不同衬底温度生长的La_(0.5)Sr_(0.5)CoO_3薄膜椭圆偏振光谱研究

采用脉冲激光沉积法(PLD)在不同Si(100)衬底温度下制备了La_(0.5)Sr_(0.5)CoO_3(LSCO)导电金属氧化物薄膜.X射线衍射(XRD)分析表明,随着衬底温度升高LSCO薄膜的结晶质量增加,在650℃和700℃下制备的薄膜是具有单一钙钛矿结构的多晶薄膜.通过椭圆偏振光谱仪测量了400～1100nm波长范围内该导电金属氧化物薄膜的光学性质,采用双Lorentz振子色散关系及三相结构模型(Air/LSCO/Si)拟合获得了薄膜的光学常数.结果表明,薄膜的折射率随着衬底温度的升高而减小,然而在可见-近红外波长范围内消光系数随着衬底温度的升高而增大.这主要与薄膜的晶化质量和导电性能有密切的关系.     

La0.5Sr0.5CoO3薄膜的化学溶液法制备及椭偏光谱研究

用化学溶液沉积法在Si衬底上制备了La0.5Sr0.5CoO 3(LSCO)导电薄膜.X-射线衍射结果表明退火温度600℃可以使LSCO薄膜晶化,薄膜没 有明显的择优取向并呈单一的钙钛矿相.原子力显微镜研究结果表明LSCO薄膜表面平整、无 裂纹及晶粒尺寸较大.用椭偏光谱仪测量了波长300～1700nm范围内LSCO薄膜的椭偏光谱.用适当的拟合模型进行拟合,获得了LSCO 薄膜的光学常数(包括折射率,消光系数,吸收系数等)谱.     

铁电薄膜底电极La0.5Sr0.5CoO3的结构及电性能研究

采用溶胶-凝胶(Sol-Gel)法在Si衬底上沉积一层La0.5Sr0.5CoO3(LSCO)薄膜底电极,并在不同的退火温度下表征薄膜的各种性质.X线衍射表明在550～750℃退火温度下制备的LSCO薄膜呈(110)取向的钙钛矿结构;谢乐公式估算薄膜的晶粒尺寸为25～50 nm.扫描电子显微镜(SEM)观察结果显示:薄膜表面平整,结构致密.运用四探针法测量薄膜的体电阻,结果表明,750℃退火温度后渗氧处理可获得电阻率较低的La0.5Sr0.5 CoO3薄膜.     

LSCO薄膜的制备及光学性能研究

采用化学溶液沉积法在Pt/TiO2/SiO2/Si衬底上制备LaxSr1-xCoO3(简称LSCO)导电薄膜,对不同的La/Sr比以及掺入Ni的情况下LSCO导电薄膜的红外光学性质进行了比较研究.结果表明:LSCO薄膜的红外吸收与La/Sr的化学计量比值有关,当La/Sr为1∶1时,LSCO薄膜的红外吸收最强;在LSCO薄膜中掺入一定量的Ni后,其红外光吸收将会增强,这说明掺Ni有利于提高基于LSCO薄膜电极的铁电探测器的红外吸收能力.     

La0.5Sr0.5CoO3的化学溶液淀积法制备与表征及其应用

采用化学溶液淀积法制备了具有纯钙钛矿结构和良好导电性能的La_(0.5)Sr_(0.5)CoO_3(LSCO)薄膜。LSCO的电阻率随着退火温度的升高、退火时间的增长和厚度增加而减小。650°C退火可以得到7mΩ·cm的电阻率。分别在LSCO和Pt衬底上制备了Bi_4Ti_3O_(12)(BTO)薄膜,分析结果表明,使用LSCO衬底对BTO的析晶有影响,击穿电压、铁电特性均有较大改善。     

BST/LSCO异质结构的研究

利用脉冲激光沉积法在STO(001)基片上外延生长了La0.5Sr0.5CoO3(LSCO)导电氧化物薄膜,研究了基片温度对LSCO薄膜结构和电性能的影响,并制备了Ni-Cr/BST/LSCO多层膜结构。XRD谱发现,沉积温度在450~700℃均能得到高度(00 l)取向的LSCO薄膜,LSCO(002)峰的半高峰宽FWHM=0.1°~0.2°;在LSCO薄膜上制备的BST介质膜具有良好的c轴取向和较高的表面平整度,其εr约为470,tgδ为0.036~0.060。     

电沉积法制备SnS薄膜

采用了电沉积在SnO2透明导电玻璃上制备了硫化锡（SnS)薄膜，并对用电化学法实现Sn和S共沉积的条件参数进行了理论探讨，实验中，利用SnCl2和Na2S2O3的混合水溶液作为电沉积液制备了均匀的SnS薄膜，对实验参数进行了优化，对薄膜进行了X－射线衍射（XRD），扫描电子显微（SEM）测量及光学测试，。实验发现，制备的薄膜为多晶的斜方晶系结构，晶粒大小约为150nm，直接光学带隙在1．36－1．73eV之间可调。     

化学溶液法制备的Ba0.9Sr0.1TiO3薄膜的结构及光学特性研究

采用高度稀释的前驱体溶液在LaNiO3(LNO)薄膜上沉积了Ba0.9Sr0.1TiO3(BST)薄膜。X-射线衍射分析表明BST薄膜呈高度的（100）择优取向。原子力显微镜测量发现制备的BST薄膜具有大的晶粒尺寸80-200nm。用椭偏光谱仪测量了光子能量为0.7-3.4eV范围内BST薄膜的椭偏光谱，用Cauchy模型描述BST薄膜的光学性质，获得了BST薄膜的光学常数谱和禁带宽度Eg=3.36eV。     

玻璃基LSCO/PZT/LSCO电容器的制备和铁电性能

采用磁控溅射法制备La0.5Sr0.5CoO3(LSCO)薄膜、sol-gel法制备Pb(Zr0.4Ti0.6)O3(PZT)薄膜,在玻璃和Ti-Al/Si衬底上构架了LSCO/PZT/LSCO电容器,研究了衬底对LSCO/PZT/LSCO电容器结构和铁电性能的影响。研究发现:虽然生长在两种衬底上的PZT薄膜均为钙钛矿结构多晶薄膜,但是,生长在玻璃衬底上的LSCO/PZT/LSCO电容器具有更好的铁电性能。玻璃基LSCO/PZT/LSCO电容器的剩余极化强度(Pr)为28×10–6C/cm2,矫顽电压(Vc)为0.96V;而硅基LSCO/PZT/LSCO电容器的Pr为25×10–6C/cm2,Vc为1.05V。     

PbZr0.52Ti0.48O3薄膜红外椭圆偏振光谱研究

用磁控溅射法在Pt/Ti/SiO2 /Si衬底上制备了PbZr0 .52 Ti0 .4 8O3(PZT)薄膜 .XRD结果表明经过退火后的PZT薄膜呈现多晶结构 .通过红外椭圆偏振光谱仪测量了λ为 2 .5～ 12 .6 μm范围内PZT薄膜的椭偏光谱 ,采用经典色散模型拟合获得PZT薄膜的红外光学常数 ,同时拟合得到未经处理的PZT薄膜和退火后PZT薄膜的厚度分别为 45 4.2nm和 45 0 .3nm .最后通过拟合计算得到结晶PZT薄膜的静态电荷值为 |q|=1.76 9± 0 .0 2 4.这说明在磁控溅射法制备的PZT薄膜中 ,电荷的转移是不完全的 .     

Structural and Electrical Characters of Ba0.6Sro.4TiO3/La0.5Sr0.5CoO3 Thin Films by Plus Laser Deposition

Epitaxial Ba0.6Sr0.4TiO3 (BST) thin films were deposited on LaAlO3 (LAO) substrates with the conductive metallic oxide La0.5Sr0.5CoO3 (LSCO) film as a bottom electrode by pulsed laser deposition (PLD). Xray relationship of BST/LSCO/LAO was [001] BST//[001]LSCO//[001] LAO. The atomic force microscope (AFM)revealed a smooth and crackfree surface of BST films on LSCOcoated LAO substrate with the average grain size of 120 nm and the RMS of 1.564 nm for BST films.Pt/BST/LSCO capacitor was fabricated to perform CapacitanceVoltage measurement indicating good insulating characteristics. For epitaxial BST film, the dielectric constant and dielectric loss were determined as 471 and 0.03, respectively. The tunabilty was 79.59% and the leakage current was 2.63×107 A/crm2 under an applied filed of 200 kV/cm. Furthermore, it was found that epitaxial BST (60/40) films demonstrate wellbehaved ferroelectric properties with the remnate polarization of 6.085 μC/cm2 and the coercive field of 72 kV/cm. The different electric properties from bulk BST (60/40)materials with intrinsic paraelectric characteristic are attributed to the interface effects.     

Structural and Electrical Characters of Ba0.6Sr0.4TiO3/La0.5Sr0.5CoO3 Thin Films by Plus Laser Deposition

Epitaxial Ba0.6Sr0.4TiO3 (BST) thin films were deposited on LaAlO3 (LAO) substrates with the conductive metallic oxide La0.5Sr0.5CoO3 (LSCO) film as a bottom electrode by pulsed laser deposition (PLD). X-ray diffraction ~2 and Ф scan showed that the epitaxial relationship of BST/LSCO/LAO was [001] BST//[001] LSCO//[001] LAO. The atomic force microscope (AFM) revealed a smooth and crack-free surface of BST films on LSCO-coated LAO substrate with the average grain size of 120 nm and the RMS of 1.564 nm for BST films. Pt/BST/LSCO capacitor was fabricated to perform CapacitanceVoltage measurement indicating good insulating characteristics. For epitaxial BST film, the dielectric constant and dielectric loss were determined as 471 and 0.03, respectively. The tunabilty was 79.59% and the leakage current was 2.6310-7 A/cm2 under an applied filed of 200 kV/cm. Furthermore, it was found that epitaxial BST (60/40) films demonstrate well-behaved ferroelectric properties with the remnate polarization of 6.085 C/cm2 and the coercive field of 72 kV/cm. The different electric properties from bulk BST (60/40) materials with intrinsic paraelectric characteristic are attributed to the interface effects.     

PbZr0.40Ti0.60O3非晶薄膜透射光谱性质研究

采用溶胶凝胶方法在石英玻璃上制备了均匀透明的PbZr0.40Ti0.60O3(PZT)非晶薄膜，测量了200-1100nm的紫外可见近红外透射光谱，根据经典的包络计算方法，同时获得薄膜在透明振荡区的折射率，消光系数以及厚度，薄膜的折射率色散关系可以通过单电子sellmeier振荡模型成功地进行解释。最后，根据Tauc's法则，得到PbZr0.40Ti0.60O3非晶薄膜的禁带宽度为3.78eV。