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钢渗铬层上金刚石薄膜的表面、界面结构及附着性 总被引:1,自引:0,他引:1
在钢渗铬层表面用化学气相沉积(CVD))法制备了金刚石薄膜.使用扫描电镜(SEM)、透射电镜(TEM)和压痕法研究了金刚石膜的表面、界面结构及附着力.用拉曼光谱分析了金刚石膜的纯度及非金刚石碳相.甲烷含量超过0.6%(体积分数)后,金刚石膜为球形纳米晶,形核密度>107cm-2.用甲烷含量为0.6%(体积分数)沉积的金刚石膜表面的残余压应力为1.22 Gpa,而膜背面的残余压应力更高,达2.61 Gpa.压痕显示在19.6 N载荷下膜发生开裂.TEM观察发现,膜/基界面为微观非平面,有利于提高金刚石膜的附着力. 相似文献
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摩擦条件对掺钨DLC膜摩擦磨损性能的影响 总被引:2,自引:1,他引:1
本研究利用SEM、AES、XRD、Raman谱仪、纳米压痕仪、划痕仪和球-盘磨损实验机对掺钨DLC膜的微观结构和摩擦学性能进行了研究,结果表明:掺钨DLC膜光滑致密,具有纳米晶碳化钨和非晶碳组成的复相结构;其硬度和弹性模量为19-23GPa和200-228GPa,膜/基结合力好;摩擦系数随着载荷的增加略有增加,转速对摩擦系数的影响较小;当载荷大于1.96N时,磨损率随着载荷增加急剧增大,磨损率随着转速的增加存在一个极小值;DLC膜的磨损主要是由基体塑性变形引起的梯度掺钨DLC膜内部不同亚层之间的剥离和DLC膜的断裂引起的。 相似文献
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通过合理的合成路线与微观结构设计,开发具有高比容量和柔性的钠离子电池负极材料,是当前的难点。采用静电纺丝制备自支撑碳纳米纤维膜,利用不同浓度的硼酸铵溶液对纤维膜进行改性,研究了浸渍溶液浓度和热处理温度对碳纳米纤维膜相组成、微观形貌及储钠性能的影响。结果表明:低浓度硼酸铵溶液改性并未改变纤维膜三维相互交错的空间结构,但纤维膜表面粗糙程度增加,使改性后的碳纳米纤维缺陷和活性点位增多并减小了碳层间距。采用0.02mol/L硼酸铵溶液浸渍改性和600℃热处理后得到的碳纳米纤维膜作为钠离子电池自支撑负极时,可获得最优的储钠性能。在100mA/g电流密度下,该电池初始充比容量为354.7mAh/g,循环100周后电池的可逆充放电比容量为316.8mAh/g,表现出优异的储钠性能。 相似文献
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化学气相沉积制备纳米结构碳化钨薄膜 总被引:2,自引:0,他引:2
采用氟化钨(WF6)和甲烷(CH4)为前驱体,采用等离子体增强化学气相沉积(PECVD)方法制备具有纳米结构的碳化钨薄膜。采用SEM、XRD、EDS等方法表征了碳化钨薄膜的形貌、晶体结构和化学组成。通过表征,表明在前驱体混合气体中的甲烷与氟化钨气体的流量比(碳钨比)为20、基底温度为800℃的条件下得到的碳化钨薄膜是由直径为20~35nm的圆球状纳米晶构成。通过分析影响薄膜的晶体结构、化学组成的因素后,认为要得到具有纳米晶结构的碳化钨薄膜,主要应控制前驱体气体中的碳钨比以及基底温度。 相似文献
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Ti掺杂及Ti应力缓和层对类金刚石薄膜附着力的影响 总被引:4,自引:0,他引:4
研究了Ti掺杂对磁控溅射类金刚石(DLC)薄膜附着力及硬度的影响,同时在Ti掺杂类金刚石(Ti-DLC)薄膜的基础上,通过引入Ti应力缓和层制备了Ti/Ti-DLC/Ti/Ti-DLC……软硬交替多层薄膜,研究了Ti应力缓和层对进一步提高薄膜附着力特性的作用.采用纳米划痕仪和显微硬度计分析测试了薄膜的附着力和硬度.研究表明,金属Ti的掺杂有利于DLC薄膜附着力特性的改善,但对硬度有一定的影响.Ti应力缓和层的导入进一步改善了Ti-DLC薄膜的附着力特性,使其达到或超过了TiN薄膜的水平,对于附着力的改善Ti应力缓和层存在最佳的厚度值.采用特殊的变周期多层结构设计即在应力集中的膜基界面附近采用较小的调制周期,薄膜项层附近采用较大的调制周期不但可以保持足够的附着力,还可维持Ti-DLC薄膜原有的硬度. 相似文献
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Hidetoshi Saitoh Shoichi Ozeki Ryoichi Urao 《Materials and Manufacturing Processes》1995,10(2):143-150
Diamond films were prepared on various substrates by a combustion flame technique using an oxyacetylene torch. During the deposition, a carbide interlayer was formed between the surface of the substrate and deposited diamond. The hard interlayers were seen on the molybdenum, tungsten as well as silicon substrates. The adhesion of diamond on the molybdenum substrate was improved with increase in the hardness of the carbide layer. This result strongly supports the premise that the carbide interlayer and/or carbon diffused layer enhances the adhesion of diamond to substrates. 相似文献
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The poor adhesion of diamond film to substrates is one of the major problems for practical use in a cutting tool (1-4). in this study, sintered tungsten carbide (WC) body without Co metal, not cemented carbide, was used as the substrate (5), and the effects of surface decarburization of the substrate for improvement in the adhesion of diamond films were investigated. The surface decarburization and diamond coating were carried out in a microwave plasma CVD system. From the results of several adhesion tests, including the cutting tests, it is concluded that the good adhesion is obtained by surface decarburization of the substrate before diamond coating. The reasons for improvement in adhesion are considered by observing the interface structure between the film and the substrate. The damage mechanism of diamond coating on cutting an AI-18%Si alloy with increasing cutting speed is also discussed. 相似文献
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等离子体刻蚀处理对金刚石膜粘附性能的影响 总被引:2,自引:0,他引:2
采用直流等离子体射流CVD法在YG8质合金基体上成功地合成了多晶金刚薄膜。通常基体表面经金刚石磨盘研磨、稀硝酸化学侵蚀脱钴预处理后,沉积的金刚石薄膜的的粘附性能仍不理想。本文首次采用原位的Ar-H2等离子体射流对基体表面进行适当的轰击、刻蚀处理,显著粗化了基体表面,并使基体表面显微组织和化学成分发生重大变化,并且在合适的沉积工艺条件下,沉积的金刚石膜的粘附性能显著提高。借助XRD、SEEM、TEM 相似文献
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Guillemet T Xie ZQ Zhou YS Park JB Veillere A Xiong W Heintz JM Silvain JF Chandra N Lu YF 《ACS applied materials & interfaces》2011,3(10):4120-4125
Diamond films were deposited on silicon and tungsten carbide substrates in open air through laser-assisted combustion synthesis. Laser-induced resonant excitation of ethylene molecules was achieved in the combustion process to promote diamond growth rate. In addition to microstructure study by scanning electron microscopy, Raman spectroscopy was used to analyze the phase purity and residual stress of the diamond films. High-purity diamond films were obtained through laser-assisted combustion synthesis. The levels of residual stress were in agreement with corresponding thermal expansion coefficients of diamond, silicon, and tungsten carbide. Diamond-film purity increases while residual stress decreases with an increasing film thickness. Diamond films deposited on silicon substrates exhibit higher purity and lower residual stress than those deposited on tungsten carbide substrates. 相似文献
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Riccardo Polini 《Thin solid films》2006,515(1):4-13
Chemical vapour deposition (CVD) of diamond films onto Co-cemented tungsten carbide (WC-Co) tools and wear parts presents several problems due to interfacial graphitization induced by the binder phase and thermal expansion mismatch of diamond and WC-Co. Methods used to improve diamond film adhesion include substrate-modification processes that create a three-dimensional compositionally graded interface. This paper reviews substrate pretreatments and adhesion issues of chemically vapour deposited diamond films on WC-Co. The combined effect of pretreatments and substrate microstructure on the adhesive toughness and wear rate of CVD diamond in dry machining of highly abrasive materials was analyzed. The role of diamond film surface morphology on chip evacuation in dry milling of ceramics was also investigated by comparing feed forces of coated and uncoated mills. The overall tribological performance of diamond coated mills depended on coating microstructure and smoothness. The use of smother films did allow to reduce cutting forces by facilitating chip evacuation. 相似文献
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Veillère A Guillemet T Xie ZQ Zuhlke CA Alexander DR Silvain JF Heintz JM Chandra N Lu YF 《ACS applied materials & interfaces》2011,3(4):1134-1139
The quality of diamond films deposited on cemented tungsten carbide substrates (WC-Co) is limited by the presence of the cobalt binder. The cobalt in the WC-Co substrates enhances the formation of nondiamond carbon on the substrate surface, resulting in a poor film adhesion and a low diamond quality. In this study, we investigated pretreatments of WC-Co substrates in three different approaches, namely, chemical etching, laser etching, and laser etching followed by acid treatment. The laser produces a periodic surface pattern, thus increasing the roughness and releasing the stress at the interfaces between the substrate and the grown diamond film. Effects of these pretreatments have been analyzed in terms of microstructure and cobalt content. Raman spectroscopy was conducted to characterize both the diamond quality and compressive residual stress in the films. 相似文献
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Adhesion improvement of diamond films on cemented carbides with copper implant layer 总被引:3,自引:0,他引:3
The deposition of diamond films on cemented carbides is strongly influenced by the catalytic effect of cobalt under typical deposition conditions. Decreasing the content of Co on the surface of the cemented carbide is often used for the diamond film deposition. But the leaching of Co from the WC-Co substrate leads to a mechanical weak surface, often causing poor adhesion. In this paper we adopt a copper implant layer to improve the mechanical properties of the Co leached substrate. The copper implant layer is prepared with vaporization. The diamond films are grown by microwave plasma chemical vapor deposition from the CH4/H2 gas mixture. The morphology and the quality of the diamond films have been characterized by scanning electron microscopy and Raman spectroscopy. A Rockwell apparatus has evaluated the adhesion of the diamond on the substrate. The results indicate that the diamond films have good adhesion to the cemented carbide substrate due to the recovery of the mechanical properties of the Co depleted substrate after the copper implantation and less graphite formation between the substrate and the diamond film. 相似文献
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The nature of stresses in hot-filament chemical vapour deposited diamond thin films on WC substrates
The nature of film stresses in hot-filament chemical vapour deposited (HFCVD) diamond thin films on tungsten carbide substrates, is reported. Commercial WC substrates were subjected to various surface treatments. Subsequently, they were coated with a diamond film and examined for stresses using X-ray diffraction. All but one of the stress measurements indicated various levels of compressive stresses in the film and at the film–substrate interface. These stresses are compared with those obtained by other researchers. Intrinsic film stresses were also computed for diamond films and found to be tensile. WC drills, of 0.125 in. diameter, were also diamond coated and the stress levels measured along drill flanks and flutes. Significant variations were found in these stresses, and the results were analysed from a film–substrate adhesion perspective. 相似文献
19.
Jackson MJ Sein H Ahmed W 《Journal of materials science. Materials in medicine》2004,15(12):1323-1331
Diamond coatings are attractive for cutting processes due to their high hardness, low friction coefficient, excellent wear resistance and chemical inertness. The application of diamond coatings on cemented tungsten carbide (WC-Co) burs has been the subject of much attention in recent years in order to improve cutting performance and tool life. WC-Co burs containing 6% Co and 94% WC with an average grain size 1–3 micron were used in this study. In order to improve the adhesion between diamond and the bur it is necessary to etch away the surface Co to prepare it for subsequent diamond growth. Hot filament chemical vapour deposition (H.F.C.V.D.) with a modified vertical filament arrangement has been employed for the deposition of diamond films. Diamond film quality and purity has been characterised using scanning electron microscopy (S.E.M.) and micro-Raman spectroscopy. The performance of diamond coated WC-Co burs, uncoated WC-Co burs, and diamond embedded (sintered) burs have been compared by drilling a series of holes into various materials such as human teeth, and model tooth materials such as borosilicate glass and acrylic. Flank wear has been used to assess the wear rates of the burs when machining natural and synthetic dental materials such as those described above. 相似文献
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S. N. Nazarchuk A. A. Bochechka V. S. Gavrilova L. A. Romanko N. N. Belyavina L. I. Aleksandrova V. N. Tkach E. F. Kuz’menko S. D. Zabolotnyi 《Journal of Superhard Materials》2011,33(1):1-12
The sintering of a diamond composite from diamond and tungsten powders of submicron and nanosizes at high pressure and temperature
has been discussed. It has been shown that as a result of the diamond and tungsten interaction tungsten carbide particles,
which are chemically bonded to diamond particles, form in spaces between them. Over the whole volume of the composite the
structure has been observed, where tungsten carbide and diamond grains are regularly placed and are uniform in size. An addition
of a coarse diamond component to the composite has been found to contribute to an increase of the composite wear resistance.
The optimal sintering parameters and formulation of this composite have been defined. 相似文献