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1.
以纳米CeO2为磨料自制抛光液,研究磨料质量分数、pH值、抛光液流量、抛光盘转速、表面活性剂种类和氟化铵质量分数等因素对微晶玻璃化学机械抛光的影响,分析总结CeO2在微晶玻璃化学机械抛光中的作用机理,利用原子力显微镜(AFM)检测微晶玻璃抛光后的表面粗糙度。结果表明:当CeO2质量分数为3%、抛光液流量为25mL/min、抛光盘转速为100r/min、pH=8.0、十二烷基硫酸钠质量分数为0.01%,氟化铵质量分数为0.7%时,抛光后微晶玻璃表面粗糙度(Ra)最低为0.72nm,材料去除速率达到180.91nm/min。   相似文献   

2.
用在磷酸、丙二醇和水组成的抛光液中的失重率和磷化膜的盐水腐蚀实验以及电化学方法,研究了抛光工艺对AM60镁合金抛光效果、磷化膜耐蚀性的影响及AM60镁合金在磷酸系抛光液中的抛光机理.结果表明,用磷酸体积分数为60%~70%的抛光液,在温度40~50℃下抛光3~5 min,得到了较好的抛光效果,同时提高了磷化膜的耐蚀性.  相似文献   

3.
利用固相反应法制备纳米二氧化锡磨料并研究了制备条件对平均粒径的影响。结果表明,在500℃/4h条件下制得的纳米二氧化锡粉体在水中有良好的分散性和稳定性。利用自制的抛光液对高纯钌片进行化学机械抛光,与二氧化硅磨料抛光液比较,材料去除速率和表面粗糙度都降低。当抛光液中含1%(质量分数,下同)二氧化锡、1%过硫酸铵、1%酒石酸和3mmol/L咪唑,pH=8.0,抛光压力为17.24kPa时,材料去除速率(MRR)和表面粗糙度(Ra)分别为6.8nm/min和4.8nm。  相似文献   

4.
化学机械抛光液的发展现状与研究方向   总被引:13,自引:11,他引:2  
彭进  夏琳  邹文俊 《表面技术》2012,41(4):95-98
简述了化学机械抛光液的主要成分及其作用;综述了近年来国内外化学机械抛光液的发展现状,主要介绍了二氧化硅胶体抛光液、二氧化铈抛光液、氧化铝抛光液、纳米金刚石抛光液.最后指出,化学机械抛光液未来应向环保化、精细化以及专门化的方向发展.  相似文献   

5.
制备了一种纳米SiC抛光液,用透射电镜观察其粒子形貌,通过纳米粒度仪研究了分散剂种类对悬浮液中SiC的粒径分布和Zeta电位的影响,并用制备的抛光液对蓝宝石晶片进行化学机械抛光。使用原子力显微镜观察蓝宝石晶片抛光后的表面形貌。结果表明:SiC磨料在以十六烷基三甲基溴化铵(CTAB)作为分散剂的悬浮液中分散效果最好;在相同试验条件下,采用质量分数1%的SiC抛光材料的去除速率最大,为24.0 nm/min,获得蓝宝石晶片表面质量较好,表面粗糙度R a为2.2 nm。  相似文献   

6.
采用液相沉淀法制备了纳米CeO2磨料,利用X射线衍射(XRD)表征其物相组成.通过纳米粒度仪研究了分散剂种类、热处理温度对CeO2磨料制备的悬浮液的粒径分布和Zeta电势的影响.用由CeO2磨料制备的抛光液对钌进行化学机械抛光,采用原子力显微镜观察钌片表面的微观形貌.结果表明:制备的粉体是具有立方萤石型结构的纳米CeO2,其晶粒尺寸随热处理温度的升高而增大;CeO2磨料在以六偏磷酸钠(SHMP)作为分散剂的悬浮液中分散效果最好;在抛光压力为6.9 kPa,抛光台转速为50 r/min,抛光液流量为50 mL/min,抛光液pH值为10.0,抛光液主要组成(质量分数)为1% CeO2,1%(NH4)2S2O8,0.01% SHMP的条件下,钌的抛光速率达到9.0 nm/min,表面粗糙度Ra值为2.2 nm.  相似文献   

7.
钇铝石榴石(YAG)晶体由于其优异的物理化学和光学性能,广泛用作激光器的激光增益介质。然而,目前的加工方法很难满足YAG晶体的高效高质量加工。基于传统硅溶胶抛光液的抛光机理,配制一种化学机械抛光液,并通过正交试验优化化学机械抛光液的成分配比。使用优化后的抛光液抛光YAG晶体,其化学机械抛光材料去除率提升至34 nm/min,抛光后YAG晶体表面粗糙度为0.5 nm。相比于传统硅溶胶抛光液,新型抛光液的抛光效率提升240%,抛光工件的表面粗糙度降低17%。同时,通过对比抛光液性能提出化学机械抛光界面的相互作用模式对材料去除率的影响原因。   相似文献   

8.
一种涂层超导体镍基带的电化学抛光方法。该方法可以减小涂层超导体镍基带表面的粗糙度。该方法包括:①以磷酸与丙三醇的体积比为95~105:0.1~0.5,配制电化学抛光液,其中,磷酸的浓度为85%;②以步骤①配制的电化学抛光液作为电解液,以涂层超导体镍基带作为阳极材料,不锈钢作为阴极材料,浸没在电化学抛光液中,接通电源,在5~10V电压,0.3~1A电流中进行抛光,时问控制在10~60min;③抛光后,将涂层超导体镍基片清洗、吹干。该工艺处理后的镍基带表面粗糙度大约为十几纳米,能够满足涂层超导体制备的要求。  相似文献   

9.
化学机械抛光过程抛光液作用的研究进展   总被引:1,自引:0,他引:1  
化学机械抛光(CMP)已成为公认的纳米级全局平坦化精密超精密加工技术。抛光液在CMP过程中发挥着重要作用。介绍了CMP过程中抛光液的作用的研究进展,综合归纳了抛光液中各组分的作用,为抛光液的研制和优化原则的制定提供了参考依据。  相似文献   

10.
在低压无磨料条件下,利用碱性FA/O型螯合剂具有极强螯合能力的特性,对铜互连线进行化学机械平坦化,获得了高抛光速率和表面一致性。提出了铜表面低压无磨料抛光技术的平坦化原理,在分析了抛光液化学组分与铜化学反应机理的基础上,对抛光液中的主要成分FA/O型螯合剂、氧化剂的配比和抛光工艺参数压力、抛光机转速进行了研究。结果表明:在压力为6.34kPa和抛光机转速为60r/min时,抛光液中添加5%螯合剂与1%氧化剂(体积分数,下同),抛光速率为1825nm/min,表面非均匀性为0.15。  相似文献   

11.
吴玉梅  熊晓云  靳蓉  孙敬民  杨林  罗晓星 《金属学报》2005,10(10):1100-1103
目的: 观察本实验室合成的一种治疗阿尔茨海默氏症(AD)的药物(1-二甲基磷酰基-2, 2, 2 -三氯)-乙基-1-醇烟酸醋(NMF),对体外培养的皮层神经细胞活性的影响以及对海人藻酸(KA)所致的神经损伤的保护作用。方法: 采用体外培养皮层神经元的方法,解剖分离 15 d胚胎小鼠皮层神经细胞, 接种于 96孔板,48 h 后加药并培养 72 h,以 MIT 法 观察 NMF 对小鼠皮层神经细胞活性的影响;同时将接种于 24 孔板的细胞预先给予 NMF,d 3 时加或不加KA处理后,以台盼蓝染色鉴别并计数死、活细胞,可得出细胞的存活率。结果: NMF 明显促进胎鼠皮层神经元活性,其中 NMF1、0. 1、10nmol·L-1促进神经元活性增殖率分别高达 34.7%、37.4%、36. 7%, NMF 明显促进正常胎鼠皮层神经元存活卒,与对照组比较,10nmol·L-1 NMF 对皮层神经元的存活率分别提高 39.3%、73.5%。 NMF能显著 对抗 KA 所致的神经元损伤,与 KA 损伤组相比, NMF0.1、10、10nmol·L-1对损伤皮层神经元的保护率分别为 77.30%、80.10%、84.15%。结论: NMF 明 显促进胎鼠皮层神经元的洁性、提高正常皮层神经元,的存活卒,并能有效地保护KA所致的神经元损伤,提示 NMF 是一种很有潜力的治疗 AD 的药物。  相似文献   

12.
The rheology feature of Sb, Bi melt and alloys was studied using coaxial cylinder high-temperature viscometer. The results showed that the curve of torsion-rotational speed for Sb melt presents a linear relation in all measured temperature ranges, whereas for the Bi melt, the curve presents obvious non-Newtonian feature within the low temperature range and at relative high shear stress. The rheology feature of Sb80Bi20 and Sb20Bi80 alloy melts was well correlated with that of Sb and Bi, respectively. It is considered that the rheology behavior of Sb melt plays a crucial role in Sb80Bi20 alloy and that of Bi melt plays a crucial role in Sb20Bi80 alloy.  相似文献   

13.
The effect of heat treatment on the microstructures and mechanical properties of a newly developed austenitic heat resistant steel(named as T8 alloy) for ultra-supercritical applications have been studied. Results show that the main phases in the alloy after solution treatment are γ and primary MX. Subsequent aging treatment causes the precipitation of M_(23)C_6 carbides along the grain boundaries and a small number of nanoscale MX inside the grains. In addition, with increasing the aging temperature and time, the morphology of M_(23)C_6 carbides changes from semi-continuous chain to continuous network.Compared with a commercial HR3C alloy, T8 alloy has comparable tensile strength, but higher stress rupture strength. The dominant cracking mechanism of the alloy during tensile test at room temperature is transgranular, while at high temperature, intergranular cracking becomes the main cracking mode, which may be caused by the precipitation of continuous M_(23)C_6 carbides along the grain boundaries. Typical intergranular cracking is the dominant cracking mode of the alloy at all stress rupture tests.  相似文献   

14.
Coherent second phase often exhibits anisotropic morphology with specifi c orientations with respect to both the second and the matrix phases. As a key feature of microstructure, the morphology of the coherent particles is essential for understanding the second-phase strengthening eff ect in various industrial alloys. This letter reports anisotropic growth of coherent ferrite from austenite matrix in pure iron based on molecular dynamics simulation. We found that the ferrite grain tends to grow into an elongated plate-like shape, independent of its initial confi guration. The fi nal shape of the ferrite is closely related to the misfi t between the two phases, with the longest direction and the broad facet of the plate being, respectively, consistent with the best matching direction and the best matching plane calculated via the Burgers vector content(BVC) method. The strain energy calculation in the framework of Eshelby's inclusion theory verifi es that the simulated orientation of the coherent ferrite is energetically favorable. It is anticipated that the BVC method will be applicable in analysis of anisotropic growth and morphology of coherent second phase in other phase transformation systems.  相似文献   

15.
16.
《中国铸造》2014,(6):540-541
Organized by Suppliers China Co., Ltd and co-organized by the National Technical Committee 54 on Foundry of Standardization Administration of China, the 15th Global Foundry Sourcing Conference 2014 (hereinafter referred to as FSC 2014) was successfully held on Sep. 23rd in Grand Regency Hotel, Qingdao. More than 500 delegates from home and abroad attended this conference, including over 130 purchasers from 20 countries and 380 domestic and foreign suppliers.  相似文献   

17.
By rolling and nitriding processes, 0.23- to 0.3-mm-thick grain-oriented 6.5 wt% silicon steel sheets were produced. The core losses of grain-oriented 6.5 wt% silicon steel at frequencies ranging from 400 Hz to 20 k Hz were lower than that of the grain-oriented 3 wt% silicon steel with the same thickness by 16.6–35.8%. The secondary recrystallization behavior was investigated by scanning electron microscopy, energy-dispersive spectroscopy, and electron backscattered diffraction. The results show that the secondary recrystallization in high-silicon steel sheets develops more completely as the nitrogen content increases after nitriding, secondary recrystallized grain sizes become larger, and the sharpness of Goss texture increases. Because more {110}116 grains in the subsurface and the central layer of the sheets have a lot of 20°–45° high-energy boundaries in addition to Goss grains, {110}116 can be the main component through selective growth during secondary recrystallization when the inhibitor quantity is not enough and inhibitor intensity is weaker. The increases in nitrogen content can increase the inhibitor intensity and hinder abnormal growth of a mount of {110}116 grains and therefore enhance the sharpness of Goss texture.  相似文献   

18.
Laser Cladded TiCN Coatings on the Surface of Titanium   总被引:3,自引:0,他引:3  
Laser cladded coatings of TiCN were produced on the surface of titanium. To obtain the optimal techniques, several conditions were tested by varying the laser scanning rate. The choice of shielding gas was also studied. The cladded coatings were then evaluated from the surface mechanics point of view based on their microhardness. The microstructure of some interesting samples was investigated by optical micrographs (OM). The results showed that under the condition of fixed pulse frequency and pulse width, the laser scanning rate and the shielding gas are the main factors influencing the components of coatings. TiCN coatings were decompounded and oxidized during the cladding process in the condition of no shielding gas of N2. X-ray diffraction results indicated that the composite coatings composed of TiCN, TiC, Ti2N, and TiO2 were produced using appropriate techniques. The results indicated that the best condition in terms of the surface microhardness is obtained when the scanning rate is 1.5mm / s, the pulse frequency is 15Hz, the pulse width is 3.0ms, and N2 is chosen as the shielding gas. The microhardness of the composite coatings is about 1331kg · mm - 2, which is about 4 times that of the substrate. The optical micrographs indicated that the cladding zone is made up of TiCN, TiO2, and some interdendritic Ti, but the diffusion zone mainly consists of the dendrites phase, and the cladded depth is about 80?滋m, which is more than 2 times that of the laser nitrided sample. There were no microcracks or air bubbles in the cladded sample, which was cladded using the above optimal techniques.  相似文献   

19.
The effect of short-time aging in the temperature range between 400 and 1000 °C on the pitting corrosion behavior and mechanical property of a novel lean duplex stainless steel(LDSS) 2002 was investigated through the potentiostatic critical pitting temperature(CPT) tests and the Charpy impact tests. Both the pitting corrosion resistance and the toughness of aged specimens degraded due to the precipitation of detrimental secondary phases and the most significant reduction of CPT and impact energy emerged at 650 °C concurrently. The CPT of LDSS 2002 specimen aged at 650 °C decreased by 28 °C, and the impact energy dropped from 69 to 29 J/cm~2 compared with the solution-annealed sample. Transmission electron microscopy characterization showed that the main precipitates in LDSS 2002 were Cr_2N and M_(23)C_6 along the ferrite–austenite grain boundaries.  相似文献   

20.
正The Transactions of Nonferrous Metals Society of China,founded in 1991 and sponsored by The Nonferrous Metals Society of China,is published monthly now and mainly contains reports of original research which reflect the new progresses in the field of nonferrous metals science and technology,including mineral processing,extraction metallurgy,metallic materials and heat treatments,metal working,physical metallurgy,powder metallurgy,with the emphasis  相似文献   

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