentially ground steel surfaces. Each pair of these profiles was mathematically combined to form an equivalent rough profile pressing against an infinitely rigid flat and having the appropriately adjusted elastic modulus. A total of 28 different pairs of profiles were used in the simulations. Each contacting pair was subjected to 30 different load levels and the local contact pressures and deformations were calculated. The contact simulations yielded some important mathematical relationships between parameters, such as the real area of contact, average gap, and average asperity load through statistical curve fitting. Two analytical functions were generated to relate the average load to average gap and the real area of contact to load.     

电站锅炉模糊风险评价方法研究与应用

针对电站锅炉风险等级评价问题,将模糊综合评价技术应用到电站锅炉风险等级评价中。开展了电站锅炉失效影响因素及模糊评价因素的重要程度分析,建立了一套科学合理适于在线评价的电站锅炉风险评价体系,提出了模糊综合评价技术与改进的模糊层次分析法相结合的模糊风险评价方法,利用改进的模糊层次分析法计算了指标体系中各层指标权重。对某一台电站锅炉的实际运行工况影响子因素进行了模糊风险评价,采用模糊合成算子进行模糊综合运算得到电了站锅炉运行工况影响子因素的评价向量。研究结果表明:电站锅炉的运行工况影响子因素的风险评价等级为第6级,失效可能性等级为小,该电站锅炉运行工况良好。     

交通荷载作用下桥梁结构参数识别方法

应用动力节点加载法,将作用在桥梁上的交通荷载转化为等效节点荷载,再用两步构造法识别结构物理参数.第1步,用Newmark-β方法变换结构运动方程,并用结构的加速度响应求得变换空间内的位移、速度和加速度响应;第2步,基于最小二乘原理,构造出变换空间内求解结构参数的递推式,进行结构物理参数识别.数值模拟结果表明,在交通荷载作用下,该方法能够快速、准确地进行桥梁结构参数识别.     

RLS and LMS blind adaptive multi-user detection method and comparison in acoustic communication

RLS and LMS blind adaptive multi-user detection algorithm and multi-user detector was proposed to solve the problem of multi-user signal detection problem encountered in underwater acoustic communication networks.In simulation analysis,RLS and the LMS blind adaptive multi-user detector were designed and tested for synchronous and asynchronous multi-user communication process.The results of SIR comparison and MMSE comparison show that,both of the two methods can realize blind adaptive detection when any user change in multi-user communication,during this process,the training communication sequences are not needed.The RLS algorithm has about 5 dB higher in SIR compared with LMS algorithm,and the convergence velocity of RLS algorithm is also higher than LMS algorithm when the communication users change.RLS algorithm has better ability in multi-user detection than that of LMS algorithm,and it has great attraction and guiding significance for solving the problem of multiple access interference(MAI) in multi-user communication.     

Robust Impedance Control of Robots Using an Adaptive Interaction Force Observer

For robot interaction control,the interaction force between the robot and the manipulated object or environment should be monitored.Impedance control is a type ...     

Research on key techniques of expendable conductivity temperature depth measuring system

This paper analysis the developing of expendable conductivity temperature depth measuring system(XCTD)and introduce its principle of measuring about temperature,salinity and depth of ocean.Some key techniques are put forward.According to the real needs of XCTD,conductivity sensor with high sensitivity is designed by principle of electromagnetic induce,the ocean conductivity from induced electromotive force has been calculated.Adding temperature correction circuit would help to reduce error of conductivity measurement because of sharply changing temperature.Advanced temperature measuring circuit of high precision and the constant current source is used to weaken effect of self-heating of resistance and fluctuation of the source.On respect of remote data transmission,LVDS is a good choice for the purpose of guarantee the quality of data transmitted and the transmission distance is reaching to thousand meters in the seawater.Modular programming method is also brought into this research aimed at improve the stability,reliability and maintainability of the whole measuring system.In February,2015,the trials in South China Sea demonstrate that the developed XCTD realize effective measurement at a speed of 6 knots and detection depth at 800 m.The consistency coefficient of the acquired data is greater than 0.99 and the success rate of probe launching is above 90%.     

CHARACTERISTCS OF FLUID FILM IN OPTIMIZED SPIRAL GROOVE MECHANICAL SEAL

In order to investigate the sealing performance variation resulted from the thermal deformation of the end faces, the equations to calculate the fluid film pressure distribution, the bearing force and the leakage rate are derived, for the fluid film both in parallel gap and in wedgy gap. The geometrical parameters of the sealing members are optimized by means of heat transfer analysis and complex method. The analysis results indicate that the shallow spiral grooves can generate hydrodynamic pressure while the rotating ring rotates and the bearing force of the fluid film in spiral groove end faces is much larger than that in the flat end faces. The deformation increases the bearing force of the fluid film in flat end faces, but it decreases the hydrodynamic pressure of the fluid film in spiral groove end faces. The gap dimensions which determine the characteristics of the fluid film is obtained by coupling analysis of the frictional heat and the thermal deformation in consideration of the equilibrium condition of the bearing force and the closing force. For different gap dimensions, the relationship between the closing force and the leakage rate is also investigated, based on which the leakage rate can be controlled by adjusting the closing force.     

Quantum Cooperative Robotics and Autonomy

The intersection of Quantum Technologies and Robotics Autonomy is explored in the present paper.The two areas are brought together in establishing an interdisci...     

OPTIMIZATION METHOD ON IMPELLER MERIDIONAL CONTOUR AND 3D BLADE

An optimization method for 3D blade and meridional contour of centrifugal or mixed-flow impeller based on the 3D viscous computational fluid dynamics (CFD) analysis is proposed. The blade is indirectly parameterized using the angular momentum and calculated by inverse design method. The design variables are separated into two categories: the meridional contour design variables and the blade design variables. Firstly, only the blade is optimized using genetic algorithm with the meridional contour remained constant. The artificial neural network (ANN) techniques with the training sample data schemed according to design of experiment theory are adopted to construct the response relation between the blade design variables and the impeller performance. Then, based on the ANN approximated relation between the meridional contour design variables and impeller performance, the meridional contour is optimized. Fewer design variables and less calculation effort is required in this method that may be widely used in the optimization of three-dimension impellers. An optimized impeller in a mixed-flow pump, where the head and the efficiency are enhanced by 12.9% and 4.5% respectively, confirms the validity of this newly proposed method.