An I-shape linear piezoelectric actuator using resonant type longitudinal vibration transducers

Resonant type longitudinal vibration transducers are used in this work to construct a linear piezoelectric actuator with four driving feet. Totally three longitudinal transducers are integrated in I-shape to form the proposed actuator, which contains one vertical transducer and two horizontal transducers. These three transducers vibrate under longitudinal modes with certain temporal sequence, whose vibrations are superimposed in the actuator to generate elliptical motions on the four driving feet. The three transducers are tuned to be suitable dimensions, under which they have very close 1st longitudinal resonance frequencies; the working frequency of the piezoelectric actuator is designed to be about 31.3 kHz. The vibration coupling problem between the longitudinal transducers are studied by calculating the motion trajectories of the four feet. It is found that the temporal shift of the longitudinal vibrations can be used to tune the movement trajectories; the four feet can get nearly the same vertical displacements under a phase shift of 105°. At last, the vibration characteristics and mechanical output performances of a prototype are measured. The working frequency of the prototype, the maximum speed, and the maximum thrust force are measured to be 33.15 kHz, 1563 mm/s, and 158.2 N, respectively.     

压电超声无线能量传输通道阻抗特性研究

基于压电晶体沿厚度方向振动的数学模型,用等效电路法分析得到表面镀银的某型压电超声换能器的谐振频率和反谐振频率,与实测结果相符。在考虑耦合层影响条件下,建立了由外部压电换能器-金属壁-内部压电换能器所构成超声无线能量传输通道的等效电路模型,并仿真得到了通道的阻抗特性,与高精度阻抗分析仪实际测得的阻抗进行比较,验证了所建模型的准确性。     

Characteristics of a micromachined piezovalve combined with a multilayer ceramic actuator

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with six trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.     

Modeling and experimental validation of new two degree-of-freedom piezoelectric actuators

This study presents innovative two-degree-of-freedom piezoelectric actuators, which apply piezoelectric buzzers to play as a driving source. Under piezoelectric force and dry friction, the piezoelectric actuators not only can move in the Z-axis direction, but also rotate along the Y-axis. The Z-axis displacement can reach 62 mm and the rotation angle along the Y-axis can reach 270°. Compared with the literature, this innovative piezoelectric actuator design easily and rapidly achieves one degree-of-freedom translation and one degree-of-freedom rotation. Equations of motion are derived based on piezoelectric properties and Newton’s law. Two types of actuators are created in this study. In the first type, centers of two piezoelectric buzzers are attached to an arm while in the other type each rim of two piezoelectric buzzers is attached to the arm. Experimental results are compared with theoretical results. According to experimental results, the present actuator can accomplish the translational velocity of 21 mm/s, angular velocity of 3.72 rad/s, and 2.32 mN in force. This study presents a piezoelectric actuator capable of both translation and rotation, which is rare in the literature.     

Experimental analysis on autoresonant control of ultrasonically assisted drilling

The target of this paper is to employ autoresonant control technique to maintain the nonlinear oscillating mode at resonance (ultrasonic vibration at the tip of a drill bit at a desired level) during vibro-impact process. In order to achieve this, an autoresonant control system which intends to provide the possibility of self-tuning and self-adaptation mechanism for an ultrasonic vibrating system to maintain the resonant regime of oscillations automatically by means of positive feedback was developed and manufactured. The autoresonant control system was implemented through a ‘controlled variable’ transformation and amplification. Three feedback control strategies were employed depending on the attributes of the ‘manipulated variables’. Mechanical feedback control uses the displacement signal at the end of an ultrasonic transducer. The other two control strategies are current feedback control and power feedback control. The current feedback control employs the current flowing through the piezoceramic rings as the ‘controlled variable’ while power feedback control takes into account both current and power of an ultrasonic vibrating system.In order to investigate the tool effect on the established autoresonant control system, two sizes of drill bits with diameters 3 mm and 6 mm were employed in combination with three autoresonant control strategies. These were executed in drilling aluminium alloys 1050 with hardness 45 HV with a fixed rotational speed combined with several feed rates. Controlled variables, responding variables, feed force reduction were monitored. Holes quality and surface finish examinations supplement the analysis of the efficiency of the control systems.     

A piezoelectric microvalve with a flexure-hinged driving frame and microfabricated silicon sealing pair

This paper describes a piezoelectric microvalve for attitude control of micro-satellite with a mass in the range of 20–100 kg. The microvalve comprises of a driving mechanism with a flexure-hinged frame and a valve body with a silicon sealing pair. The silicon valve core with sealing rings can achieve a low leak rate with a small structural deformation. The driving mechanism using a flexure-hinged frame and piezoelectric actuators assures the microvalve normally closed and leads to a fast response of the microvalve. The response time of the driving mechanism is characterized to be as small as 0.6 ms. A maximum flow rate of 3100 mL/min is achieved at an inlet pressure of 0.6 MPa while applied with a maximum voltage of 200 V. The static power consumption is 48 mW with a driving voltage of 200 V, and the dynamic power consumption is approximately 0.9 W at 100 Hz.     

Electromagnetic energy harvesting from vibrations induced by Kármán vortex street

A new electromagnetic energy harvester for harnessing energy from vibration induced by Kármán vortex street is proposed. It converts flow energy into electrical energy by fluid flow, vortex shedding from a bluff body and electromagnetic induction. An analytical design method for the energy harvester is developed. A prototype of the energy harvester is fabricated and tested. The prototype has a volume of 37.9 cm³. Experimental results show that an output peak-to-peak voltage of nearly 20 mV in average is generated when the excitation pressure oscillates with an amplitude of 0.3 kPa and a frequency of about 62 Hz. By detecting the voltage drop across a matched load, the instantaneous power is determined as 1.77 μW under a pressure fluctuation frequency of 62 Hz and a pressure amplitude of 0.3 kPa in the Kármán vortex street.     

弯曲振动压电陶瓷换能器

介绍了一种夹心式弯曲振动压电陶瓷换能器，该换能器由压电陶瓷半圆片、前后金属盖板以及预应力螺栓三部分组成，在结构上类似于夹心式纵向振动换能器。从弯曲振动细棒的运动方程出发，得出了夹心式弯曲振动压电换能器的频率设计方程，在此基础上，进行了弯曲振动换能器设计，结果表明，利用本文得出的公式设计换能器，其共振频串的测试值与设计值基本符合。     

超声轴承用压电换能器结构设计与有限元分析

提出了一种超声轴承用新型径向挤压式压电换能器,对换能器的机电特性进行了有限元分析。明确了有限元建模方法,从模态分析角度分析压电换能器的谐振频率和径向最大振幅,依据模态分析结果对压电换能器的幅频特性进行谐响应分析,采用正交试验法对换能器结构进行优化设计,制作最佳结构压电换能器样机,并进行工作频率测试。实验结果表明,换能器径向振动谐振频率的有限元计算值与实验结果具有良好的一致性,证明了有限元计算的正确性,为超声轴承用压电换能器的设计研究提供重要价值。     

固结磨料超声磨削用压电换能器等效阻抗分析

固结磨料超声磨削加工过程中,随着负载的快速变化,压电换能器必须保持快速的频率跟踪与功率匹配响应,才能满足高效精密加工需求。该文从微观角度分析了固结磨料超声磨削的材料去除过程,通过建立压电换能器的力学模型,基于力电类比,得出压电换能器的等效阻抗与负载变化关系,即换能器的负载越大,其等效阻抗越大。当采用恒压源驱动压电换能器时,当换能器的负载越大,输出功率越小;反之,负载越小,输出功率越大,换能器无法工作在最佳状态。因此,为改善加工稳定性,提高材料表面完整性,提出了压电换能器的智能化恒流激励电源驱动方案,并进行了空载和负载状况下的电源系统测试试验,为进一步展开相关加工工艺研究奠定了坚实的基础。     

压电超声换能器的电端匹配电路及其分析

本文分析了压电超声换能器的几种匹配电路及其匹配原理,推出了超声频电发生器与换能器之间的理想匹配条件,研究了电端匹配电路对换能器的谐振频率及其有效机电耦合系数的影响,所得结论为压电超声换能器匹配电路的设计提供了一定的理论依据。     

Electromagnetic energy harvesting from flow induced vibration

A new electromagnetic energy harvester for harnessing energy from flow induced vibration is developed. It converts flow energy into electrical energy by fluid flow and electromagnetic induction. A finite element model for estimation of the generated voltage of the energy harvester is developed. A prototype of the energy harvester is fabricated and tested. Experimental results show that an output voltage of 10.2 mV_pp is generated when the excitation pressure oscillates with an amplitude of 254 Pa and a frequency of about 30 Hz. The values of the generated voltage based on the finite element computations agree well with the experiments. By detecting the voltage drop across a matched load, the instantaneous power is determined as 0.4 μW under an excitation frequency of 30 Hz and a pressure amplitude of 254 Pa in the pressure chamber.     

MEMS压电超声换能器二维阵列的制备方法

针对超声换能器阵列中阵元密度难以提升和工艺重复性差等问题,提出了一种基于硅-硅键合技术的MEMS压电超声换能器二维阵列的制备方法,并采用该方法制备了阵元间距小至150μm的密排二维换能器阵列。阵列中每个声学单元均为由上电极、压电材料(PZT)层、下电极和支撑层组成的多层膜结构,并通过其弯曲振动模式实现超声波的发射和接收。制备样品的测试结果表明,采用该方法制作MEMS压电超声换能器阵列,具有阵元间距小、工艺流程可靠、成品率高、一致性好、工作频率(2.45MHz)与设计值(2.5MHz)的吻合度高等优点,适用于医学成像等高频超声成像系统。     

电极激励超声谐振谱压电材料定征技术

超声谐振谱（RUS）是一种压电材料单样品定征技术,避免了多样品造成的结果不自洽问题。现有的谐振谱激励方法常使用超声换能器定点激励 拾取,需要有复杂的测试装置。该文提出了一种电极激励 拾取法来获取压电谐振器的超声谐振谱,该方法测试装置简单,同时还可获得模态振型的对称特性,避免了反演过程中峰丢〖JP2〗失和错峰拟合。基于现场可编程门阵列(FPGA)技术搭建了压电谐振器分组扫频激励电路,通过电荷放大器拾取谐振峰。结果表明,通过Levenberg Marquardt算法可完成测试频谱和计算频谱的匹配,成功获得了优化后压电材料参数。     

多向复合超声换能器有限元分析与试验

超声换能器是微电子封装技术的核心执行元件,为解决传统一维纵振超声换能器键合效率低、键合面不均匀及键合点不牢靠等问题,采用ANSYS仿真软件建立换能器有限元模型进行模态分析及谐响应分析,设计了一种可同时实现轴向纵振、水平弯振及竖直俯仰振动的40 kHz多向复合夹心压电式超声换能器。其中,压电部分由整圆环和可单独激励的1/4圆环陶瓷片组成。利用阻抗分析仪实物测试,得到换能器纵振、弯振及俯仰振动的阻抗 频率特性曲线。结果表明,测试值与仿真值基本一致,且结构性能参数均符合键合要求,验证了该结构的合理性。     

Design,simulation, fabrication and characterization of a micro electromagnetic vibration energy harvester with sandwiched structure and air channel

This paper presents the design, simulation, fabrication and characterization of a novel electromagnetic vibration energy harvester with sandwiched structure and air channel. It mainly consists of a top coil, a bottom coil, an NdFeB permanent magnet and a nickel planar spring integrated with silicon frame. The prototype is fabricated mainly using silicon micromachining and microelectroplating techniques. The tested natural frequency of the magnet–spring system is 228.2 Hz. The comparison between the simulation and the tested results of the natural frequency shows that the Young's modulus of microelectroplated Ni film is about 163 GPa rather than 210 GPa of bulk Ni material. Experimental results indicate that the sandwiched structure and the air channel in the silicon frame of the prototype can make the induced voltage increase to 42%. The resonant frequency of the prototype at 8 m/s² acceleration is 280.1 Hz, which results from the nonlinear behavior of the magnet–spring system. The load voltage generated by the prototype is 162.5 mV when the prototype is at resonance and the input vibration acceleration is 8 m/s² and the maximal load power obtained is about 21.2 μW when the load resistance is 81 Ω.     

超声电机性能的实验测试研究

超声电机是一种全新概念的新型电机,它利用压电材料的逆压电效应,使定子表面产生一定轨迹的微米量级的振动,进而通过摩擦耦合将振动动能转换成转子或滑块的宏观运动(转动或平动)动能,文章探究了在不同予应力的作用下电机的频率、相位对转速的影响。该研究为超声电机转速的控制提供了理论依据。     

小型压电式超声微幅振动试验台的分析与设计

通过对压电直梁弯曲振动特点进行分析,用有限元分析软件设计出一种结构简单的小尺寸压电式超声微幅振动试验台.该试验台主要由压电直梁、T字型台面及两端附加质量组成,利用压电直梁的奇数阶弯曲振动模态实现梁中间处的台面在竖直方向上的简谐振动.样机的测试结果表明,试验台输出频率涵盖范围广,台面振幅分布均匀度较好和振动幅值精度较高,可作为一种实验平台用以研究超声电机及超声振动输送(给料)中的动态接触问题.     

A surface profile reconstruction system using sinusoidal phase-modulating interferometry and fiber-optic fringe projection

A fiber-optic sinusoidal phase modulating (SPM) interferometer for surface profile reconstruction is presented. Sinusoidal phase modulation is created by modulating the drive voltage of the piezoelectric transducer. The surface profile is constructed basing on fringe projection. Fringe patterns are vulnerable to external disturbances such as temperature fluctuation and mechanical vibration, which cause phase drift and decrease measuring accuracy. We build a closed-loop feedback phase compensation system, the bias value of external disturbances superimposed on fringe patterns can be reduced to about 50 mrad, and the phase stability for interference fringes is less than 5.76 mrad. By measuring the surface profile of a paper plate for two times, the repeatability is estimated to be about 11 nm, and is equivalent to be about λ/69. For a plane with 100 × 100 points, a single measurement takes less than 140 ms, and the feasibility for real-time profile measurement with high accuracy has been verified.     

压电陶瓷驱动FSM三自由度柔性支撑设计

为了有效吸收反射镜偏转造成驱动点的横向位置偏差,保护压电陶瓷驱动器,抑制反射镜在非工作方向上的自由度,提高系统谐振频率,设计了基于压电陶瓷驱动的快速反射镜三自由度柔性支撑。首先根据压电陶瓷驱动的快速反射镜对柔性支撑的设计要求确定了由支撑杆与支撑片组成的三自由度四周式柔性支撑方案,再利用压杆稳定性理论与变形能法对支撑杆与支撑片进行参数设计,最后利用workbench对设计结果进行分析。有限元分析结果表明,直径1 mm、长度8 mm的柔性支撑杆的应用可以使压电陶瓷的剪切位移减少86.7%,柔性支撑片的应用使反射镜一阶模态为轴向平移振动,谐振频率为360 Hz,二三阶模态为反射镜两轴偏摆振动,谐振频率为420 Hz,而高阶模态在1 000 Hz以上。三自由度柔性支撑可以有效防止压电陶瓷受到剪切破坏,提高快速反射镜结构谐振频率,有利于提高系统闭环带宽。