单相斜轨塔形直线超声电机设计与实验

对一种理论斜直线运动轨迹的单相驱动双向运动的直线超声电机进行了理论及实验研究.该电机由塔形定子和倾斜一定角度安装的导轨组成,定子的两个正交工作模态为y-z面内对称振动模态和x-z面内弯振模态,分别对应电机的正反运动方向,利用在工作模态下定子驱动足表面质点相对于导轨的理论斜直线运动来驱动导轨运动.分析了电机的工作原理,推导了电机运行的导轨倾角范围,研制了样机,并进行了模态实验和机械特性实验.实验表明:在导轨倾斜角为35°、激励电压500 Vp-p、预压力4.5 N下,当电机工作在y-z面内对称振动模态,电机正向运动,最大空载速度为79 mm/s,最大输出力为0.5 N;当电机工作在x-z面内弯振模态,电机反向运动,最大空载速度为756 mm/s,最大输出力0.8 N.     

双足型直线超声电机的结构及实验

研制了一种新型直线超声电机，首先对其驱动机理进行探讨，设计电机的具体结构，其次对定子进行频率响应实验，模态实验，实验显示电机可有效激励出所需振型，正反向运动灵活，电机的工作频率42550Hz；最大无负载速度可达76mm／s，最大输出推力2N。     

基于弯曲模态的板形直线超声电机结构设计

板形直线超声电机因具有扁平化结构等特点,特别适用于电机安置空间狭窄的直线驱动场合。针对狭窄空间作动需求,提出一种单模态、大推力直线超声电机。电机由导轨和板形定子组成,定子由平面内两个垂直放置的矩形板联接构成L形结构,驱动足位于联接部顶端。电机利用两矩形板弯曲振动所形成的对称和反对称模态驱动导轨运动,并通过切换对称和反对称模态实现导轨正反向运动。通过定子模态分析,研究结构参数对振型的影响,以确定夹持和压电陶瓷片的安置位置;针对对称模态下驱动足处振幅过小问题,分析前端盖开槽对驱动足处振幅的影响规律,并通过开圆弧形槽增加驱动足处振幅。制作样机,并开展实验研究。实验表明:该电机结构简单紧凑、运行稳定且推力大,最大空载速度为329 mm/s,最大推力为70 N,推重比达38. 2。     

利用弯曲模态的惯性直线超声电机结构设计

针对惯性直线超声电机输出力小、结构不稳定的问题,通过改进其结构的振动方式,提高其输出力和结构稳定性。提出了一种新的结构惯性直线超声电机,该电机采用矩形板结构,利用其弯曲振动;分析该电机的工作原理,并利用了ANSYS workbench对定子的结构振动仿真分析,设计和制作了惯性直线超声电机。样机的实验表明:它有较宽的工作频率,运行稳定;在工作频率为23.6 k Hz时,最大运行速度为197 mm/s;在工作频率为23.2 k Hz时,最大推力为7.3N,惯性直线超声电机的驱动方向会在某一频率点突变。     

微量注射泵用直线超声电机的结构设计

改进了一种螺纹杆直线超声电机,并用于驱动微量注射泵。螺纹杆直线超声电机具有体积小、精度高、推力足、无磁干扰等特点。为了满足微量注射泵推力要求,针对螺纹杆直线超声电机不能施加预压力问题,提出了一种可施加预压力的螺纹杆直线超声电机。该直线超声电机包括底座、柱状定子、分体式螺纹杆动子。动子由动子主轴、套筒、预压力施加装置组成。当预压力调至33.9 N时,电机达到最大堵推力21 N,此时空载最大速度为4.5 mm/s。并设计了一款微量注射泵,该微量注射泵结构简单、抗磁干扰,分辨率达到nl级别,满足各种微量药物注射要求。     

十字形压电振子同型模态振动驱动的平面电机

提出十字形压电振子同型模态驱动的压电平面电机新原理,选定该振子的面外弯振、面内横杆弯振、面内纵杆弯振为工作模态,利用面外弯振分别与面内纵杆弯振、面内横杆弯振的振动耦合,在纵、横杆驱动足上生成沿x Oz、y Oz面行进的椭圆轨迹以推动动子沿x、y向移动。阐明电机驱动原理,优化出振子尺寸为60 mm×60 mm×7.8mm,厘定电机最适驱动频率为30 127 Hz。建立振子机电耦合模型,研究驱动足的振动特性,模拟出驱动足的椭圆轨迹,仿真得到在250 V电压激励时驱动足的x、y、z向振幅分别为1.6μm、1.6μm和1.2μm。建立电机的整机分析模型,探析驱动电压、频率、相位差、预紧力对电机速度的影响。在正常驱动条件下,电机速度可达50 mm/s。该电机在平面装置驱动中的应用前景广泛。     

新型多自由度圆环形驻波超声电机

提出了一款新型多自由度圆环形驻波超声电机,该电机由一个球形转子和圆环形定子构成,利用二阶面内振动模态工作,可以实现三个方向的旋转运动。文中详细分析了该电机的运动机理,并根据有限元设计结果,研制了一台原理型样机。样机定子的外形尺寸为25.7mm×25.6mm×5mm,驱动频率为26.76kHz,绕三个方向的转速分别为：12r/min、10 r/min、12r/min。该款电机具有体积小、结构简单紧凑、无需考虑复合模态多自由度电机不同工作模态频率一致性的问题等特点,有望用于小型机器人、机器人眼球、机器手、机构姿态调节等驱动上。     

U型变截面薄板面内复合模态驱动的直线超声电机

提出一种U型变截面薄板结构驱动的压电直线超声电机,选定U板两纵杆的一阶反对称纵振和二阶对称弯振为工作模态。阐释了电机驱动机理,推导了定子驱动端椭圆运动轨迹;基于纵、弯工作模态频率一致性模型,优化了电机结构尺寸;通过谐响应分析及激光测振试验,证实了定子工作模态的存在及其纯正性;设计出电机装配结构,制作出其原型样机;构建电机驱动控制平台,驱动电机运转,验证电机原理的可行性。通过速度特性试验发现:当驱动频率为78.11 kHz且电压幅值为240 V时,电机最大运动速度可达125.6 mm/s。     

利用音叉共鸣结构的大振幅双足压电直线电机

本文提出了一种根据人类行走姿态加以抽象的新型双足压电直线电机。音叉共鸣结构的引入使得驱动足可以产生大振幅,而且提高了压电换能效率,低电压即可驱动。驱动足实现大振幅的意义在于大大降低了对于导轨的要求,木轨、塑料轨等首次成为压电超声波电机的驱动导轨。本文建立了该电机简化的动力学模型,分析了定子拓扑结构、配重等设计参数对于输出机械性能的影响,给出了设计准则。通过实验测出了该电机的输出特性,最高输出速度为210mm/s,最大输出力为0. 5N。     

新型箝位式压电电机的设计研究

针对传统箝位式压电电机在谐振态下工作时,方波振动的箝位部分结构设计复杂问题,提出一种新型箝位式压电电机。该电机箝位部分与驱动部分均由同频正弦电压驱动实现正弦振动,通过定子对动子的箝位接触,实现动子单向输出运动。相较于传统箝位式压电电机和超声电机,该电机的定子结构设计无需采用模态简并,结构设计难度降低。利用有限元仿真确定定、动子结构参数,制造样机并搭建实验平台。对箝位部分分别采用正弦波与方波做激励,再对驱动部分进行波形对比,表明正弦波亦能达到预期效果。实验结果表明:准静态时,激励电压频率为250Hz、电压峰峰值Vp-p为10V时,步进距离为0.5μm,步进速度0.13mm/s;谐振态时,激励电压频率为540Hz、电压峰峰值Vp-p为70V时,步进距离为32μm,步进速度16.9mm/s;该电机可兼顾低频高分辨率和高频高速输出以实现跨尺度工作。     

A novel synchronous permanent magnet planar motor and its model for control applications

A novel synchronous permanent magnet planar motor (SPMPM) with iron core is proposed. It has higher continuous force compared to the coreless SPMPM. In the novel SPMPM, two sets of windings for generating x-direction thrust and y-direction thrust are perpendicularly fixed in the x-direction slots and y-direction slots of a mover core, respectively. For control system development applications, an electromagnetic model is derived and the analytical method for calculating the model parameters is also reported. The model describes an important characteristic of the novel SPMPM that the x-direction thrust and y-direction thrust are independent of each other. To verify the model and the parameter calculation method, the finite element method (FEM) is used for calculating the phase inductances and electromagnetic forces of an example SPMPM. The results from FEM are in good agreement with the results from the analytical equations. It demonstrates the feasibility and credibility of the proposed model and parameter calculation method to a certain extent.     

Flextensional ultrasonic piezoelectric micro-motor

This paper presents the experimental design, construction, and operational characteristics of a new type of standing wave piezoelectric ultrasonic micro-motor. The motor uses a composite stator, consisting of a metallic flex-tensional mode converter, or "cymbal", bonded to a 2-mm-square piezoelectric plate. The cymbal converts contour-mode vibrations of the plate into oscillations in the cymbal, perpendicular to the stator plane. These are further converted into rotational movement in a rotor pressed against the cymbal by means of an elastic-fin friction drive to produce the required rotary actuation. The motor operates on a single-phase electrical supply, and direct control of the output speed and torque can be achieved by adjusting the amplitude and frequency of the supply voltage. Noncontact optical techniques were used to assess the performance of the developed micro-motor. The operational characteristics were developed from the acceleration and deceleration characteristics. No-load output speed (11 rev s(-1)) and stall torque (27 nNm) were derived using high-speed imaging and image analysis. Maximum efficiency was 0.6%.     

Elastic contact conditions to optimize friction drive of surface acoustic wave motor

The optimum pressing force, namely the preload, for a slider to obtain superior operation conditions in a surface acoustic wave motor have been examined. We used steel balls as sliders. The preload was controlled using a permanent magnet. The steel balls were 0.5, 1, and 2 mm diameter, with the differences in diameter making it possible to change contact conditions, such as the contact pressure, contact area, and deformation of the stator and the slider. The stator transducer was lithium niobate, 128 degrees rotated, y-cut x-propagation substrate. The driving frequency of the Rayleigh wave was about 10 MHz. Hence, the particle vibration amplitude at the surface is as small as 10 nm. For superior friction drive conditions, a high contact pressure was required. For example, in the case of the 1 mm diameter steel ball at the sinusoidal driving voltage of 180 V(peak), the slider speed was 43 cm/sec, the thrust output force was 1 mN, and the acceleration was 23 times as large as the gravitational acceleration at a contact pressure of 390 MPa. From the Hertz theory of contact stress, the contact area radius was only 3 mum. The estimation of the friction drive performance was carried out from the transient traveling distance of the slider in a 3 msec burst drive. As a result, the deformation of the stator and the slider by the preload should be half of the vibration amplitude. This condition was independent of the ball diameter and the vibration amplitude. The output thrust per square millimeter was 50 N, and the maximum speed was 0.7 m/sec. From these results, we conclude that it is possible for the surface acoustic wave motor to have a large output force, high speed, quick response, long traveling distance, and a thin micro linear actuator.     

Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate

This paper presents the design, fabrication, and characterization of a new type of standing wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or cymbal, to convert the contour mode vibrations of a square piezoelectric ceramic plate into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic-fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted, and the geometry was varied to include different material thicknesses, fin lengths, and inclinations. The best stall torque and no load speed for a 25-mm square motor were 0.72 Nmm and 895 r/minute, respectively. The behavior of the stator structure was analyzed by ANSYS finite element software using harmonic and modal analyses. The vibration mode estimated by finite element modeling (FEM) was confirmed by laser Doppler vibration measurements.     

二自由度行波型超声波电机定子的数学模型与实验研究

二自由度行波型超声波电机是一种新型多自由度超声波电机。本文从二自由度行波型超声波电机的驱动机理和基本结构出发,就电机的结构实现、驱动球转子的最佳定子结构进行了分析,利用所建立的有限元模型进行定子振动的模态分析和共振频率计算,提出了外缘大倾角内缘线接触的行波定子。然后建立定子的接触模型,对其机械性能进行分析。测试结果表明,修正的数学模型更加符合电机的实际运行特性。所研制样机的球转子直径为45mm,定子直径为30mm,实现的堵转力矩为120mNm,空转转速12r/min。本文工作为多自由度行波型超声波电机的优化设计、性能提高奠定了基础。     

A high-power traveling wave ultrasonic motor

In the present work, a traveling wave ultrasonic motor (TWUSM) is proposed. It is composed of an annular-shaped stator and two cone-shaped rotors that are pressed in contact to the borders of the inner surface of the stator. A rotating traveling wave has been generated in the stator by using as vibration generators two bolted Langevin transducers (BLT) opportunely shifted in space and in time. The vibrational behavior of the stator as well as the traveling wave generation has been simulated with the finite-element method (FEM) software. A prototype of the motor has been manufactured and experimentally characterized. It exhibits a static torque of about 0.8 N x m and a maximum angular speed of about 300 rpm. Possible variations of the present design aimed to increase output torque or minimize encumbrance are described and discussed.     

An ultrasonic motor driven by the phase-velocity difference between two traveling waves

This paper presents a new ultrasonic motor in which the rotor rotation speed is locked by the phase-velocity difference between the two traveling waves propagating on the stator and the rotor. First, the unique construction to excite two traveling waves both in the stator and the rotor is described. Then, the operation principle of the present motor is revealed by our careful experiments. Dynamics of the two traveling waves are measured by an in-plane laser Doppler vibrometer under various conditions, as well as the motor performances. Our experiments show that the rotation speed of the motor is equal to the phase-velocity difference between the two traveling waves on the contact surfaces of rotor and stator. It is confirmed that the rotor rotates so as to cancel the phase-velocity difference between the traveling vibrations along the circumferences of the rotor and stator. If the load does not exceed the maximum torque that is determined by the vibration amplitude, the rotation speed is subject only to the phase-velocity difference.     

Design and implementation of spherical ultrasonic motor

We present a mechanical design and implementation of spherical ultrasonic motor (SUSM) that is an actuator with multiple rotational degrees of freedom (multi-DOF). The motor is constructed of 3 annular stators and a spherical rotor and is much smaller and simpler than conventional multi-DOF mechanisms such as gimbals using servomotors. We designed a novel SUSM using experimental data from a single annular stator and a finite element method. The SUSM using a spherical rotor of diameter 20 mm without any reduction gear has demonstrated advantages of high responsiveness, good accuracy, and high torque at low speed. The dynamic implementation of SUSM was consistent with the driving model of SUSM based on a friction drive.