Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate

This paper presents the design, fabrication, and characterization of a new type of standing wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or cymbal, to convert the contour mode vibrations of a square piezoelectric ceramic plate into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic-fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted, and the geometry was varied to include different material thicknesses, fin lengths, and inclinations. The best stall torque and no load speed for a 25-mm square motor were 0.72 Nmm and 895 r/minute, respectively. The behavior of the stator structure was analyzed by ANSYS finite element software using harmonic and modal analyses. The vibration mode estimated by finite element modeling (FEM) was confirmed by laser Doppler vibration measurements.     

Travelling wave ultrasonic motor using the B08 flexural mode of a circular membrane

This paper describes the design, construction, and performance of a piezoelectric motor that uses the travelling B₀₈ mode of an 80-mm diameter circular membrane to drive a rotor by frictional contact. The motor is of a thin planar design, giving high torque of up to 0.33 Nm at low speed and has been developed as a design that can be made with lithographic techniques for miniaturization. Investigations of the free stator with a vibration pattern imager and impedance analyser gave the resonance frequency, mode, and electromechanical coupling of the stator. Motor speed as a function of frequency for a constant voltage and performance charts of speed, output power, and efficiency against torque are presented for a particular input voltage and rotor pre-load. The effects of two different lead zirconate titanate (PZT) ring dimensions have been investigated. Excitation of the B₀₉ mode has been observed, incommensurate with the piezoelectric excitation of the stator. This is discussed with relation to edge-clamping of the stator. Single standing wave motoring was observed, believed to arise from asymmetry of the stator and its perturbation of the B₀₈ resonance mode. Sources of power loss, including frame vibration and friction interface slip, are considered and discussed     

Stator design of a new type of spherical piezoelectric motor

The stator design of a new type of spherical motor driven by piezoelectric actuators is developed. A curved piezoelectric actuator is designed to attach to the spherical surface. A series of the curved piezoelectric actuators is laid in a line around a spherical surface. By applying an appropriate voltage signal with phase difference on neighboring actuators, a traveling wave is generated on the hemispherical shell. Each set of curved piezoelectric actuators is designed to provide motion with a single degree-of-freedom (DOF). With two or three sets of the piezoelectric actuators constructed to be mutually perpendicular, the motor can provide 2-DOF or 3-DOF motion. Stator design and analysis and experiment for the 1-, 2-, and 3-DOF conditions are presented in this article. Analytical calculation and experiment results of several fundamental characteristics of the stator are in good agreement. Performance evaluation of rotation speed and torque of the stator and some implementation problems are also addressed.     

大力矩径向驻波型超声波电机有限元分析与实验研究

提出了一种大力矩径向驻波型超声波电机,在实现电机大力矩输出的同时保持结构紧凑的特点。首先设计并分析了电机的结构和工作原理,采用有限元法分析了电机定子的振动特性。接着制作了超声波电机样机,样机直径为32 mm。采用激光测振仪测量了定子的共振频率及径向振动的振幅,测量结果与理论分析结果相吻合。最后,搭建了电机输出特性测试平台,测量了电机在不同电压下的转矩-转速特性。实验测试结果显示,定子工作模态的共振频率为73.3 kHz,当施加的电压幅值为100 V、频率为74 kHz时,电机的空载转速为45 r/min,堵转力矩达到0.41 N·m。与其他同尺寸的超声波电机相比,所提出的径向驻波型超声波电机具有更大的堵转力矩。     

Modeling of a piezoelectric rotary ultrasonic motor

A piezoelectric rotary ultrasonic motor is modeled for the purpose of predicting, a priori, motor performance as a function of design parameters. The Rayleigh-Ritz assumed mode energy method is used to model the distributed piezoceramics and the traveling wave dynamics of the stator. Natural frequencies and modeshapes are obtained for a generally configured motor. Nonlinear normal and tangential interface forces between the rotor and stator are incorporated into the forcing function along with the linear piezoelectric forcing. Given the applied torque, applied axial loading, and piezo drive voltages as inputs to the model, general motor performance measures are obtained-namely speed, input power, output power, and efficiency. The approach presented here provides a general framework for modeling these motors as well as a design tool for optimizing prototypes with the added flexibility of allowing for a wide variety of geometries and materials     

Analysis of a disk-type piezoelectric ultrasonic motor using impedance matrices

The dynamic behavior and the performance characteristics of the disk-type traveling wave piezoelectric ultrasonic motors (USM) are analyzed using impedance matrices. The stator is divided into three coupled subsystems: an inner metal disk, a piezoelectric annular actuator with segmented electrodes, and an outer metal disk with teeth. The effects of both shear deformation and rotary inertia are taken into account in deriving an impedance matrix for the piezoelectric actuator. The impedance matrices for each subsystem then are combined into a global impedance matrix using continuity conditions at the interfaces. A comparison is made between the impedance matrix model and the three-dimensional finite element model of the piezoelectric stator, obtaining the resonance and antiresonance frequencies and the effective electromechanical coupling factors versus circumferential mode numbers. Using the calculated resonance frequency and the vibration modes for the stator and a brush model with the Coulomb friction for the stator and rotor contact, stall torque, and no-load speed versus excitation frequencies are calculated at different preloads. Performance characteristics such as speed-torque curve and the output efficiency of the USM also are estimated using the current impedance matrix and the contact model. The present impedance model can be shown to be very effective in the design of the USM.     

Piezoelectric micromotor using a metal-ceramic composite structure

This paper presents a new piezoelectric micromotor design, in which a uniformly electroded piezoelectric ring bonded to a metal ring is used as the stator. Four inward arms at the inner circumference of the metal ring transfer radial displacements into tangential displacements. The rotor ends in a truncated cone shape and touches the tips of the arms. A rotation takes place by exciting coupled modes of the stator element, such as a radial mode and a second bending mode of the arms. The behavior of the free stator was analyzed using the ATILA finite element software. Torque vs. speed relationship was measured from the transient speed change with a motor load. A starting torque of 17 muNm was obtained at 20 Vrms. The main features of this motor are low cost and easy assembly because of a simple structure and small number of components.     

A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (phi2.4 mm, L=10 mm stator transducer)

A micro ultrasonic motor using PZT (lead zirconate titanate) thin film has been improved by a single process hydrothermal method. The hydrothermal method is a unique method for depositing PZT thin film in a solution. An earlier reported hydrothermal method consisted of two linked processes. Our new method, however, has only a single process. Hence, less distribution of chemical components of the PZT film contributes to a higher efficiency of the stator transducer. The piezoelectric factor d(31) was -30 pC/N for this new method, which is six times larger than that of the previous method. The output torque of the micro ultrasonic motor fabricated by the single process hydrothermal method was measured. The output torque was 7.0 muNm, and the maximum revolution speed was 880 rpm at 15 Vp-p driving voltage.     

A 1.6-mm,metal tube ultrasonic motor

A miniaturized metal tube ultrasonic motor, the dimensions of which are 1.6 mm in diameter and 6 mm in length, was developed. Two flattened surfaces with 90 degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1.6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.     

An ultrasonic piezoelectric motor utilizing axial-torsional coupling in a pretwisted non-circular cross-sectioned prismatic beam

A rotary piezoelectric motor design with simple structural components and the potential for miniaturization using a pretwisted beam stator is demonstrated in this paper. The beam acts as a vibration converter to transform axial vibration input from a piezoelectric element into combined axial-torsional vibration. The axial vibration of the stator modulates the torsional friction forces transmitted to the rotor. Prototype stators measuring 6.5 x 6.5 x 67.5 mm were constructed using aluminum (2024-T6) twisted beams with rectangular cross-section and multilayer piezoelectric actuators. The stall torque and noload speed attained for a rectangular beam with an aspect ratio of 1.44 and pretwist helix angle of 17.7 degrees C were 0.17 mNm and 840 rpm with inputs of 184.4 kHz and 149 mW, respectively. Operation in both clockwise and counterclockwise directions was obtained by choosing either 70.37 or 184.4 kHz for the operating frequency. The effects of rotor preload and power input on motor performance were investigated experimentally. The results suggest that motor efficiency is higher at low power input, and that efficiency increases with preload to a maximum beyond which it begins to drop.     

A piezoelectric motor using two orthogonal bending modes of a hollow cylinder

This paper proposes a compact ultrasonic motor with low manufacturing costs, a simpler driving circuit, and scalability. The stator of the motor presented in this paper consists of a hollow metal cylinder, whose outside surface was flattened on two sides at 90 degrees to each other, on which two rectangular piezoelectric plates were bonded. Because the cylinder has a partially square/partially circular outside surface, the stator has two degenerated bending modes that are orthogonal to each other. A wobbling motion is generated on the cylinder when only one piezoelectric plate is excited at a frequency between the two orthogonal bending modes. A rod through a pair of ferrules was used as the rotor of this motor. The prototype motor, whose stator was 2.4 mm in diameter and 10 mm in length, operated at 69.5 kHz, was experimentally characterized, and a maximum torque of 1.8 mNm was obtained.     

Force transfer model and characteristics of hybrid transducer type ultrasonic motors

The characteristics of longitudinal-torsional hybrid transducer-type ultrasonic motors (HTUSM) are low speed and high torque. The discontinuous-surface-contact mode between the stator and the rotor is different from the many-point-contact mode of traveling wave motors, which is also an essential cause for high torque. Therefore, it is important to analyze its force transfer model between the rotor and the stator. In this paper, issues of using the method of equivalent circuit model are addressed. The relationships between the contact angle, preload, and physical parameters of frictional materials are given, according to the impulse conservation law axially. The equations describing output torque, amplitudes of longitudinal and torsional vibration, and parameters of the rotor are derived according to the principle that the work done by the load is equal to that by the driving force in one vibrating cycle. All factors that influence the mechanical characteristics are analyzed, and accuracy and suitability of the force transfer model are verified by comparison with the prototype motor. The formula for transfer efficiency on the stator/rotor interface is given, and the low-efficiency of this type motor is explained. The wide-working frequency range property of this type motor is shown with experimental results. Based on this study, the parameters of the rotor and preload are determined. The maximum torque of the prototype motor is up to 13.2 nm, and no-load speed of this type of motor is 12.5 rpm.     

Characteristics of a hybrid transducer-type ultrasonic motor

The hybrid transducer-type ultrasonic motor previously proposed by the authors (1989, 1991) uses two ultrasonic transducers to control the Lissajous figure at the contact surface of the stator. This motor is stable, even at low speed, and realizes a large output with a high efficiency due to the high controllability of the Lissajous figure. The experimental investigation of the characteristics of this hybrid transducer-type ultrasonic motor is presented. In addition, the maximum torque is roughly estimated by means of a simple model. The dependence of the diameter of the motor (transducer) on the maximum torque is discussed and demonstrated experimentally.     

新型箝位式压电电机的设计研究

针对传统箝位式压电电机在谐振态下工作时,方波振动的箝位部分结构设计复杂问题,提出一种新型箝位式压电电机。该电机箝位部分与驱动部分均由同频正弦电压驱动实现正弦振动,通过定子对动子的箝位接触,实现动子单向输出运动。相较于传统箝位式压电电机和超声电机,该电机的定子结构设计无需采用模态简并,结构设计难度降低。利用有限元仿真确定定、动子结构参数,制造样机并搭建实验平台。对箝位部分分别采用正弦波与方波做激励,再对驱动部分进行波形对比,表明正弦波亦能达到预期效果。实验结果表明:准静态时,激励电压频率为250Hz、电压峰峰值Vp-p为10V时,步进距离为0.5μm,步进速度0.13mm/s;谐振态时,激励电压频率为540Hz、电压峰峰值Vp-p为70V时,步进距离为32μm,步进速度16.9mm/s;该电机可兼顾低频高分辨率和高频高速输出以实现跨尺度工作。     

Hybrid transducer type ultrasonic motor

A type of ultrasonic motor whose stator is composed of a torsional vibrator and multilayered piezoelectric actuators is proposed and has been fabricated for trial. The stator is operated at the resonance frequency of the torsional vibration. The vibrator generates the mechanical output force and the actuators control the frictional force. The construction provides for arbitrary Lissajous's figures at the contacting surface and contributes to large mechanical output power with high efficiency and bidirectional motion. It also gives greater freedom of design. The prototype motor produced a maximum torque of 7 kg-cm and a maximum efficiency of 33%     

二自由度行波型超声波电机定子的数学模型与实验研究

二自由度行波型超声波电机是一种新型多自由度超声波电机。本文从二自由度行波型超声波电机的驱动机理和基本结构出发,就电机的结构实现、驱动球转子的最佳定子结构进行了分析,利用所建立的有限元模型进行定子振动的模态分析和共振频率计算,提出了外缘大倾角内缘线接触的行波定子。然后建立定子的接触模型,对其机械性能进行分析。测试结果表明,修正的数学模型更加符合电机的实际运行特性。所研制样机的球转子直径为45mm,定子直径为30mm,实现的堵转力矩为120mNm,空转转速12r/min。本文工作为多自由度行波型超声波电机的优化设计、性能提高奠定了基础。     

A piezoelectric motor using flexural vibration of a thin piezoelectric membrane

This paper describes a new implementation of a disk-type piezoelectric motor, whose stator is a commercial available piezomembrane composed of a nickel alloy disk to which a piezoceramic disk is bonded. The two disks are concentric, and the total thickness is very small. Ultrasonic motors are based on the concept of driving a rotor by mechanical vibration excited on a stator, via the piezoelectric effect. The rotor is in contact with the stator, and the driving force is the frictional force between rotor and stator. To transform the mechanical vibration of the stator in the rotor rotation, a traveling wave must be excited on the stator surface. The proposed motor can be regarded as a disk-type, single wavelength motor in which the traveling wave is due to the natural flexural vibration of the piezomembrane at low frequency. The behavior of the stator is analyzed both theoretically, by using the theory of isotropic and homogeneous vibrating plates, and by means of a commercial finite element computer code, finding a good agreement with the experimental results. The main features of the motor are very small thickness, appreciable torque, and high speed, obtained with low input power at low voltage; the intended application is to substitute the moving-coil in analogic instrumentation.     

Optimization of a piezoelectric linear motor in terms of the contact parameters

The contact kinetics of piezoelectric linear motors determines the operational characteristics like speed and torque or transmitted mechanical power and efficiency. Piezoelectric linear motors are driven by tangential stress in the interface between tip of shaking beam and slider. A good contact between the tip and slider is necessary for a reliable analysis of the motor, which is needed for the optimization of its performance. The piezoelectric linear motor was fabricated and the characteristics of the motor were investigated by external conditions such as tip shape with different curvatures and contact force between the tip and the slider. It was found in this investigation that the optimal curvature of the tip and the contact force are curvature of 1 and 10, respectively, for the high actuating speed, and curvature of 1 and 40 N, respectively, for the high actuating force. Finally, tip shape has an influence on the characteristics of linear motor.     

PZT thin film actuated elastic fin micromotor

A piezoelectric elastic fin micromotor based on a PbZr(0.53 )Ti(0.47)O(3) thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 muNm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%     

A high-power traveling wave ultrasonic motor

In the present work, a traveling wave ultrasonic motor (TWUSM) is proposed. It is composed of an annular-shaped stator and two cone-shaped rotors that are pressed in contact to the borders of the inner surface of the stator. A rotating traveling wave has been generated in the stator by using as vibration generators two bolted Langevin transducers (BLT) opportunely shifted in space and in time. The vibrational behavior of the stator as well as the traveling wave generation has been simulated with the finite-element method (FEM) software. A prototype of the motor has been manufactured and experimentally characterized. It exhibits a static torque of about 0.8 N x m and a maximum angular speed of about 300 rpm. Possible variations of the present design aimed to increase output torque or minimize encumbrance are described and discussed.