静电梳齿驱动结构的稳定性分析

静电梳齿驱动结构的最大驱动位移主要受限于其侧向不稳定性,即当驱动电压接近吸合电压时,静电梳齿驱动结构的活动梳齿与固定梳齿发生吸合,导致静电梳齿驱动器失效.建立典型静电梳齿驱动结构的稳定性分析模型,研究梳齿驱动结构稳定性的影响因素,并进行理论分析、仿真分析和实验验证.结果表明:支撑梁结构的纵/横刚度比是影响静电梳齿驱动结...     

微谐振器结构性能的有限元分析

微谐振器是试飞测试系统的重要组成部件,微谐振器的性能影响到试飞测试系统的精确度.为了提高微谐振器的性能,在传统结构的基础上,提出改变微谐振器中折叠梁、驱动梳齿等结构的尺寸来改善其性能.运用有限元法对不同结构尺寸下的微谐振器进行模态、品质因子分析.仿真结果表明,横向微谐振器的一阶模态频率的大小很大程度上受到折叠梁尺寸的影响;静电梳齿的尺寸设计中,梳齿的宽度是影响驱动力和品质的一个关键因素.仿真结果表明,对提高微谐振器的性能具有一定的指导意义.     

静电梳齿结构横向间隙的边缘效应分析

提出静电驱动梳齿结构横向静电力的边缘效应问题.通过对传统平行板电容器的静电力分析,着重研究了横向梳齿间距和驱动电压对边缘效应与静电力的影响,并与Ansoft有限元仿真结果对比.结果表明:当大间隙时,梳齿受到的边缘效应不明显,但较大电压时会出现静电力与电压平方的非线性现象;当小间隙时,平行板电容器模型公式不再适用,间隙值越小,电压越大时,耦合作用越明显,梳齿横向静电力越大,受到边缘效应的影响越大,横向静电力不再为恒定值.     

静电梳齿微谐振器结构参数化设计

从理论上分析静电梳齿微谐振器的机械力学特性,给出了活动梳齿的横向谐振频率解析解。鉴于目前静电微谐振器模拟仿真中存在的问题,提出利用基于MAST语言实现的MEMS宏模块建立微谐振器系统级通用仿真模型,为验证外围电路提供了基础。仿真结果与理论模态分析相一致,验证了模型的有效性。通过谐振频率对结构参数的敏感性分析为优化谐振器性能提供基础,使工作模态远离其他高阶模态;合理安排激励电极,抑制一阶模态扰动。敏感性仿真表明:在横向振动微谐振器中,工作模态谐振频率随梁长的增加而减小;随梁宽的增加而增大;结构层厚度对横向振动频率没有影响;梳齿部分所有参数的变化造成频率的反向变化。     

基于MEMS的微位移传感器及其应用研究

对一种基于MEMS探针进行开发,以实现微纳米尺度下的几何量测量。该探针是静电梳齿型结构,含有定齿和连接有主梁的动齿。主梁顶端的探针能够感知样品表面形貌而引起梳齿间位移,梳齿间位移能够带来梳齿间电容的变化。设计了测头的电容信号检测电路。搭建测试系统,利用该系统进行进针实验,标定测头的灵敏度为2.323nm/mV,实验表明测头的非线性误差小于0.22%。利用该测头作为SPM测头,搭建小型SPM系统,对108nm台阶高度的光栅结构进行了扫描。     

一种新型解耦陀螺的结构及电路设计

提出了一种新型的静电驱动微机械陀螺结构,采用两组对称的梳齿结构作为驱动电极,同时采用中央质量块栅格和另外一组梳齿两种结构检测感应模态的振动.该结构阻尼系数小,可达到较高的测量分辨率和准确率.本文采用解析方法和有限元法分析了该结构的振动阻尼特性、机械解耦和噪声特性以及梳齿结构的电磁学特性.提出了该结构的驱动电路和信号检测电路,并对电路特性进行了仿真分析.     

低真空封装的新型变电容面积MEMS惯性传感器阶跃响应特性分析

一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点.通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较.结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声.以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率.     

低真空封装的新型变电容面积MEMS惯性传感器阶跃响应特性分析

一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点。通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较。结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声。以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率。     

执行器饱和T-S模糊系统的鲁棒耗散容错控制

研究了一类执行器饱和状态变时滞T-S模糊系统的鲁棒容错控制问题. 通过时滞相关Lyapunov函数和对状态的椭球域约束, 基于线性矩阵不等式技术, 提出了非线性系统稳定的不变集条件和模糊鲁棒耗散容错控制器存在的充分条件. 控制方案的设计结果不仅为执行器饱和状态变时滞T-S模糊系统的无源控制和H1鲁棒控制建立了统一框架, 而且保证了闭环控制系统对执行器故障的稳定性和容错性. 最后以时滞倒车系统的控制仿真验证了方法 的有效性.     

自抗扰控制技术在微机电换能器中的应用

自抗扰技术, 作为一门新兴的鲁棒控制技术, 能够成功补偿微机电制造上的缺陷以及周围环境的扰动, 从而提高微机电传感器和执行器的性能, 增加它们的测量及移动精度. 本文介绍了自抗扰技术在微机电陀螺仪和静电执行器两大微机电换能器上的应用. 通过使用此项控制技术, 微机电陀螺仪可精确测量并输出匀速及时变角速度.此外, 一种模型辅助自抗扰控制器被首次应用到微执行器上. 此模型辅助自抗扰控制器建立在部分模型已知的基础上. 它能够在外干扰存在的情况下, 把静电执行器的位移范围提高到电容间距的99%. 模型辅助自抗扰控制器的抗噪声能力也优于传统的自抗扰控制器. 作者用仿真和实验结果向读者展示了自抗扰技术在微机电领域的鲁棒性, 有效性和实用性.     

Tolerance analysis for comb-drive actuator using DRIE fabrication

Deep reactive ion etching (DRIE) process is specially invented for bulk micromachining fabrication with the objective of realizing high aspect ratio microstructures. However, various tolerances, such as slanted etched profile, uneven deep beams and undercut, cannot be avoided during the fabrication process. In this paper, the origins of various fabrication tolerances together with its effects on the performances of lateral comb-drive actuator, in terms of electrostatic force, mechanical stiffness, stability and displacement, are discussed. It shows that comb finger with positive slope generates larger electrostatic force. The mechanical stiffness along lateral direction increases when the folded beam slants negatively. The displacement is 4.832 times larger if the comb finger and folded beam are tapered to +1° and −1°, respectively. The uneven deep fingers generate an abrupt force and displacement when the motion distance reaches the initial overlap length. The undercut reduces both the driving force and the mechanical stiffness of the lateral comb-drive actuator. The fabricated comb-drive actuator, with comb finger of +1° profile and 0.025 μm undercut, and folded beam of −1° slope and 0.075 μm undercut, is measured and compared with the models where both show consistent results. These analytical results can be used to compensate the fabrication tolerances at design stage and allow the actuators to provide more predictable performance.     

微陀螺梳齿静电驱动力的计算方法

准确计算静电力是分析微机械陀螺力学特性的关键.文章基于微陀螺静电驱动原理,介绍了微梳齿结构的静电场计算的无限大平板模型,边缘效应模型,拐角效应模型三种模型.推导了三种模型的电容计算公式和静电力计算公式.通过数值计算和有限元计算,得到交叠长度变化时,不同计算模型的电容和静电驱动力的对比和各种模型的适用范围.说明在微尺度条...     

Nonlinear feedback control and trajectory tracking of vehicle

This paper mainly studies nonlinear feedback control applied to the nonlinear vehicle dynamics with varying velocity. The main objective of this study is the stabilisation of longitudinal, lateral and yaw angular vehicle velocities. To this end, a nonlinear vehicle model is developed which takes both the lateral and longitudinal vehicle dynamics into account. Based on this model, a method to build a nonlinear state feedback control is first designed by which the complexity of system structure can be simplified. The obtained system is then synthesised by the combined Lyapunov–LaSalle method. The simulation results show that the proposed control can improve stability and comfort of vehicle driving. Moreover, this paper presents a lemma which ensures the trajectory tracking and path-following problem for vehicle. It can also be exploited simultaneously to solve both the tracking and path-following control problems of the vehicle ride and driving stability. We also show how the results of the lemma can be applied to solve the path-following problem, in which the vehicle converges and follows a designed path. The effectiveness of the proposed lemma for trajectory tracking is clearly demonstrated by simulation results.     

Development of Three-Dimensional Microstages Using Inclined Deep-Reactive Ion Etching

Three-dimensional (3-D) microstages driven by electrostatic comb actuators that provide continuous motion along three axes (x,y , and z ) were designed and fabricated. Each 3-D microstage consisted of sets of traveling tables, suspension systems, and comb actuators. To convert lateral displacement of the comb actuators to vertical motion, one suspension system incorporated leaf springs inclined to a substrate. To efficiently construct the inclined leaf springs, we devised a fabrication technique that uses deep reactive ion etching. Three-dimensional microstages were then fabricated in a 20-mum-thick device layer on a silicon-on-insulator wafer. The maximum vertical (z) displacement of this 3-D microstage was 2.6 mum, and the maximum lateral displacement (x and y) was more than 6 mum in each direction, achieved by using support suspensions to suppress the interference between the comb actuators. A 3-D microstage was then installed in a commercial atomic force microscope, and a 3-D image of a grating was successfully measured without hysteresis using this 3-D microstage as the scanning device.     

一类非线性系统的全局快速有限时间鲁棒控制

研究一类非线性系统的全局快速有限时间鲁棒控制问题.借助于符号函数技术和快速有限时间稳定性理论,构造一个新的Lyapunov函数,确保所设计的非光滑控制器能够处理系统的多种不确定性,且可以缩短系统状态的收敛时间.最后,通过一个仿真实例来说明所提出控制策略的有效性.     

Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density

This paper presents a design of a comb finger shape and calculation of a trapezoidal-shaped electrostatic comb-drive actuator (TECA) in order to aim a higher electrostatic force density and larger displacement in comparison with the typical rectangular-shaped electrostatic comb-drive actuator (RECA). Relation between a beam’s stiffness and a driving voltage has been examined to predict a pull-in effect occurring in TECA. Micro fabrication and characterization of TECA and RECA systems are performed by using a standard SOI-MEMS technology. Theoretical and experimental results confirm the strong points of TECA’s structure (similar to the dimensions of RECA) such as a larger number of movable comb finger arrayed at the same length and larger displacement. At driving voltages of 47.9 and 50 (V), the calculation and measurement displacement of TECA are approximately 2.2 and 1.78 times larger than that of RECA, respectively.

     

Optimal robust vehicle motion control under equality and inequality constraints

In this paper, a new robust controller is proposed to improve the motion control performance of an autonomous four-wheel steering vehicle. The vehicle is subject to time-varying uncertainties caused by parameter perturbation and unmodeled disturbance. First of all, the vehicle motion control problem is modeled as a constraint-following problem with the goal to drive the vehicle system to follow the given constraints. For safety reasons, inequality constraints are imposed on the lateral displacement of the vehicle. Next, the diffeomorphism mapping method is used to deal with the inequality constraints in the vehicle motion control, and the constrained lateral displacement space is mapped to an unbounded space. On this basis, a new multi-parameter robust constraint-following control is designed. Based on Lyapunov stability theory, the approximate constraint tracking performance of the path tracking system is proved. In order to make a trade-off between the system performance and control cost, a multi-parameter optimization problem is established, and the optimal robust controller is obtained. Last, the main theoretical results are verified by the Carsim-Simulink co-simulations.     

Bayesian hybrid state estimation for unequal-length batch processes with incomplete observations

This paper investigates state estimation problem for batch processes with unequal-length batches as well as incomplete observations. A Bayesian hybrid state estimation method is proposed based on two dimensional (2D) correlations of states. The states of equal-length segment of time are estimated according to both within-a-batch and batch-to-batch correlations, and the states of unequal-length segment are obtained according to the correlations within the batch. In this way, the batch process states can be achieved in both equal-length and unequal-length situations, of which the latter one is a more general case. In order to approximate state distribution of nonlinear system and to deal with the problem of incomplete observations, particle filter (PF) is employed. The proposed method shows its superiority with a nonlinear system and a gas-phase reaction process. Compared to a typical existing method, the proposed method provides better estimation accuracy in the situation of equal-length batches, also it shows less sensitivity to incomplete observations.     

平面系统稳定性的间接方法

利用Ｒｏｕｔｈ判据得到的间接检验矩阵特征值的方法平面系统的稳定性问题。对于线性系统,该系统法给出平面区间矩阵稳定性的充要条件。对于非线性系统,基于Ｊａｃｂｉａｎ猜想的已知结果。