Terfenol-D/PZT和弹性基板阵列换能器的磁电效应研究

利用共振原理,将磁致伸缩材料(Terfenol-D)、压电材料(PZT-8)复合于弹性基板上构造了一种新型的换能器.当激励磁场的频率等于或者接近于弹性基板的固有频率时,Terfenol-D将驱动弹性基板振动并发生共振,粘结于弹性基板上的压电材料的输出电压将达到最大.实验研究表明,在800 Oe偏置磁场和1Oe交变磁场激励下,在谐振点392 kHz处,阵列结构换能器的最大磁电耦合电压系数和最大输出功率分别达到了235.5 mWOe和2.403μW,相比MP层合结构换能器,分别提高了13.77%和33.7%.     

A magnetoelectric energy harvester and management circuit for wireless sensor network

This paper presents an electromagnetic energy harvesting scheme by using a composite magnetoelectric (ME) transducer and a power management circuit. In the transducer, the vibrating wave induced from the magnetostrictive Terfenol-D plate in dynamic magnetic field is converged by using an ultrasonic horn. Consequently more vibrating energy can be converted into electricity by the piezoelectric element. A switching capacitor network for storing electricity is developed. The output of the transducer charges the storage capacitors in parallel until the voltage across the capacitors arrives at the threshold, and then the capacitors are automatically switched to being in series. More capacitors can be employed in the capacitor network to further raise the output voltage in discharging. For the weak magnetic field environment, an active magnetic generator and a magnetic coil antenna under ground are used for producing an ac magnetic field of 0.2–1 Oe at a distance of 25–50 m. In combination with the supply management circuit, the electromagnetic energy harvester with a rather weak power output (about 20 μW) under an ac magnetic field of 1 Oe can supply power for wireless sensor nodes with power consumption of 75 mW at a duration of 620 ms.     

Piezocomposite ultrasonic transducer for high-frequency wire-bonding of microelectronics devices

Piezocomposite ultasonic transducers for high-frequency microelectronics wire bonding have been developed to alleviate the intrinsic mode coupling and high mechanical quality factor (Q_m) in piezoceramic transducers. In this paper, a 136 kHz transducer fabricated using lead zirconate titanate (PZT)/epoxy 1–3 piezocomposite rings with 77 μm epoxy width and 0.89 PZT volume fraction is presented, together with a PZT piezoceramic transducer of similar structure. With the guide of a finite-element modal analysis, the nature of most experimental resonance modes in the transducers is identified. The low lateral coupling of the composite rings effectively suppresses the non-axial and many other spurious resonances in the composite transducer, retaining only the axial-mode resonances. Due to the effect of epoxy damping, the composite transducer exhibits a 2.4-times reduction in Q_m to a desired low value of 296. This transducer has good potential to be used in commercial wire bonders for enabling high-frequency wire-bonding technology.     

铁磁合金/压电材料复合磁电效应研究

利用高机械品质因数的FeNi基弹性合金,构造了不等长的FeNi基弹性合金/压电叠层磁电复合材料。采用等效电路法分析了复合结构的磁电电压系数、谐振频率、机械品质因数和最大输出功率与磁致伸缩—压电层长度比之间的关系。结果表明:磁电电压系数、机械品质因数及最大输出功率随着FeNi基弹性合金长度的增加而增大并趋于常数,谐振频率随着FeNi基弹性合金长度的增加而减小。     

Performance enhancement of a piezoelectric linear array transducer by half-concave geometric design

A geometric design for array elements of a piezoelectric linear array transducer is proposed and evaluated. The design concept is based on the half-concave geometry, in which the radiating surface is concave while the other surface remains plane. A ∼1.8 MHz piezoelectric linear array transducer with half-concave elements has been designed, fabricated and evaluated. A dicing method was developed to shape the concave surfaces of the piezo elements and matching layers. By comparing the transducer performance, a traditional linear array transducer with similar dimension has been fabricated. It was found that the half-concave array transducer has significantly broader −6 dB bandwidth (96%), higher effective electromechanical coupling coefficient (0.62), and lower insertion loss (−21 dB) compared to those (76%, 0.55, and −25 dB, respectively) of the plane array transducer. The enhanced coupling coefficient and bandwidth are caused by the broaden resonance of the elements, which is induced by the continuously varying thickness in the designed geometry. The increased sensitivity is mainly attributed to the focused radiating surface.     

Polysilicon nanofilm pressure sensor

Utilizing 80 nm polysilicon nanofilm as piezoresistors, a pressure sensor with high performance is developed. The complete fabrication process is described. The pressure properties of the sensor were measured at the temperature from 0 to 200 °C. For 0.6 MPa full scale pressure, the sensitivity is 23.00 mV/V/MPa at 0 °C and 18.27 mV/V/MPa at 200 °C, the temperature coefficient of sensitivity (TCS) is about −0.098%/ °C without any compensation. The temperature coefficient of offset (TCO) is about −0.017%/ °C. Because of the good piezoresistive and temperature characteristics of polysilicon nanofilm, the pressure sensor demonstrates a better performance.     

Improved field emission characteristics of screen-printed CNT-FED cathode by interfusing Fe/Ni nano-grains

Carbon nanotube (CNT) cathode with and without interfusing nano-metal particles was prepared using screen-printing technology. For the good electric conductivity of metal, the turn-on electric field of the Fe/Ni and CNT composite film (Fe/CNT film) decreases to 1.42 V/μm comparing with the usual CNT film of 2.45 V/μm, and the emission current increases from 60 μA to 440 μA at an applied electric field of 2.3 V/μm. Furthermore, the field enhancement factor β increases from 1721 to 3242. By characterizing the prepared samples via X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM), it is found that carbide Fe₃C phase is formed in Fe/CNT film, and the metal particles are filled in the interspaces of CNTs. It is evaluated that benefiting from good electrical conductivity and chemical inertness of metal carbide, Fe/CNT film achieves high emission characteristics and emission uniformity.     

Fe-Ga合金换能器动态输出特性分析

Fe-Ga合金具有应变大、响应时间短、能量密度高、磁机耦合系数高、驱动方式简单等优点.Fe-Ga合金换能器在高频驱动电流下会产生涡流损耗.驱动电流频率越大,集肤效应越明显,涡流损耗越大,磁场分布越不均匀,从而影响换能器的输出位移和输出功率.首先基于麦克斯韦方程组分析了不同频率下Fe-Ga棒内的磁场分布,结合结构动力学模块分析了Fe-Ga合金换能器棒内的磁场分布,进而得到Fe-Ga合金换能器的输出位移和频率的关系.结果表明,所使用的Fe-Ga合金换能器共振频率为700 Hz,最大输出位移为6μm.     

Micropatterning of sandwiched FeCuNbSiB/Cu/FeCuNbSiB for the realization of magneto-impedance microsensors

This work presents the fabrication of magnetic field microsensors based on the magneto-impedance phenomenon and dedicated to NDC applications. The multilayer structure, ferromagnetic/conductive/ferromagnetic, is composed of a copper layer sandwiched with two Finemet^? alloy films. The later, initially an amorphous material, is nanocrystallized by heat treatment. The fabrication process has been optimized in order to minimize coercivity and induce transversal anisotropy. The technological defects induced by the lift-off and sputtering processes change the magneto-impedance properties of the sensors. Eliminating these defects permits the sensor to reach to a sensitivity of 1,200 V/T/A at 30 MHz with a bias field larger than the anisotropy field and without hysteresis. The angular dependence of the sensitivity shows that the sensor is only sensitive to the axial component of the magnetic field.     

Spin-valve planar Hall sensor for single bead detection

The planar Hall effect (PHE) sensor with a junction size of 3 μm × 3 μm for a single micro-bead detection has been fabricated successfully using a typical spin-valve thin film Ta(5)/NiFe(16)/Cu(1.2)/NiFe(2)/IrMn(15)/Ta(5) nm. The PHE sensor exhibits a sensitivity of about 7.2 μV Oe^?1 in the magnetic field range of ±7 Oe approximately. We have performed an experiment to illustrated the possibility of single micro-bead detection by using a PHE sensor. A single micro-bead of 2.8 μm diameter size is secluded from 0.1% dilute solution of the Dynabeads^® M-280 dropped on the sensor surface and is located on the sensor junction by using a micro magnetic needle. The comparison of the PHE voltage profiles in the field range from 0 to 20 Oe in the absence and presence of a single micro-bead identifies a single Dynabeads^® M-280, the maximal signal change as large as ΔV ～ 1.1 μV can be obtained at the field ～6.6 Oe. The results are well described in terms of the reversal of a basic single domain structure.     

Design of membrane actuator based on ferromagnetic shape memory alloy composite for synthetic jet applications

The active flow control (AFC) technology has been studied and shown that it can help aircraft improve aerodynamic performance and jet noise reduction. AFC can be achieved by a synthetic jet actuator injecting high momentum air into the airflow at the appropriate locations on aircraft wings. To produce strong synthetic jet flow at high frequency, a new membrane actuator based on ferromagnetic shape memory alloy (FSMA) composite and hybrid mechanism was designed and constructed. The hybrid mechanism is the stress-induced martensitic phase transformation caused by large force due to large magnetic field gradient, thus enhancing the displacement, as the stiffness of shape memory alloy reduces due to the martensitic transformation. This sequential event can take place within milliseconds. The high momentum airflow will be produced by the oscillation of the circular FSMA composite diaphragm close to its resonance frequency driven by electromagnets. Due to large force and martensitic transformation on the FSMA composite diaphragm, the membrane actuator that we designed can produce 190 m/s synthetic jets at 220 Hz.     

The effect of transmittance and luminous efficiency with the application of cathode mesh mask in transparent organic light‐emitting devices

With the development of organic light‐emitting devices (OLEDs), the transparent OLED is also restricted by its efficiency and stability. Thus, in order to improve the transmittance and luminous efficiency of transparent OLED, the cathode mesh mask combined with Al:Ag alloy is adopted to prepare the cathode of transparent OLED, which would enhanced the luminance, efficiency, and transmittance of the device. With the same driving voltage, the device has the highest brightness, when the cathode thickness is 85 nm. At the voltage of 13 and 14 V, the luminance, for bottom‐emission and top‐emission, is 9501 cd/m² and 1840 cd/m², respectively. The entire transmittance of the device has achieved about 78% at a 480 nm wavelength.     

Design and performances of immunoassay based on SPR biosensor with Au/Ag alloy nanocomposites

A novel method for detecting human IgG is reported, which is based on Au/Ag alloy nanocomposites for amplifying surface plasmon resonance response. Au/Ag alloy nanocomposites were characterized in detail by transmission electron microscopy (TEM), UV-vis absorption spectroscopy and X-ray photoelectron spectroscopy (XPS). Covalent immobilization of about 24 nm diameter of Au/Ag alloy nanocomposites on the Au film results in a large shift in resonance wavelength, which is due to the increase of the thickness of the sensing membrane, high dielectric constant of Au/Ag nanoparticles, and electromagnetic coupling between Au/Ag alloy nanocomposites and Au film. The SPR biosensor based on Au/Ag alloy nanocomposites exhibits a satisfactory response for human IgG in the concentration range of 0.15-40.00 μg mL⁻¹. While the biosensor based on Au nanoparticles shows a response in the concentration range of 0.30-20.00 μg mL⁻¹ and the biosensor based on Au film shows a response for human IgG in the concentration range of 1.25-20.00 μg mL⁻¹.     

Ferromagnetic shape memory flapper

A new method for propulsion using a Ni₂MnGa ferromagnetic shape memory flapper is introduced. We optically examine the magnetic field induced strain of pure shear by means of a state of the art generator that provides alternating magnetic fields of 7000 Oe at frequencies of up to 100 Hz. Preliminary measurements show local shear deformation of about 5%, which open new frontiers in propulsion mechanisms.     

Design methodology and fabrication process of a microinductor for the next generation of DC–DC power converters

Magnetic materials used in cored microinductors to supersede ferrite in the 0.5-10 MHz frequency range are investigated in this article. The performance of electrodeposited nickel–iron, cobalt–iron–copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Although the present inductor achieves 77% power efficiency at 500 KHz for 24.7 W/cm3 power density, an optimized process predicts a power efficiency of 97% for 30.83 W/cm3 power density. The main issues regarding microinductor design and performance are discussed.     

The V-Zn binary system: New experimental results and thermodynamic assessment

Experimental investigation followed by thermodynamic assessment of the V-Zn system was carried out in the present study. A series of V-Zn alloys annealed at various temperatures were examined using scanning electron microscopy coupled with energy dispersive spectroscopy/wavelength dispersive X-ray spectrometer, X-ray diffraction and differential thermal analysis. It was confirmed that V Zn₁₆, with a V content of about 5.8 at.%, was indeed an equilibrium phase. DTA results indicated that the peritectic temperature for V Zn₁₆ was about 427 ^°C. Two new metastable compounds, V Zn₉ and V ₃Zn₂, with V contents of 8.5-11.3 at.% and 60 at.%, respectively, were discovered. DTA results together with SEM-EDS examinations revealed that V Zn₉ was formed at around 450 ^°C in Zn75V25 alloy with a cooling rate greater than 12 ^°C/min. The V Zn₉ phase, however, decomposed into V Zn₃ and liquid Zn when the alloy was held above 442 ^°C. The peritectic temperatures for two equilibrium phases, V ₄Zn₅ and V Zn₃, were 651 ^°C and 621 ^°C, respectively. These measurements were slightly lower than the values determined in prior studies. The onset temperature for forming V Zn₃ decreased significantly with increasing cooling rate while its exothermic peak widened during fast cooling. These phenomena indicated that both the nucleation and growth processes for V Zn₃ were kinetically challenged.In addition, the solubility of Zn in α-V was measured. It was 2.1 at.%, 2.5 at.%, 2.6 at.%, 2.9 at.% and 3.3 at.% at 450 ^°C, 600 ^°C, 670 ^°C, 800 ^°C and 1000 ^°C, respectively. Based on the results obtained in the present study and previous investigations, the V-Zn system was reassessed thermodynamically. The assessment was in good agreement with experimental results.     

一种高频宽带水声换能器的研制

研制了一种宽带、高频压电复合材料圆环阵水声换能器.该换能器的宽带结果是通过采用降低压电材料机械品质因数Qm值和多模耦合振动两种方法实现的.通过径向切割压电陶瓷圆环、灌注环氧树脂得到压电复合材料圆环,再将不同壁厚的压电复合材料圆环轴向叠堆而成敏感元件,对敏感元件进行模具封装,引出电极引线,得到换能器.利用ANSYS软件对结构进行仿真,得到敏感元件谐振频率和带宽随压电陶瓷圆环厚度、高度和平均半径的变化规律,并根据仿真结果确定了换能器敏感元件的最优设计方案.将由最优参数得到的两个压电复合材料圆环轴向叠堆,制作了双圆环叠堆复合材料换能器.经测试,该换能器形成了明显的双模耦合振动,该换能器谐振频率为375 kHz,其-3 dBd工作带宽为90 kHz,最大发送电压响应达148 dB.实现了换能器的高频、宽带、水平全向发射声波的设计目标.     

Morphology and magnetic properties of electroplated Co-rich Co-Zn thin films

This work explores the microstructure and magnetic properties of electrodeposited Co-Zn thin films. Using pulse-reverse electroplating technique, Co-rich Co-Zn films are deposited 0.4–1.9 μm thick from aqueous sulfate-based baths at low temperature (55°C). The influence of current density (25–100 mA/cm²) and electrolyte Zn concentration (0–0.28 M) on the microstructure and magnetic properties are investigated. All of the Co-Zn films exhibit higher out-of-plane coercivity, as compared to in-plane. With increasing current density, the out-of-plane coercivity decreases from 50 to 40 kA/m (628–500 Oe). The influence of the Zn concentration in the electrolyte is more pronounced, affecting the grain size, film composition, and magnetic properties. The best magnetic properties were obtained from a bath with 0.21 M Zn and an average current density of 25 mA/cm², resulting in a Co₉₇Zn₃ composition and an out-of-plane coercivity of 92 kA/m (1,160 Oe).     

Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation

We propose a new flexible piezoelectric micromachined ultrasonic transducer (pMUT) array integrated on flexible polydimethylsiloxane (PDMS) that can be used in studying brain stimulation by ultrasound. To achieve the technical demands of a high sound pressure level and flexibility, a diaphragm-type piezoelectric ultrasound transducer array was manufactured with 55 μm-thick bulk lead zirconate titanate (PZT) that was thinned after bonding with a silicon wafer. The ultrasound transducer array was then strongly bonded onto a PDMS substrate using an oxygen-plasma treatment followed by precise dicing with a fixed pitch to achieve flexibility. The radius of curvature was smaller than 5 mm, which is sufficient for attachment to the surface of a mouse brain. After a thinning process for the PZT layer, we observed that the PZT layer still maintained a high ferroelectric property. The measured remnant polarization (P_r) and coercive field (E_c) were 28.26 μC/cm² and 79 kV/cm, respectively. The resonant frequencies of fabricated pMUT elements with different membrane sizes of 700, 800, 900, 1200 μm in diameter were measured to be 694.4, 565.4, 430.8, and 289.3 kHz, respectively. By measuring the ultrasound output pressure, a pMUT showed a sound intensity (I_sppa) of 44 mW/cm² at 80 V, which is high enough for low-intensity ultrasound brain stimulation.

     

A low cost n-SiCN/p-SiCN homojunction for high temperature and high gain ultraviolet detecting applications

A novel n-SiCN/p-SiCN homojunction was developed on Si substrate for low cost and high temperature ultraviolet (UV) detecting applications. The current ratio of the junction under −5 V bias, with and without irradiation of 254 nm UV light are 1940 and 96.3, at room temperature and 175 °C, respectively. Compared to the reported UV detectors with material of 4H-SiC or β-SiC, the developed n-SiCN/p-SiCN homojunction has better current ratio in both room and elevated temperature.