双端固定音叉式硅微机械谐振器的研究与应用

提出了一种使用双端固定音叉的新型结构的谐振式硅微机械加速度计。它用硅梁侧壁形成的静电电容进行激振，并通过在音叉臂上制作的压敏电阻检测振动。该加速度计输出的是频率信号，具有精度高、抗干扰能力强的优点。探讨了传感器的工作原理，并用有限元方法进行了仿真模拟，结果显示传感器的灵敏度约为2Hz/g。     

A New Method for Measuring Normal Forces with Accurate Gap Control Using a Microfabricated Quartz Resonator for Lubrication at Nanometer Gaps

A new method using a microfabricated quartz double-ended tuning fork (DETF) resonator is presented for simultaneously measuring normal and lateral forces with accurate gap control. The quartz resonator provides high force sensitivity due to its smaller device size. An optical fiber probe for lateral force detection was combined with the resonator by adding a support frame, thereby for increasing lateral rigidity. The normal and lateral forces exerted by a lubricant in nanometer-sliding gaps were simultaneously measured using the quartz DETF resonator with the optical fiber probe. This method is useful for clarifying the tribological properties in small sliding gaps for micro/nano-mechanical devices such as the head–disk interface of hard disk drives.     

Frequency adaptive driver for ultrasonic vibrators with motional current feedback

A driving circuit of frequency adapting for an ultrasonic vibrator with motional current feedback has been presented in this paper. Via a voltage-controlled oscillator (VCO) and a digital/analog converter (DAC), the driving signal would be magnified by a linear power amplifier to actuate the vibrator. Since the vibrating velocities or displacements at the surface end of a vibrator could be predicted through the measurement of motional current, the motional current passing through the vibrator was detected by a current transformer (CT) type sensor as feedback to monitor the optimal level of output power. The calculation for phase difference and the tuning strategy for driving frequency were implemented by a microcontroller integrated with an A/D converter and a voltage comparator as well as the signal attenuation and level tuning circuit. The experiment demonstrates that the temperature effect corresponding to frequencies is at 9.75 Hz/°C shifting and the external loading reflected to frequencies is about 8.3 Hz/gm offset. The proposed circuit has the great performance in rejecting the disturbances from external loading and thermal effect.     

Precision force transducers using mechanical resonators

This paper describes the principles and characteristics of some symmetrical ‘double-ended tuning fork’ resonators (machined from elinvar alloy or etched from quartz crystal), and their applications as force/pressure transducers. The temperature coefficient and drift can be made quite small, and the output signal - frequency- can be measured easily and precisely. A microprocessor linearises transducer characteristics - linearity was within 0.001% of span for elinvar transducers.     

Atomic resolution ultrafast scanning tunneling microscope with scan rate breaking the resonant frequency of a quartz tuning fork resonator

We present an ultra-fast scanning tunneling microscope with atomic resolution at 26 kHz scan rate which surpasses the resonant frequency of the quartz tuning fork resonator used as the fast scan actuator. The main improvements employed in achieving this new record are (1) fully low voltage design (2) independent scan control and data acquisition, where the tuning fork (carrying a tip) is blindly driven to scan by a function generator with the scan voltage and tunneling current (I(T)) being measured as image data (this is unlike the traditional point-by-point move and measure method where data acquisition and scan control are switched many times).     

梳齿结构与振动梁复合的硅微谐振式加速度计非线性振动特性

硅微谐振式加速度计的非线性振动可以导致振动幅度噪声耦合到频率输出进而恶化器件的噪声性能,因此有必要对谐振式加速度计的非线性振动特性进行评估及优化,拓展线性振动范围。本文针对所设计的基于梳齿结构与振动梁复合的硅微谐振式加速度计进行了仿真与实验分析。首先对加速度计结构使用COMSOL仿真软件进行了非线性仿真分析,该方法通过在谐振梁的振动方向上施加一个静力,得到力与位移之间的关系,计算出非线性三次项系数k3,eff和线性系数keff的比值约为2.13×10^10 m^-2。然后,对双端固支音叉(DETF)进行扫频测试,得出DETF的非线性振动频响曲线。根据Duffing方程对实验数据进行拟合,得出器件两个DETF的非线性三次项系数k3,eff和线性系数keff的比值分别为2.24×10^10 m^-2和2.19×10^10 m^-2。仿真值与测试值的误差分别为5.2%和2.8%。实验结果与仿真值吻合得较好,印证了仿真方法的有效性和测试数据的可靠性。最后,对所设计的谐振加速度计进行非线性分析,当振幅小于35.4 nm时,DETF工作在线性区,可为后续谐振式加计的控制电路设计提供参考。     

Topography and near-field image measurement of soft biological samples in liquid by using a tuning fork based bent optical-fiber sensor

The fabrication of a tuning fork based bent optical-fiber sensor and its application for topography and near-field image measurement of soft biological samples in physiological solution are reported. By adopting the bent optical fiber and tuning fork feedback scheme, the possibility of signal interference with stray light is minimized, which is especially important for near-field applications. From the measured tuning fork amplitude and its calibration with the preamplifier output voltage, it was determined that the interaction force between the fiber tip and a soft sample in liquid needs to be controlled within approximately 10 nN level and that the image quality depends sensitively to the interaction force. The results of topography measurements of fixed COS-7 and MCF-7 cells in phosphate buffered saline and of the near-field imaging of red blood cell also in phosphate buffered saline with a resolution of about 100 nm are presented.     

A Signal Preamplifier of the Piezoelectric Vibration Transducer of the Cantilever of an Atomic-Force Microscope

An electronic circuit for amplitude and phase measurements of the forced vibrations of the tip of the scanning atomic-force microscope by the current flowing through the piezoelectric cell exciting these vibrations is described. The circuit allows the electronic correction of the Q factor (width of the resonance peak) of the driven oscillatory system tip-piezoelectric cell (for example, a crystal tuning fork), and, as a result, reduction by a factor of 2–50 of the settling time of the parameters of tip vibrations reflecting its interaction with the studied surface. The output signal of the described circuit corresponds to the current through the piezoelectric cell. Due to the proposed correction of the capacitive component of the piezoelectric cell's current, the phase range of the output signal observed upon attainment of the tuning-fork resonance frequency has increased from several degrees to a 180° theoretically expected value.     

双质量块调谐输出式硅MEMS陀螺仪

硅MEMS陀螺仪成本低、体积小、功耗低,是微小型无人系统及制导武器的核心惯性器件,本文提出一种双质量块调谐输出式硅MEMS陀螺仪,采用两块反相、同频、等幅振动质量块作为敏感单元,通过测量谐振器谐振频率变化来计算转速的大小,通过动力学分析,推导了哥氏力与输入转速的传递函数,用瑞利－里茨法求得在轴向力作用下梁的固有频率方程,利用马蒂厄方程分析了双端音叉谐振器的运动数学表达式及陀螺仪标度因数方程。最后利用ANSYS有限元软件对谐振器进行了稳定性及有预载荷的模态分析,验证了理论推导的正确性。该陀螺仪通过端部支撑结构将两质量块的振动能量相互抵消,减少了振动噪声及能量损耗,利用杠杆反相差分效应,消除了外界加速度引起的误差。     

Simultaneously Measuring Lateral and Vertical Forces with Accurate Gap Control for Clarifying Lubrication Phenomena at Nanometer Gap

A novel method for simultaneous measurement of vertical and lateral forces with high sensitivity and accurate gap control is presented. It combines a double-ended tuning fork resonator for vertical force measurement with an optical fiber probe for lateral force measurement. High force sensitivity of several tens of nano Newons with accurate gap control of less than 1 nm was successfully attained. Simultaneous measurement using this novel method revealed that viscoelasticity increased with decrease of the sliding gap. Moreover, the method first revealed that the lubricant pressure generated by the wedge effect can increase due to the confinement at small gaps, even if the lubricant pressure is so low that the viscosity rise due to the pressure is much small. This method is expected to be useful for clarifying the lubrication phenomena at nanometer sliding gaps, which are not yet fully understood due to the difficulty of measurement.     

A near-field scanning microwave microscope for characterization of inhomogeneous photovoltaics

We present a near-field scanning microwave microscope (NSMM) that has been configured for imaging photovoltaic samples. Our system incorporates a Pt-Ir tip inserted into an open-ended coaxial cable to form a weakly coupled resonator, allowing the microwave reflection S(11) signal to be measured across a sample over a frequency range of 1 GHz - 5 GHz. A phase-tuning circuit increased impedance-measurement sensitivity by allowing for tuning of the S(11) minimum down to -78 dBm. A bias-T and preamplifier enabled simultaneous, non-contact measurement of the DC tip-sample current, and a tuning fork feedback system provided simultaneous topographic data. Light-free tuning fork feedback provided characterization of photovoltaic samples both in the dark and under illumination at 405 nm. NSMM measurements were obtained on an inhomogeneous, third-generation Cu(In,Ga)Se(2) (CIGS) sample. The S(11) and DC current features were found to spatially broaden around grain boundaries with the sample under illumination. The broadening is attributed to optically generated charge that becomes trapped and changes the local depletion of the grain boundaries, thereby modifying the local capacitance. Imaging provided by the NSMM offers a new RF methodology to resolve and characterize nanoscale electrical features in photovoltaic materials and devices.     

传感器支架振动对扭振测量的影响及消除方法

通过实验研究确定了传感器支架振动对扭振测量有较大影响,且由整机振动引起。从磁电传感器电压特性出发,以传感器支架振动影响下的传感器输出电压和瞬时转速表达式为基础,阐明了作用机理;同时研究了支架振动引起伪扭振信号的规律及频谱特征。研究表明,支架振动引起的伪扭振信号随着支架振动幅值的增加而增加;伪扭振信号的主要成分是支架振动的阶数及其二阶;所取基准电压越接近0,伪扭振信号幅值越小。提出了一种基于最佳基准电压的去除支架振动影响的新方法,并提出了最佳基准电压的计算方法。仿真研究表明,该方法是有效的,为改善扭振测量精度提供了理论依据,具有工程应用价值。     

Resonance frequency and quality factor tuning in electrostatic actuation of nanoelectromechanical systems

In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly—clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nano resonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.     

Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy

We have studied the dynamics of quartz tuning fork resonators used in atomic force microscopy taking into account the mechanical energy dissipation through the attachment of the tuning fork base. We find that the tuning fork resonator quality factor changes even in the case of a purely elastic sensor-sample interaction. This is due to the effective mechanical imbalance of the tuning fork prongs induced by the sensor-sample force gradient, which in turn has an impact on dissipation through the attachment of the resonator base. This effect may yield a measured dissipation signal that can be different from the one exclusively related to the dissipation between the sensor and the sample. We also find that there is a second-order term in addition to the linear relationship between the sensor-sample force gradient and the resonance frequency shift of the tuning fork that is significant even for force gradients usually present in atomic force microscopy, which are in the range of tens of N/m.     

振动传感器信号调理电路设计及分析（英文）

基于压电式传感器能把振动或冲击的加速度转换成与之成正比的电荷这一原理,提出了该类型传感器的等效电路。设计了基于采集测量系统的压电式传感器电荷/电压转换电路,分析了电路中关键元器件——反馈电容的温度特性对于转换电路输出的影响,对不同类型滤波器进行了特性分析,并根据实际传感器带宽配置了相应滤波电路。通过试验表明,该信号调理电路能有效滤除振动信号中的噪声信号,并能获取精确的振动信号。     

基于DSP的可编程交流电源研究

交直流电压源是电源实验室与科研机构必不可少的工具,针对幅值和相位连续可调交流电压源价格昂贵而直流电压源价格便宜且广泛应用于实验室中。本文研究了一种以直流电压源为输入,幅值频率可调的可编程电源。该电路由一个前级Boost电路和一个后级全桥逆变电路组成。同时,逆变电路采用倍频调制,电压电流双环控制,动态性能优越。通过制作一台以DSP为核心处理器的样机,验证了控制策略的优越性。     

自适应调频声衬及其控制系统设计

为克服现有声衬结构固定、敏感频率无法调节的弊端,提出了一种逆压电效应的调频式声衬结构。该声衬由颈部、共振腔以及压电膜片组成亥姆霍兹共振器。采用有限元法对声衬结构的固有频率、声场分布进行了计算,研究了压电膜片变形与共振频率偏移的关系。在阻抗管内对压电声衬致动前后系统的传递损失进行了对比,系统传递损失峰值频率与驱动电压呈线性关系,灵敏度为0.1Hz/V。在建立控制电压-驱动电压-噪声频率的对应关系的基础上,提出了一种基于光敏电阻的直流升压电路,采用LabVIEW软件编制了压电声衬的自适应控制程序,当噪声频率从746变化至788Hz时,驱动电压由110V自动升高至420V,声衬始终工作于共振状态,实现了宽频噪声的自适应控制。     

恒温型热线风速测量系统动态特性分析及试验验证

为测量不同工况下流场的脉动流速,恒温型热线风速测量系统在满足稳定性要求的同时,必须具备宽频带的动态特性。分别对热线探头工作过热比、放大器增益、惠斯通桥臂电阻、流场稳定流速、补偿电感和偏置电压等参量对热线测量系统动态特性的影响效果进行了仿真分析,结果表明:增大热线探头工作过热比、放大器增益和流场稳定流速及减小桥臂电阻均能提高系统的频响;补偿电感与热线探头连接电缆电感及电路寄生电感匹配时,系统频响最佳;在上述参量配置不当时,系统频响降低,系统振荡加剧甚至不能正常工作,而提高偏置电压能消除振荡并使系统恢复稳定,同时获得平稳的动态频响。因此,提出了基于偏置电压的动态特性调节方法。方波试验结果表明,基于偏置电压的频响调节方法能使系统在不同的脉动流速测量中均能获得较为平坦的频响,且调节过程简便。     

A wavelength modulation system for highly sensitive absorption spectroscopy

We developed a newly designed wavelength modulation (WM) system for highly sensitive absorption spectroscopy. In our system, the WM is realized by yawing an output mirror in a monochromator. In order to control an amplitude Δλ of the WM in a wide range, we employed a forced vibration of a permanent magnet driven by a magnetic field of a solenoid. Our system has an advantage of that the WM amplitude Δλ can be adjusted in extensively wide range from 0.08 nm to 11 nm only by tuning a driving frequency of the applying current to the solenoid, because we utilize a resonance phenomenon of the forced vibration for adjustment of the WM amplitude. By using our system, we measured WM absorption spectra of a Cu(2)O thin film and found clearly spectral structures for weak 2-4P excitonic resonances in the WM absorption spectra.     

谐振式超磁致伸缩音频驱动器设计

超磁致伸缩驱动器具有输出振幅过小导致转换效率不高的问题,针对此问题提出了谐振式超磁致伸缩音频驱动器的理念,利用音叉的机械结构实现了超磁致伸缩驱动器振幅的放大,同时利用音叉的频响曲线去修正超磁致伸缩驱动器的频响曲线,以提升扬声器响度。研究了音叉的选择,及其中超磁致伸缩驱动器的具体设计过程,并在专业消音室对谐振式超磁致伸缩音频驱动器进行了性能测试,测试结果表明驱动器改进后超磁致伸缩扬声器在音响上有显著提升。