Note: high precision angle generator using multiple ultrasonic motors and a self-calibratable encoder

We present an angle generator with high resolution and accuracy, which uses multiple ultrasonic motors and a self-calibratable encoder. A cylindrical air bearing guides a rotational motion, and the ultrasonic motors achieve high resolution over the full circle range with a simple configuration. The self-calibratable encoder can compensate the scale error of a divided circle (signal period: 20") effectively by applying the equal-division-averaged method. The angle generator configures a position feedback control loop using the readout of the encoder. By combining the ac and dc operation mode, the angle generator produced stepwise angular motion with 0.005" resolution. We also evaluated the performance of the angle generator using a precision angle encoder and an autocollimator. The expanded uncertainty (k = 2) in the angle generation was estimated less than 0.03", which included the calibrated scale error and the nonlinearity error.     

一种新型光学编码器

光学编码器是长度和角度测量最常用的传感器,两种传统光学编码器:绝对式和增量式光学编码器的光学图案、位置编码原理和信号处理电路各具特色,随着科学技术的发展,一种新型光学编码器方案:准绝对式编码器,继承了二者的优点,根据其串行位置编码原理,借助计算机辅助设计,获得了全周100个位置的编码方案,设计了相应的准绝对式编码器;通过与两种传统编码器特点的比较,突出了准绝对式光学编码器的显著特点,指明了其未来良好的应用和发展前景.     

A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability

A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38 pm (standard deviation) and 100 pm over 30 s and 1 h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30pm without any additional correction.     

Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting

The absolute optical thickness and surface shape of optical devices are considered as the fundamental characteristics when designing optical equipment. The thickness and surface shape should be measured simultaneously to reduce cost. In this research, the absolute optical thickness and surface shape of a 6–mm-thick fused silica transparent plate of diameter 100 mm was measured simultaneously by a three-surface Fizeau interferometer. A measurement method combining the wavelength tuning Fourier and phase shifting technique was proposed. The absolute optical thickness that corresponds to the group refractive index was determined by wavelength tuning Fourier analysis. At the beginning and end of the wavelength tuning, the fractional phases of the interference fringes were measured by the phase shifting technique and optical thickness deviations with respect to the ordinary refractive index and surface shape were determined. These two kinds of optical thicknesses were synthesized using the Sellmeier equation for the refractive index of fused silica glass, and the least square fitting method was used to determine the final absolute optical thickness distribution. The experimental results indicate that the all the measurement uncertainties for the absolute optical thickness and surface shape were approximately 3 nm and 35 nm, respectively.     

A study on erosion of upper bainitic ADI and PDI

Ductile iron containing ∼3.5 wt.% C and 2.1–4.2 wt.% Si (2.1, 2.8 and 4.2 wt.%) was studied. Three sets of specimens with differing Si contents were made into austempered ductile iron (ADI) and pearlite ductile iron (PDI) through heat treatment. These specimens were then eroded with Al₂O₃ particles and SiO₂ particles of 275–295 μm grit size to understand the relationship between erosion rate and microstructure. The ADI specimens were upper bainitic matrices that were austempered for different periods of time at 420 °C. The heat treatment of PDI was conducted at 870 or 930 °C for 1 h then forced air cooled or oil quenched to room temperature.Two types of wear curves, single peak curves and double peak curves, were found when plotting the erosion rate figures derived from the experimental results. 2.1 wt.% Si and 2.8 wt.% Si ADI tempered for a long period of time, due to their decreased retained austenite content and increased carbide content, had a single peak erosion rate curve. This embrittlement effect caused the impact angle of maximum erosion rate to increase from ∼30 to ∼45°. Decreasing the interspacing of the lamellae cementite promoted the hardness and improved the low-angle erosion wear resistance of PDI. The high hardness and brittleness of the matrix reduces the high-angle erosion resistance and the peak erosion rate occurs at a higher angle.For 2.1Si-ADI and 2.8Si-ADI tempered for a short duration, increasing the volume fraction of martensite in the matrix increases the erosion rate at an impact angle of 30°, but the maximum erosion rate is found at 75°. This results in a curve with a double peak. The double peak curve was also observed for high silicon ADI tempered for a long duration. The high solid solution hardness of 4.2Si-ADI, due to low retained austenite content and the presence of carbide in the matrix, results in poor erosion resistance. When this material is austempered for a long period, the erosion rate curve shifts from a single peak curve (30°) to a double peak curve (30°; 60°).     

用于星载激光通信终端的绝对式光电角度编码器

针对星上激光通信终端二维转台的精确控制,设计了实时测量转台旋转角度的专用型光电角度编码器。根据星载激光通信终端所需测角系统的设计指标,分别对光电角度编码器的码盘、指示光栅及光电信号的提取方法进行了设计和选择。其中,格林二进制绝对式编码结合高质量的电子学细分,实现了编码器24位的绝对角度测量;四象限矩阵编码方式有效地减小了码盘的径向尺寸;分体读数头式指示光栅较整周玻璃盘大幅度压缩了体积和重量。在室温条件下对安装在星载激光通信终端上的光电角度编码器进行了测角精度检测。结果表明:该测角系统的角度测量精度约为0.7″(优于1.0″)。激光通信终端设备的在轨稳定运行及捕获、跟踪和通信功能的正常发挥,进一步验证了所设计的光电角度编码器测角精度高、抗辐射能力强、工作可靠性高,满足星载激光通信终端设备的应用要求。     

Tribology of ultra-high molecular weight polyethylene disks molded at different temperatures

Tribological characteristics of ultra-high molecular weight polyethylene (UHMW-PE) disks molded at 130–190 °C were studied. The highest crystallinity was obtained for the sheet molded at 130 °C, but crystallinity decreased with increasing molding temperature. Beyond 150 °C, the resultant crystallinity reached a constant level. The dynamic friction coefficients of these UHMW-PE disks were measured using a ball-on-disk friction tester. The friction coefficient decreased with increasing number of rotations in the early stage of the measurement, and achieved at an equilibrium level, independent of the molding temperature. The steady-state friction coefficient was 0.04 for the disk molded at 130 °C and increased with increasing molding temperature. The disks molded at 150–190 °C always had a steady-state friction coefficient of 0.065. The surface deformation of each disk was evaluated from the observation of the resultant wear track. Analyzing the relationship between the above friction coefficient and width of the wear track enabled us to interpret the tribological mechanism generated in this study.     

Miniaturized liquid film sensor (MLFS) for two phase flow measurements in square microchannels with high spatial resolution

Two miniaturized liquid film sensors (MLFS) based on electrical conductance measurement have been developed and tested. The sensors are non-intrusive and produced with materials and technologies fully compatible and integrable with standard microfluidics. They consist of a line of 20 electrodes with a purpose-designed shape, flush against the wall, covering a total length of 5.00 and 6.68 mm. The governing electronics achieve 10 kHz of time resolution. The electrode spacing of the two sensors is 230 μm and 330 μm, which allows measurements of liquid films up to 150 μm and 400 μm for sensors MLFS_A and MLFS_B, respectively. The sensor characteristics were obtained by imposing static liquid films of known thickness on top of the actual sensor. Further dynamic measurements of concurrent air-water flow in a horizontal microchannel were performed. The line of electrodes is placed across the flow direction with an angle of 3.53° from the direction of flow, allowing for a spatial resolution perpendicular to the flow of 14.2 μm for sensor MLFS_A and 20.5 μm for sensor MLFS_B. The high time and spatial resolution allows for fast and accurate detection of the presence of bubbles, and even measurement of film thickness and bubble velocity. Further information, such as the bubble shape, can be gathered based on the shape of the liquid layer underneath the bubble, which is particularly important for heat transfer studies in microchannels.     

High precision self-alignment using liquid surface tension for additively manufactured micro components

Self-assembly of components using liquid surface tension is an attractive alternative to traditional robotic pick-and-place as it offers high assembly accuracy for coarse initial part placement. One of the key requirements of this method is the containment of the liquid within a designated binding site. This paper looks to expand the applications of self-assembly and investigates the use of topographical structures applied to 3D printed micro components for self-assembly using liquid surface tension. An analysis of the effect of edge geometry on liquid contact angle was conducted. A range of binding sites were produced with varying edge geometries, 45–135°, and for a variety of site shapes and sizes, 0.4–1 mm in diameter, and 0.5 mm × 0.5 mm–1 mm × 1 mm square. Liquid water droplets were applied to the structures and contact angles measured. Significant increases in contact angle were observed, up to 158°, compared to 70° for droplets on planar surfaces, demonstrating the ability of these binding sites to successfully pin the triple contact line at the boundary. Three challenging self-assembly cases were examined: (1) linear initial component misplacement >0.5 mm, (2) angular misplacement of components, and (3) misplacement of droplet. Across all three assembly cases the lowest misalignments in final component position, as well as highest repeatability, were observed for structures with actual edge geometries <90° (excluding 45° nominal), where the mean magnitude of misalignment was found to be 31 μm with 14 μm standard deviation.     

Friction and wear properties of αFeSi2–Si alloy,ReSi1.8 and MoSi2 in ethyl alcohol

In this study, Fe–X at% Si alloy (X=70.5, 80.0 and 96.0), Re–64.3 at% Si and Mo–66.7 at% Si disk specimens were prepared by spark plasma sintering, and their friction and wear properties were investigated when they were slid against Si₃N₄ ball specimens in ethyl alcohol. The friction and wear properties of Si ingots were also examined. Fe–70.5 at% Si, Fe–80.0 at% Si, Fe–96.0 at% Si and Re–64.3 at% Si disk specimens exhibited friction coefficients as low as 0.15. It is considered that the low friction of the Fe–70.5 at% Si, Fe–80.5 at% Si and Fe–96.0 at% Si disk specimens was due to the formation of low friction silicon alkoxide and polyoxysilane on the worn surfaces of the disk specimens and the paired ball specimens. Re–64.3 at% Si disk specimens exhibited the highest microvickers hardness of all the disk specimens prepared in this study. In addition, the microvickers hardness of the Fe–X at% Si (X=70.5, 80.0, 96.0 and 100) disk specimen increased with increasing the Si content. Moreover, it was difficult to obtain dense Fe–90.0 at% Si disk specimens by sintering the annealed and crushed Fe–90.0 at% Si powder. However, dense Fe–96.0 at% Si disk specimens could be obtained by sintering the Fe–90.0 at% Si powder at 1403 K.     

Simultaneous distributed measurement of the strain and temperature for a four-point bending test using polarization-maintaining fiber Bragg grating interrogated by optical frequency domain reflectometry

We demonstrate a simultaneous distributed strain and temperature measurement technique with the spatial resolution of 1 mm using fiber Bragg gratings inscribed in a polarization-maintaining and absorption-reducing fiber (PANDA-FBGs) and optical frequency domain reflectometry (OFDR). We conduct four-point bending tests in an environmental chamber. Using high birefringent PANDA-FBGs that are manufactured specifically for the simultaneous measurements, the uniform temperature distributions and the typical strain distribution profiles of the four-point bending tests were successfully obtained. The measurement errors of strain were from −31 με to 19 με, and of temperature were from −0.9 °C to 1.3 °C. The spatial standard deviation was 7.5 με and 0.9 °C. We also discussed the effect of the residual strain of the sensor-bonding procedures and the data averaging.     

Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers

The flatness measurement of large and thin wafers is affected greatly by gravity. Inverting method is often used to cancel the effect. However, it is required that the positions of the supports and wafers are perfectly symmetric about the inversion axis. In this study a three-point-support method based on position determination of supports and wafers was proposed. The supporting balls and the wafer were placed in arbitrary positions and their positions were obtained by measurement and fed into the FEM model which was developed to calculate the gravity-induced deflection (GID). The methods to acquire the positions of the supports and the wafer were proposed. The position measurement accuracy of the supports was improved greatly by circle fitting to the profile of the supporting ball. Wafer edge point was obtained accurately as the intersection point between the wafer surface line and the edge profile. The method to measure the wafer thickness using only one displacement sensor on the same equipment was presented. The simulation results were verified by experimental results. The centering device for the wafer and the positioning accuracy requirements of the supports are not needed any more. The effect of the positions of the supports and the wafer was reduced to be less than 1 μm for a 300 mm diameter and 397 μm thickness wafer with GID over 140 μm. This method could also be used for accurate flatness measurement of other large and thin panels.     

Solid particle erosion studies on polyphenylene sulfide composites and prediction on erosion data using artificial neural networks

Solid particle erosion behavior of polyphenylene sulfide, reinforced by short glass fibers with varying fiber content (0–40 wt%) has been studied. Steady-state erosion rates have been evaluated at different impact angles (15–90°) and impact velocities (25–66 m/s) using silica sand particles (200 ± 50 μm) as an erodent. PPS and its composites exhibited maximum erosion rate at 30° impact angle indicating ductile erosion behavior. Though PPS is a brittle thermoplastic, incubation period was found for neat resin and its composites at normal impact (α = 90°). The erosion rates of PPS composites increased with increasing amount of glass fiber. Morphology of eroded surfaces was examined using scanning electron microscopy (SEM) and possible wear mechanisms were discussed. Also, artificial neural networks (ANNs) technique has been used to predict the erosion rate based on the experimentally measured database of PPS composites. The results show that the predicted data are well acceptable when comparing them to measured values. A well-trained ANN is expected to be very helpful for prediction of wear data for systematic parameter studies.     

Constant pressure primary flow standard for gas flows from 0.01 cm3/min to 100 cm3/min (0.007–74 μmol/s)

We describe a flow standard for gas flows in the range from 0.01 sccm to 100 sccm with a relative standard uncertainty (68% confidence) of 0.03% at 1 sccm (1 sccm≡1 cm³/min of an ideal gas at 101325 Pa and 0 °C ≈ 0.74358 μmol/s). The flow standard calibrates a secondary meter by withdrawing a piston from a cylinder held at constant pressure P while gas flows from the secondary meter into the cylinder. The flow standard can operate anywhere in the range 10 kPa<P<300 kPa, and it can act as a flow source as well as a flow receiver. The flow standard incorporated features that improved its convenience and lowered its cost without sacrificing accuracy, specifically (1) dry sliding seals made with commercially available, easily replaced, o-rings, (2) a compact design based on a commercially available, hollow piston, and (3) a linear encoder with a small Abbe error.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

Evaluation on 3D micro-ground profile accuracy of micro-pyramid-structured Si surface using an adaptive-orientation WLI measurement

According to the aperture of the objectives, surfaces with steep topographies greater than approximate 25° are difficult or unable to measure with white light interferometry. Hence, an adaptive-orientation measurement is proposed by adjusting the incidence angle from 51° to 21°. In this study, a micro-grinding with #3000 diamond wheel V-tip was employed to fabricate the micro-pyramid-structured Si surface with 142 μm in depth and 38 nm in surface roughness. The objective is to evaluate the micro-profile accuracy of micro-ground Si surface. First, the four micro-ground surfaces of micro-pyramid-structured surface were measured along the adaptive orientation with an incidence angle, respectively; then iterative closest point (ICP) matching was used to reconstruct the whole micro-ground surface with four adaptive-orientation measured point clouds; finally, 3D reconstruction error and characterized profile error were investigated. It is shown that the ICP matching with denoising and finishing is valid to register four adaptive-orientation measured point clouds for reconstructing an integrated micro-ground surface. Moreover, a decrease in incidence angle to measured surfaces leads to a decrease in 3D reconstruction error, an increase in valid top-topographic point number and a decrease in characterized profile error. It is confirmed that the adaptive-orientation measurement with 21° incidence angle may enhance 3D reconstruction accuracy by about 35%, valid top-topographic point number by about 3 times and characterized profile accuracy by about 38% against the traditional measurement, respectively. The micro-ground form error of 5.5 μm and the characterized profile error of 6.0 μm may be achieved, respectively, thus the micro-grinding is valid for the precision micro-fabrication of micro-structured surface.     

The design and optimization of micro polycrystalline diamond ball end mill for repairing micro-defects on the surface of KDP crystal

Micro-milling is a promising approach to repair the micro-defects on the surface of KH₂PO₄ (KDP) crystal. The geometrical parameters of micro ball end mill will greatly influence the repairing process as a result of the soft brittle properties of KDP crystal. Two types of double-edged micro ball end mills were designed and a three-dimensional finite element (FE) model was established to simulate the micro milling process of KDP crystal, which was validated by the milling experiments. The rake angle of −45°, the relief angle of 45° and the cutting edge radius of 1.5–2 μm were suggested to be the optimal geometrical parameters, whereas the rake angle of −25° and the relief angle of 9° were optimal just for micro ball end mill of Type I, the configuration with the rake angles ranging from 0° to 35°, by fully considering the cutting force, and the stress–strain distribution over the entire tool and the cutting zone in the simulation. Moreover, the micro polycrystalline diamond (PCD) ball end mills adopting the obtained optimal parameters were fabricated by wire electro-discharge machining (WEDM) and grinding techniques, with the average surface roughness Ra of tool rake face and tool flank face ∼0.10 μm, and the cutting edge radius of the tool ∼1.6 μm. The influence of tool's geometrical parameters on the finished surface quality was verified by the cutting experiments, and the tool with symmetric structure was found to have a better cutting performance. The repairing outlines with Ra of 31.3 nm were processed by the self-fabricated tool, which could successfully hold the growth of unstable damage sites on KDP crystal.     

Measurement method and pipe wall misalignment adjustment algorithm of the pipe butting machine

This paper presents a runout measurement method and a novel finite grouping method to predict and optimize the rotational angle and translational displacement of butting pipes to minimize pipe wall misalignment (PWM). This study develops a method to minimize the PWM of the pipes excluding the positions of welding seams. In this method, the measurement data are divided into finite groups and the criteria are created to identify the positions of welding seams and eliminate the effect of the welding seams. Finally, the rotational angle and translational displacement of the butting pipes are optimized to minimize the PWM. A butting machine is designed to implement this method. The machine is benchmarked by a standard smooth pipe to minimize system errors. Three butting experiments have been performed with welded pipes of diameter 406 mm. The comparison shows that the computation results agree with the experimental results very well. The maximum PWMs in three experiments are less than 1.87 mm, which satisfies the butting requirements, that is, a PWM of less than 2.0 mm. Then, the uncertainties of the measurement results are discussed.     

Wind speed and direction measurement based on arc ultrasonic sensor array signal processing algorithm

This article investigates a kind of method to measure the wind speed and the wind direction, which is based on arc ultrasonic sensor array and combined with array signal processing algorithm. In the proposed method, a new arc ultrasonic array structure is introduced and the array manifold is derived firstly. On this basis, the measurement of the wind speed and the wind direction is analyzed and discussed by means of the basic idea of the classic MUSIC (Multiple Signal Classification) algorithm, which achieves the measurements of the 360° wind direction with resolution of 1° and 0–60 m/s wind speed with resolution of 0.1 m/s. The implementation of the proposed method is elaborated through the theoretical derivation and corresponding discussion. Besides, the simulation experiments are presented to show the feasibility of the proposed method. The theoretical analysis and simulation results indicate that the proposed method has superiority on anti-noise performance and improves the wind measurement accuracy.     

A new digital background calibration for redundant radix-4 pipelined ADCs by modeling of adaptive filter for linear and nonlinear errors

In this paper a new digital background correction and calibration technique for redundant multi-bit pipeline stages is presented. In this method output voltage of each stage in converter is defined as sum of the ideal product and error signal, which error voltage include of linear non-ideal section or first order error and nonlinearity undesired signal or third order error. Linear error is formed by capacitor mismatch, op-amp offset, comparator offset and finite op-amp gain effects. Nonlinear error is deformed the output voltage depend on the nonlinear results of open loop residue amplifier. Correction begins with separately calculation and cancelation of the nonlinear and linear errors respectively. For calibration of each stage at first step, the nonlinear effects in digital output of backend ADC is eliminated and then by digital modeling of first order analog error the influence of this unfavorable signal is diminished from digital equivalent of input voltage. Therefore for cancelation of non-ideal impairment in each stage a digital filter consist of linear and nonlinear channel in digital domain is designed. The first order and third order coefficients of designed digital function are unknown and should by a pertinent method be estimated simultaneously. Adaptive filter are best choose for this method. Simulation results show that INL/DNL parameters of 14-bit radix-4 pipelined converter are improved from 17LSB/3LSB to 0.45LSB/0.41LSB after calibration. The SNDR/SFDR parameters are increased from 30 dB/36 dB to 83 dB/90 dB.