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1.
采用复合离子镀技术,在不同脉冲负偏压幅值下于304不锈钢表面制备TiCN薄膜,研究了负偏压幅值对薄膜成分、结构、表面粗糙度、显微硬度及摩擦磨损性能的影响。结果表明:随着负偏压幅值升高,钛、碳与氮元素的原子比以及碳与钛元素的原子比先增大后减小,薄膜表面的颗粒及针孔、凹坑等缺陷尺寸减小,数量减少,表面形貌得到改善;薄膜主要由TiCN相组成,随着负偏压幅值增大出现(111)晶面择优取向,且薄膜的显微硬度先增大后减小,并在负偏压幅值为300V时达到最大,为2 690HV;薄膜的摩擦磨损性能优于基体的,随着负偏压幅值增加,薄膜的摩擦因数不断降低,在负偏压幅值为300V时约为0.355,此时薄膜的摩擦磨损性能最优。  相似文献   

2.
脉冲偏压对PECVD制备DLC薄膜的结构及性能的影响   总被引:1,自引:0,他引:1  
在不锈钢基材表面利用等离子体增强化学气相沉积技术(PECVD)改变脉冲偏压制备不同结构类金刚石薄膜(DLC)。分别采用表面轮廓仪、扫描电镜、拉曼光谱及电子探针分析薄膜的表面粗糙度、断面形貌、薄膜结构及成分,采用纳米压痕仪及划痕仪测试薄膜的纳米硬度、弹性模量和膜基结合力,采用球盘摩擦试验机测试薄膜在大气环境中的摩擦学性能。结果表明:脉冲偏压显著影响PECVD制备的DLC薄膜的表面粗糙度、微观形貌、膜基结合力、纳米硬度及摩擦学性能;随偏压的增大,DLC薄膜的表面粗糙度,摩擦因数及磨损量都先减小后增大,而膜基结合力则先增大后减小。其中2.0 k V偏压制备的DLC薄膜具有最强的膜基结合力,而1.6 k V偏压制备的DLC薄膜具有最低的表面粗糙度、最高的硬度和最优的减摩耐磨性能。  相似文献   

3.
采用多弧离子镀技术,在单晶硅和硬质合金衬底上制备Ti-B-N涂层,使用XRD,SEM,硬度计和划痕仪系统研究了偏压对TiBN涂层结构、表面形貌、硬度和附着力的影响。在不同的基体偏压下,涂层表现了(111)面择优生长。-100 V偏压时沉积的TiBN涂层表面最平滑。随着基体偏压升高,TiBN涂层硬度逐渐增大,膜基结合力逐渐减小。-200 V制备的TiBN涂层硬度最大3600 HV,-50 V制备的TiBN涂层膜基结合力接近40 N。  相似文献   

4.
采用高功率脉冲磁控溅射方法在不同基体偏压下的钢基体上沉积含Cr过渡层的DLC薄膜.利用原子力显微镜、场发射扫描电镜、Raman光谱、动态超显微硬度计和划痕仪对薄膜的表面形貌、截面形貌、结构成分、力学性能进行表征.结果表明:随着基体偏压的增大,薄膜表面更加平整,表面粗糙度减小;不同基体偏压下制备的DLC薄膜与基体结合良好...  相似文献   

5.
利用磁过滤阴极电弧技术,通过改变基片负偏压(0~500 V)制备四面体非晶碳(ta C)薄膜,研究基片负偏压对ta C薄膜结构和摩擦因数的影响.研究表明,基片负偏压对ta C薄膜的sp3键含量有很大影响,当负偏压为200 V时,ta C薄膜的sp3键含量为85%.在0~200 V范围内随着基片偏压的增大,表面粗糙度逐渐减小,在负偏压为200 V时,薄膜表面粗糙度最小,为0.18 nm左右;当负偏压超过200 V后,由于薄膜中石墨相增多,薄膜表面粗糙度将增大.随着基片偏压的逐渐增大,由于薄膜表面粗糙度的减小和在摩擦中石墨相自润滑层的形成,薄膜的摩擦因数大大降低,耐磨性提高.  相似文献   

6.
通过分析不同基体偏压下磁控溅射(PVD)CrAlN薄膜的结构特征、硬度规律及磨痕形貌,研究基体偏压对CrAlN薄膜的结构、硬度及摩擦磨损性能的影响。借助扫描电子显微镜(SEM)和原子力显微镜(AFM)观察CrAlN薄膜的表面形貌及三维形貌。采用纳米压痕仪对CrAlN薄膜的硬度进行测定。利用球盘式摩擦磨损试验机测定CrAlN薄膜的摩擦系数,并观察薄膜的磨痕形貌,分析薄膜的磨损机理。结果表明:当基体偏压低于150V时,薄膜表面颗粒的平均尺寸随偏压增大而逐渐减小;当基体偏压超过150V时,薄膜表面出现有明显的缺陷。随着基体偏压的增大,薄膜的硬度呈先升高后降低的趋势,并在基体偏压约为150V时达到最大值为27.5GPa;薄膜的摩擦系数呈先减小后增大的趋势,并在基体偏压约为150V时达到最小值0.25;磨痕呈不同程度的犁沟状,在基体偏压为150V时磨痕形貌平整且犁沟最小。当基体偏压为150V时,CrAlN薄膜的表面缺陷最小、硬度最大、摩擦系数低和综合性能最好,薄膜的磨损机理为磨粒磨损。  相似文献   

7.
采用爆炸喷涂方法在2Cr10MoVNbN钢基体表面制备了Cr3C2-NiCr涂层,利用光学显微镜、扫描电镜、X射线衍射仪、能谱仪、显微硬度计、电子拉伸试验机、X射线应力仪、疲劳试验机等分析测试了涂层的缺陷、显微硬度、断裂韧度、结合力、残余应力、疲劳性能等,主要研究了涂层对基体疲劳性能的影响.结果表明:在2Cr10MoVNbN钢基体上采用爆炸喷涂方法制备的Cr3C2-NiCr涂层的孔隙率为0.5%,表面硬度为921 HV,断裂韧度为3.67 Mpa·m1/2,涂层与基体的结合强度为63 Mpa,涂层表面、涂层/基体界面处均处于压应力状态;爆炸喷涂Cr3C3-NiCr涂层明显降低了2Cr10MoVNbN钢基体的疲劳性能,在应力幅小于500 Mpa时,与基体试样相比,涂层试样的疲劳寿命减少了75%以上,疲劳强度下降了134.7 Mpa,涂层试样的疲劳裂纹源出现在涂层/基体界面的Al2O3夹杂物处.  相似文献   

8.
采用多弧离子镀技术,在不同偏压(0~-100 V)下在316 L不锈钢基体上沉积CrN涂层,通过球-平面往复式摩擦磨损试验机研究基体偏压对涂层结构和海水环境下摩擦学性能的影响。结果表明:随着偏压的增大,涂层结构变为更加致密,涂层硬度先增加后基本稳定;随着偏压的增大,涂层与316L基体的结合力先增大后减小,偏压为-50~-75 V时涂层有最好的结合力;在海水环境下,涂层具有很低的摩擦因数(0.2~0.3),并随着偏压升高而降低;随着偏压的增大涂层的磨损率先减小后增大,偏压为-50~-75 V时涂层的磨损率较低。偏压为-50~-75 V时制备的涂层具有最好的综合机械性能。  相似文献   

9.
利用等离子喷涂技术在瓦楞辊材料42CrMo合金钢表面涂镀Cr2O3硬质涂层,以期提高材料表面耐磨性能.用显微硬度仪测试涂层的硬度,用MFT-4000型高速往复摩擦磨损试验机对涂层进行耐磨性能试验.并用扫描电镜(SEM)、X光衍射仪(XRD)分析了涂层的截面形貌和相结构.结果表明:等离子喷涂Cr2O3涂层后试样表面硬度达到HV1 184.1,试样表面摩擦因数减小,抗磨损性能大幅提高.  相似文献   

10.
利用非平衡磁控溅射技术在单晶硅片及9Cr18基体表面制备不同偏压下的掺钨含氢类金刚石碳膜。采用Ra-man光谱分析薄膜结构,采用纳米硬度测试仪和纳米划痕仪研究薄膜的纳米硬度、弹性模量和膜基附着力,在球-盘摩擦试验机上测试薄膜在大气环境中的摩擦学性能,研究薄膜的摩擦学性能与偏压的关系。结果表明:制备的薄膜样品均具有典型的类金刚石碳膜结构;基体偏压强烈影响薄膜的力学和摩擦学性能,薄膜硬度和弹性模量在0~150 V范围内随着偏压增加而增大,薄膜的摩擦因数在偏压为100 V时最小,在此参数下的耐磨寿命也最长。  相似文献   

11.
The influence of substrate temperature and bias voltage on the structure and tribomechanical properties of the Ti–Al–N coatings obtained by reactive magnetron sputtering technique has been investigated. The structure and elemental and phase compositions have been studied by scanning electron microscopy, Rutherford backscattering, and X-Ray diffraction. The results of friction and wear experiments indicated that the lowest coefficient of friction (three times lower than 12Cr18Ni10Ti) corresponded to a coating deposited at a bias voltage of–200 V and a substrate temperature of 340°С, while the most wear-resistant coating (under a load of 700 mN and the testing time of 1080 s) was Ti–Al–N sputtered at a bias voltage of–200 V and a substrate temperature of 440°С.  相似文献   

12.
A duplex treatment involving nitrogen ion pre-implantation and gradient interfacial transition was performed to obtain a high-performance graphite-like carbon (GLC) coating on a Ti6Al4V alloy. Characteristics of the as-deposited coating systems were systemically investigated by Raman spectrometry, scanning electron microscopy, atomic force microscopy, nano-indentation, and scratch tests. The friction and wear behaviors in distilled water and sea water environments were evaluated by a ball-on-disk tribometer. The results showed that the GLC multilayer coating on nitrogen ion-implanted Ti6Al4V possessed a greater hardness and adhesion strength than to that on un-implanted Ti6Al4V. The tribological performances of these duplex process systems showed a great improvement in both the distilled water and sea water environments. In particular, the Cr/CrN/GLC coatings on nitrogen ion-implanted substrates demonstrated the best friction and wear behaviors. These striking improvements were attributed to the greatly enhanced interface strength between substrate and coating by the nitrogen ion implantation process and improved adhesion strength between gradient layers by the appropriate gradient interlayers with a similar thermal expansion coefficient.  相似文献   

13.
The interfacial roughness and the adhesion strength are very important for making a high-quality coating for friction and wear applications. In order to obtain a quantitative understanding concerning the effect of the two factors on the local delamination of hard coatings, finite element analyses concerning the maximum shear stress in a hard coating with various kinds of interfacial roughness and adhesion strength were made under low and high frictional conditions. As a result, local delamination maps for the identification of the local delamination of hard coatings were obtained as a function of the shear strength ratio of coating to substrate and the ratio of coating thickness to half-contact width. Also, the critical contact pressure required to produce local delamination of hard coatings is given.  相似文献   

14.
Abstract

A plasma enhanced chemical vapour deposition (PECVD) amorphous carbon coating was deposited onto 100Cr6 steel substrates having varying degrees of surface roughness. The samples were subsequently evaluated to determine the correlation between substrate roughness and coating performance. The steel substrates were prepared before coating deposition to attain five different levels of roughness: (a) ground; (b) superfinished (SF); (c) polished to 1000 grit; (d) polished to 220 grit and (e) polished to a 1 μm diamond finish. The aim of the investigation was to determine the degree of finish required for good tribological performance and coating adhesion. The mechanical and tribological properties of the samples were assessed by nanoindentation, ramped load scratch testing, and pin on disk wear testing. Nanoindentation testing was used to determine the hardness of the samples and the relative contributions to the system hardness from the substrate and coating were separated using the model of Korsunsky et al. Nanoindentation testing showed that the coating hardness (when separated from the system hardness) was lower for the samples with the SF substrate than the others: the reasons for this are discussed in the light of Raman measurements on the fractions of diamond-like and graphite-like bonding in the coatings. Ramped load scratch testing was used to determine coating adhesion and the scratch test failure mode. With the exception of the samples with the ground substrate finish, studies of the friction coefficient plots during scratch testing showed little variation between the samples, and SEM imaging revealed a common failure mode of severe spallation at the scratch track border. The samples with the ground substrate showed differences in response between scratches parallel and perpendicular to the grinding direction, with scratches parallel to the grinding direction showing more severe spallation. The average critical load to failure, as determined by the point of first failure in the scanning electron microscope, was lower for the coatings on the SF substrate than the coatings on the 220 grit, 1000 grit and 1 micron finished substrates. The critical load to failure for the samples with ground substrates was lower than the other substrate surface finishes. Pin on disk wear testing of the samples against a steel ball revealed that the major effect of the varying substrate roughness was on the wear of the counterface, with rougher substrate finishes generally resulting in higher wear rates of the counterface, although the smoothest substrate finish, the micrometre finish, also resulted in higher wear. The sample whose substrate was superfinished gave least wear of the counterface and this was therefore the optimum finish for the samples when considering their performance in a tribological couple.  相似文献   

15.
模具钢表面盐浴渗钛层的制备及性能研究   总被引:1,自引:0,他引:1  
采用盐浴法在Cr12Mo V冷作模具钢表面进行渗钛处理,研究了不同温度和时间对渗层厚度的影响。通过金相显微镜、扫描电镜、X射线衍射仪、显微硬度测试仪和旋转摩擦试验仪分析了渗层的显微形貌、相结构、表断面硬度和耐磨性能。结果表明:通过配方优选,在适宜的渗入温度(1000℃)和时间(6h)下,可在模具钢表面形成致密、厚度约13μm的渗钛层,相组成主要为Ti C,渗层具有较高的表面硬度(约2789HV0.3)。室温干摩擦试验表明,与基体相比,相渗层试样的磨损量降低约17倍,平均摩擦系数为0.4054,仅为基体的70.6%,说明模具钢盐浴渗钛处理后具有较佳的耐磨减摩性能。  相似文献   

16.
The use of low friction coatings like amorphous carbon or metal-doped carbon coatings on machine elements is constantly increasing. Most often, a surface treatment, e.g. grinding and polishing or honing, is required for optimal performance of the coated machine element. This can be time consuming and costly.In this study, the effect of surface roughness on friction and sliding wear of two different coatings, one tungsten containing and one chromium containing coating, were examined using a ball-on-disc test. Ball bearing steel plates were grinded to different surface roughnesses and coated with the two different coatings.The friction was found to depend on surface roughness where the rougher surfaces gave higher friction coefficients. The wear rate for the a-C:W coating was found to be independent of the roughness, whereas the roughness had a strong influence on the wear rate for the a-C:Cr coating. This could partly be explained by a difference in wear mechanism, where fatigue wear was observed for the a-C:Cr coating but not for the a-C:W coating.  相似文献   

17.
采用自主研发的离子源增强多弧离子镀设备,研究涂层沉积前不同清洗工艺对基材表面粗糙度以及所制备的AlCrN涂层的表面形貌、硬度、膜基结合力、摩擦磨损和切削性能的影响。研究结果表明,高能Ar+清洗可以更有效清洁基材表面。与传统弧源清洗技术相比,经高能离子源清洗后的基体表面粗糙度降低,沉积态涂层的表面粗糙度更低。相比于传统弧源清洗工艺,高能Ar+清洗可以显著提高膜基结合强度,达到48.7 N,摩擦因数和磨损率均降低,涂层刀具寿命提高了3倍。  相似文献   

18.
利用微弧氧化技术在Ti6Al4V合金表面制备了富含钙、磷的多孔氧化陶瓷层,研究了微弧氧化层表面形貌、组成及摩擦学性能。研究结果表明,随着电压的升高,氧化层表面微孔孔径、粗糙度和Ca、P元素含量增大,显微硬度增大。25%小牛血清润滑条件下的微弧氧化层与ZrO2陶瓷球的摩擦学实验表明,微弧氧化层的摩擦因数高于Ti6Al4V钛合金,但磨损率明显降低,表明微弧氧化Ti6Al4V合金具有良好的耐磨性能。  相似文献   

19.
采用离子源增强的多弧离子镀新技术,在硬质合金刀具表面制备了不同含Si层梯度结构的AlCrTiSiN梯度涂层,并对涂层组织结构、残余应力、结合强度、摩擦磨损以及铣削和钻削加工灰铸铁性能进行了详细的研究。结果表明:不同含Si层梯度结构的AlCrTiSiN涂层主要由固溶的(Al,Cr) N、(Al,Ti) N相和非晶态Si3N4相组成。其中,含Si层梯度变化最缓和的G3(Gradient 3)涂层具有较高的结合强度,较低的残余压应力、摩擦因数和磨损率。铣削和钻削试验显示,涂层刀具的切削磨损机理主要表现为磨粒磨损和粘着磨损。G3涂层降低了磨粒磨损,其刀具的铣削和钻削寿命均最高,这主要得益于其含Si层的梯度设计、适当的压应力(-3.8 GPa)以及良好的膜基结合强度。研究结果表明,通过对含Si层进行梯度设计可显著提高涂层刀具的切削性能。  相似文献   

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