MOD--一种媲美Sol-gel的薄膜制备方法

分别从热力学过程、化学过程、工艺过程3个方面综述了MOD(金属有机物热分解)成膜方法,重点论述了MOD成膜的推动力和热处理工艺中薄膜结晶状态的改变.在此基础上对薄膜的性能进行了控制和优化.关注了MOD成膜法的最新进展,包括BT和PZT纳米线的制备、PT纳米点的制备,并对MOD与Sol-gel进行了系统性的比较.     

Si（111）衬底上沉积LaNiO3薄膜的取向控制和导电性能研究

通过金属有机物沉积的方法在Si（111）衬底上成功制备出了高度（100）和（110）取向的LaNiO3薄膜。研究了不同热处理过程、薄膜厚度、前驱体溶液对LaNiO3取向的影响,以及厚度热处理温度、（100）方向的取向度与薄膜方阻之间的关系。LaNiO3薄膜的相结构由XRD（X射线衍射）分析,薄膜的晶粒大小和表面粗糙度由AFM（原子力显微镜）分析。     

溶胶-凝胶法制备ZnO:Al(ZAO)薄膜的红外发射率研究

用溶胶-凝胶法在石英玻璃基底上制备了ZnO:Al(ZAO)薄膜,研究了热处理温度和Al掺杂含量对薄膜红外发射率的影响.通过XRD和SEM分析了薄膜的微观结构和表面形貌,用光谱辐射计测量了薄膜在8～14μm波段的光谱发射率.结果表明,制备的ZAO薄膜都具有ZnO六角形纤锌矿结构,没有生成杂质相.热处理温度是影响薄膜在8～14μm波段平均红外发射率(ε)的主要因素.随热处理温度的升高和Al掺杂含量的增加,薄膜的ε值有降低的趋势.     

制备条件对电致变色氧化镍薄膜特性的影响

在充氧气的真空室内,用电子束蒸发ＮｉＯ粉末颗粒的方法分别以０．１和０．８ｎｍ／ｓ的沉积速率制备了氧化镍薄膜,并在不同的环境中对薄膜进行热处理。研究了薄膜结构和电致变以特性与沉积速率的关系,发现以较慢和较快速率沉积的薄膜分别具有ＮｉＯ晶粒的（２００）和（１１１）不同择优取向,前致色范围较小,后致色范围较大。还研究了热自理对薄膜的结构、动态致色范围、致色效率,以及红外光谱特性的影响,发现热处理对薄     

还原热处理对石墨烯薄膜导电性的影响

用改进的Hummers法制备了氧化石墨,通过超声、沉聚和自组装等工序制得氧化石墨烯薄膜,真空热处理后获得石墨烯薄膜.利用X射线晶体衍射(XRD)、扫描电子显微镜(SEM)、傅里叶变换红外(FT-IR)和拉曼(Raman)光谱等研究了石墨烯薄膜制备过程中各阶段产物的微观特征变化.结果表明,自组装方法制备氧化石墨烯薄膜简单易行,厚度尺寸可控,微观层状结构良好.热处理使石墨烯薄膜具有导电性,随温度升高导电率不断提高,在1 100℃时可达到536 S/cm.     

PLZT铁电薄膜的物理特性研究

铁电薄膜是近几年人们关注的功能材料。本文对用溶胶－凝胶技术制备的ＰＬＺＴ铁电薄膜从热处理工艺、Ｘ射线结构分析、ＦＴ－ＩＲ红外光谱等各个方面作了较为系统的研究。讨论了ＰＬＺＴ铁电薄膜的热处理工艺条件,结构特性、光谱特性与材料的表观裂纹、晶态与非晶态之间的关系。对红外光谱的特征吸收峰作了指认,得到了一系列有意义的结果。     

环境友好半导体β-FeSi2薄膜的制备方法研究

分析了制备和热处理过程中薄膜沉积方法和沉积条件、沉积速率、薄膜厚度、热处理方法和热处理条件等因素对β-FeSi2相的形成的影响,结果表明,影响β-FeSi2相形成的决定性因素是热处理的温度和时间,此外薄膜的沉积方法和薄膜厚度对β-FeSi2相也有重要的影响。     

氧化法热处理温度对氧化钒薄膜热敏特性的影响

采用直流磁控溅射法制备氧化钒薄膜,并采用不同的温度对其进行氧化法热处理,通过XRD、SEM、四探针薄膜电阻测试,分析了不同热处理温度对氧化钒薄膜的晶相特性与热敏特性的影响。实验分析证明热处理温度升高后(400℃)得到的薄膜热敏特性良好,其室温电阻为160KΩ·cm,室温电阻温度变化系数为-2.4%/℃,变温过程中(20~98℃)其平均值约-1.98%/℃,表明温度升高有利于改善薄膜热敏特性,在非制冷红外探测器应用方面具有发展潜力。     

溶胶－凝胶二氧化硅驻极体薄膜的物理化学改性

实验研究了由溶胶－凝胶法制备二氧化硅驻极体薄膜的工艺。用红外透射谱、扫描电子显微镜以及驻极体等温表面电位测量和热刺激放电等实验考察了热处理和化学表面修正两个关键工艺对溶胶－凝胶二氧化硅样品驻极体性能的影响。结果表明经过高温条件下一定时间的热处理和化学表面修正，可以制备出性能优良的驻极体薄膜     

溶胶—凝胶二氧化硅驻极体薄膜的物理化学改性

实验研究了由溶胶－凝胶法制备二氧化硅驻极体薄膜的工艺。用红外透射谱、扫描电子显微镜以及驻极体等温表面电位测量和热刺激放电等实验考察了热处理和化学表面修正两个关键工艺对溶胶－凝胶二氧化硅样品驻极体性能的影响。结果表明经过高温条件下一定时间的热处理和化学表面修正，可以制备出性能优良的驻极体薄膜。     

Synthesis and characterization of a novel precursor for thin films of zinc oxide by SSCVD

A novel solid organic zinc fountain as a precursor for thin films of zinc oxide by single source chemical vapour deposition (SSCVD) had been prepared through simple procedures. To synthesize the precursor, zinc oxide and acetic acid of the molar ratio 2:3 were used to react with ethanol as solution in this experiment. The reaction products as the precursor obtained after reflux of the mixture solution were characterized by Fourier transform infrared spectroscopy analysis and thermogravimetric analysis, and the thin films on silicon substrate by SSCVD using the precursor were investigated by X-ray photoelectron spectroscopy analysis. All these provide evidence that the precursor has volatility and thermolysis properties suitable for SSCVD of ZnO thin films. It is interesting to note that the films are found to have a small amount of excess O, whereas ZnO films obtained by other techniques are often O deficient.     

水基金属有机物分解法制备Ba0.5Sr0.5TiO3薄膜的研究

制备了水基Ｂａ＾２＋、Ｓｒ＾２＋、Ｔｉ＾４＋三元有机物溶液。根据红外光 谱测定及对比实验分析了溶液配制过程中化学反应机理。采用金属有机物分解法（ＭＯＤ）制备Ｂａ０．５Ｓｒ０．５ＴｉＯ３（ＢＳＴ）薄膜。通过ＸＲＤ、ＳＥ趱 阻抗分析仪等分析测试手段,薄膜的相结构、微观形态及电性能。结果表明,所制备ＢＳＴ薄 数矿晶相结构,结晶完整晶粒小（１０－５０ｎｍ）,显微结构均匀致密,并具有良好的电性能（电容密度为     

An in-situ chemical reaction deposition of nanosized wurtzite CdS thin films

Nanocrystalline CdS thin films were deposited on glass substrates by an ammonia-free in-situ chemical reaction synthesis technique using cadmium cationic precursor solid films as reaction source and sodium sulfide based solutions as anionic reaction medium. Effects of ethanolamine addition to the cadmium cationic precursor solid films, deposition cycle numbers and annealing treatments in Ar atmosphere on structure, morphology, chemical composition and optical properties of the resultant films were investigated by X-ray diffraction, field emission scanning electron microscope, energy dispersive X-ray analysis and UV-Vis spectra measurements. The results show that CdS thin films deposited by the in-situ chemical reaction synthesis have wurtzite structure with (002) plane preferential orientation and crystallite size is in the range of 16 nm-19 nm. The growth of film thickness is almost constant with deposition cycle numbers and about 96 nm per cycle.     

Determination of optical and electrical properties of ZnSe thin films

A thin film of zinc selenide (ZnSe) was deposited onto a clean glass substrate using a vacuum evaporation technique. This thin film was characterized through X-ray diffraction, which indicated that the film was polycrystalline in nature. Absorption and transmission spectra of this thin film were recorded using a spectrophotometer. The energy band gap, refractive index and extinction coefficient were determined using these spectra. It was found that the energy band gap of ZnSe film was 2.55 eV. It was also observed that the refractive index and extinction coefficient of the film decreased with the increase of wavelength. The conductivity of this thin film was determined by current–voltage measurement using an electrometer over the temperature range from room temperature to 413 K. It was observed that conductivity increased with increase in temperature. This is explained on the basis of structural changes occurring due to the change in grain size and the increase in carrier density.     

High luminescence quantum efficiency of green mesophase silicate thin film incorporated with rare earth complex

Mesophase silica thin film doped with in-situ formed binary terbium (Tb) complex was synthesized through a simple one-step evaporation-induced self-assembly method. In this process, the precursors of rare earth complex and surfactant were added into hydrolyzed tetramethoxy-silane (TMOS) together and the inorganic/organic mesophase thin film was formed after spin coating. The mesophase structure was characterized as a 2D-hexagonal structure by X-ray diffraction (XRD) analysis. The excitation spectra (λ_em = 544 nm) and emission spectra (λ_ex = 315 nm) indicated that the binary complex, Tb(SA)₃, formed in-situ during the formation of the film. Under the UV excitation, the mesophase silica thin film showed bright and consistent green luminescence. The luminescence quantum efficiency of the hybrid thin film was confirmed to be 35.2%.     

共升华可控掺杂有机半导体薄膜材料的研究进展

综述了共升华可控掺杂有机半导体薄膜材料的特点、原理、材料体系、制备、光电性能以及表征手段,并简要介绍了其在光电器件中的应用,研究表明共升华可控掺杂是大幅度提高有机半导体材料性能的有效手段,并提出了设计和制备高性能共升华可控掺杂有机半导体薄膜材料的若干原则。     

Development of UV-visible multiple-angle incidence resolution spectrometry and application study of anisotropic surface plasmon excitation in a silver thin film on a glass substrate

Multiple-angle incidence resolution spectrometry (MAIRS) that was originally developed in an infrared region for analysis of molecular orientation in a thin film on a substrate has been extended to develop a novel UV-visible spectrometry. The new technique, named Vis-MAIRS, has been employed for analysis of anisotropic surface plasmon excitation in a silver thin film with a thickness of 5 nm deposited on a glass slide. The Vis-MAIRS spectra yield two spectra at a time, which correspond to absorption spectra whose transition moments are parallel and perpendicular to the film surface. The two spectra of the silver thin film were largely different from each other in shape, which strongly suggested that the silver nanoparticles in the thin film were in an ellipsoidal shape. In addition, absorption due to long-range surface plasmon propagation across the nanoparticles aligned parallel to the film surface, which is a result of the dipole or quadruple couplings of plasmon in each particle, was clearly monitored for the first time in the Vis-MAIRS spectra. In this manner, Vis-MAIRS is expected to be a useful tool to study aggregates of metal nanoparticles in a film.     

Preparation of Oriented Barium Titanate Thin Films by Combination of Electrophoretic Deposition with Hydrothermal Treatment

Highly oriented barium titanate (BaTiO 3) thin films on Pt substrate were fabricated by combination of electrophoretic deposition with hydrothermal treatment.The structure and morphology of thin films were characterized by X-ray diffraction and field-emission scanning electron microscopy.It is found that the titania precursor film,Ba(OH)2 concentration and hydrothermal temperature play crucial roles in the film morphology and orientation.The BaTiO3 thin films with highly (110) preferred orientation can be f...     

Characteristics of organic-inorganic hybrid plasma polymer thin films for low-κ ILD applications

This study investigated the effects of plasma power and tetraethylorthosilane (TEOS) to cyclohexene ratios on low-κ organic-inorganic hybrid plasma polymer thin films deposited on silicon (100) substrates. These films were deposited using a plasma enhanced chemical vapor deposition (PECVD) method, in addition to the electrical and mechanical properties of the resulting composites. Cyclohexene and TEOS were used as organic and inorganic precursors, respectively, with hydrogen and argon as precursor bubbler gases. Furthermore, additional argon was used as a carrier gas. The as-grown polymerized thin films were analyzed using ellipsometry, Fourier-transform infrared (FT-IR) spectroscopy, atomic force microscopy (AFM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). The ellipsometry results showed the thickness of the hybrid thin film, and the FT-IR spectra showed that the hybrid polymer thin films were completely fragmented and polymerized between cyclohexene and TEOS. AFM results showed that polymer films with a smooth surface could be grown under various deposition conditions, while TEM and XRD showed that the hybrid thin film was an amorphous plasma polymer thin film without porosity. In addition, current-voltage (C-V) curves were prepared to calculate the dielectric constants. Post-annealing was applied to investigate the thermal stability of hybrid plasma polymer thin films in the hardness, Young's modulus, thermal shrinkage, and the dielectric constant at 400 °C.     

Surface enhanced absorption and transmission from dye coated gold nanoparticles in thin films

Absorption spectra of gold nanoisland thin film and the composite film of gold having thin coating of Methylene Blue and Rh6G dyes have been studied. Thin gold nanoisland film shows surface plasmon resonance (SPR) peak in the visible wavelength range, which shifts to near infrared with an increase in the thickness of the film. It was found that thin film of gold consists of nanoparticles of different size and shape, particularly nanorods of noncylindrical shapes. A linear relation was found between SPR peak wavelength and the aspect ratio of the nanoparticles in gold thin film. Effective medium refractive index of the gold film is estimated to be ~2.5, which decreases with an increase in film thickness. The coating of dyes on gold films splits the SPR peak with an enhanced absorption. Enhancement in absorption of composite film is maximal when the dye absorption peak coincides with the SPR peak; otherwise enhancement in transmission is observed for all the wavelength range. Absorption amplitude of composite film peaks increase with an increase in the gold film thickness, which tend toward saturation for film thickness of ≥6 nm. A correlation shows that absorption spectra can be described by the Maxwell Garnett theory, when the gold nanoparticles have a nearly spherical shape for very thin film (≤6 nm).